Scanning lens systems and methods of reducing reaction forces therein
First Claim
1. A scanning lens component of a laser beam delivery system comprising:
- a primary axis stage configured to move linearly along a primary axis in a first direction, the primary axis stage including a first central opening for receiving an incident beam of light;
a primary axis motor coupled to the primary axis stage and including a first coil and a first magnet, the first coil configured to move along the primary axis in the first direction along with the primary axis stage, and the first magnet configured to move in a second direction opposite the first direction, in response to movement of the first coil along the primary axis in the first direction a first distance that exceeds a threshold primary axis distance;
a transverse axis stage adjacent and coupled to the primary axis stage, the transverse axis stage including a second central opening substantially aligned with the first central opening and being configured to move at least linearly along a transverse axis in a third direction, the transverse axis being transverse relative to the primary axis; and
a transverse axis motor coupled to the transverse axis stage and including a second coil and a second magnet, the second coil configured to move along the transverse axis in the third direction along with the transverse axis stage, and the second magnet configured to move in a fourth direction opposite the third direction, in response to movement of the second coil along the transverse axis in the third direction a second distance that exceeds a threshold transverse axis distance.
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Accused Products
Abstract
A scanning lens component includes a primary and transverse axis stages and motors. The primary axis motor includes a first coil moving along the primary axis in the first direction along with the primary axis stage and a first magnet configured to move in a second, opposite direction, in response to movement of the first coil a first distance that exceeds a threshold primary axis distance. The transverse axis stage is adjacent and coupled to the primary axis stage and moves along a transverse axis in a third direction. The transverse axis motor includes a second coil for moving along the transverse axis in the third direction with the transverse axis stage, and a second magnet configured to move in a fourth, opposite direction, in response to movement of the second coil along the transverse axis in the third direction a second distance that exceeds a threshold transverse axis distance.
19 Citations
22 Claims
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1. A scanning lens component of a laser beam delivery system comprising:
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a primary axis stage configured to move linearly along a primary axis in a first direction, the primary axis stage including a first central opening for receiving an incident beam of light; a primary axis motor coupled to the primary axis stage and including a first coil and a first magnet, the first coil configured to move along the primary axis in the first direction along with the primary axis stage, and the first magnet configured to move in a second direction opposite the first direction, in response to movement of the first coil along the primary axis in the first direction a first distance that exceeds a threshold primary axis distance; a transverse axis stage adjacent and coupled to the primary axis stage, the transverse axis stage including a second central opening substantially aligned with the first central opening and being configured to move at least linearly along a transverse axis in a third direction, the transverse axis being transverse relative to the primary axis; and a transverse axis motor coupled to the transverse axis stage and including a second coil and a second magnet, the second coil configured to move along the transverse axis in the third direction along with the transverse axis stage, and the second magnet configured to move in a fourth direction opposite the third direction, in response to movement of the second coil along the transverse axis in the third direction a second distance that exceeds a threshold transverse axis distance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of reducing reaction forces in a scanning lens apparatus, the method comprising:
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detecting a change in positioning of a primary axis stage in a first direction coupled to a first coil of a primary axis motor, each movable along a primary axis in the first direction and in an opposite second direction; determining whether the change in the positioning of the primary axis stage along the primary axis exceeds a threshold value; moving a first magnet surrounding at least a portion of the first coil in the second direction along the primary axis, in response to the change in the positioning of the primary axis stage in the first direction, if the change exceeds the threshold value; detecting a change in positioning of a transverse axis stage in a third direction coupled to a second coil of a transverse axis motor, each movable along a transverse axis that is substantially perpendicular to the primary axis in the third direction and in a fourth direction opposite the third direction, and the transverse axis stage disposed adjacent and coupled to the primary axis stage; determining whether the change in the positioning of the transverse axis stage exceeds a threshold value; and moving the second magnet surrounding at least a portion of the second coil in the fourth direction along the transverse axis, in response to the change in the positioning of the transverse axis stage in the third direction, if the change exceeds the threshold value. - View Dependent Claims (14, 15)
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16. A scanning lens system comprising:
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a primary axis stage including a first central opening for receiving an incident beam of light, the primary axis stage movable along a primary axis in a first direction and in an opposite second direction; a transverse axis stage disposed adjacent to the primary axis stage and including a second central opening for receiving the incident beam of light, the transverse axis stage movable along a transverse axis in a third direction and in an opposite fourth direction, and the transverse axis being substantially orthogonal to the primary axis; a lens coupled to the transverse axis stage; a primary axis voice coil motor coupled to the primary axis stage and including a first coil movable with the primary axis stage and a first magnet configured to move along the primary axis in the second direction, if the primary axis stage moves a distance along the primary axis in the first direction that exceeds a first predetermined threshold value; and a transverse axis voice coil motor coupled to the transverse axis stage including a second coil movable with the transverse axis stage and a second magnet configured to move along the transverse axis in the fourth direction, if the transverse axis stage moves a distance along the transverse axis in the third direction that exceeds a second predetermined threshold value. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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Specification