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Physical quantity sensor and electronic apparatus

  • US 9,157,927 B2
  • Filed: 04/14/2014
  • Issued: 10/13/2015
  • Est. Priority Date: 05/28/2010
  • Status: Active Grant
First Claim
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1. A physical quantity sensor comprising:

  • a rocking body supported by a first supporting portion and a second supporting portion which are disposed on a first axis, and partitioned into a first region and a second region by the first axis when viewed in plan, where each of the first and second regions is provided with a movable electrode; and

    fixed electrodes facing the movable electrode,wherein the mass of the second region is larger than the mass of the first region, andwherein the rocking body includes;

    an opening portion;

    a moveable weight portion disposed at the opening portion;

    a connection portion connecting the movable weight portion to the rocking body;

    a first arm shaped electrode portion provided toward the movable weight portion from the rocking body; and

    a second arm shaped electrode portion provided toward the rocking body from the movable weight portion and facing the first arm shaped electrode portion.

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