Angular velocity sensor
First Claim
Patent Images
1. An angular velocity sensor comprising:
- first and second mass bodies;
a first frame provided at an outer side of the first and second mass bodies;
a first flexible part respectively connecting the first and second mass bodies to the first frame;
a second flexible part respectively connecting the first and second mass bodies to the first frame;
a second frame provided at an outer side of the first frame and having an inside space to accommodate the first frame;
a third flexible part connecting the first and second frames to each other; and
a fourth flexible part connecting the first and second frames to each other,wherein the first and second mass bodies are respectively disposed at both sides of the fourth flexible part,the third flexible part has a width in a Y axis direction larger than a thickness in a Z axis direction, andthe fourth flexible part has a thickness in the Z axis direction larger than a width in a X axis direction.
1 Assignment
0 Petitions
Accused Products
Abstract
Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part respectively connecting the first and second mass bodies to the first frame; a second flexible part respectively connecting the first and second mass bodies to the first frame; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other; and a fourth flexible part connecting the first and second frames to each other.
-
Citations
34 Claims
-
1. An angular velocity sensor comprising:
-
first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part respectively connecting the first and second mass bodies to the first frame; a second flexible part respectively connecting the first and second mass bodies to the first frame; a second frame provided at an outer side of the first frame and having an inside space to accommodate the first frame; a third flexible part connecting the first and second frames to each other; and a fourth flexible part connecting the first and second frames to each other, wherein the first and second mass bodies are respectively disposed at both sides of the fourth flexible part, the third flexible part has a width in a Y axis direction larger than a thickness in a Z axis direction, and the fourth flexible part has a thickness in the Z axis direction larger than a width in a X axis direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. An angular velocity sensor, comprising:
-
first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part respectively connecting the first and second mass bodies to the first frame; a second flexible part respectively connecting the first and second mass bodies to the first frame; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other; a fourth flexible part connecting the first and second frames to each other; third and fourth mass bodies; a third frame provided at an outer side of the third and fourth mass bodies; a fifth flexible part respectively connecting the third and fourth mass bodies to the third frame; a sixth flexible part respectively connecting the third and fourth mass bodies to the third frame; a fourth frame provided at an outer side of the third frame so as to be spaced apart from the third frame; a seventh flexible part connecting the third and fourth frames to each other; and an eighth flexible part connecting the third and fourth frames to each other, wherein the first and second mass bodies are respectively disposed at both sides of the fourth flexible part, wherein the third and fourth mass bodies are respectively disposed at both sides of the eighth flexible part, and the fourth frame is disposed at a side of the second frame, the seventh flexible part has a width in a X axis direction larger than a thickness in a Z axis direction, and the eighth flexible part has a thickness in the Z axis direction larger than a width in a Y axis direction. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
-
Specification