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Scanning lens systems and methods of reducing reaction forces therein

  • US 9,158,084 B2
  • Filed: 10/24/2012
  • Issued: 10/13/2015
  • Est. Priority Date: 10/24/2012
  • Status: Active Grant
First Claim
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1. A scanning lens component of a laser beam delivery system comprising:

  • a primary axis stage configured to move linearly along a primary axis in a first direction, the primary axis stage including a first central opening for receiving an incident beam of light;

    a primary axis motor coupled to the primary axis stage and including a first coil and a first magnet, the first coil configured to move along the primary axis in the first direction along with the primary axis stage, and the first magnet configured to move in a second direction opposite the first direction, in response to movement of the first coil along the primary axis in the first direction a first distance that exceeds a threshold primary axis distance;

    a transverse axis stage adjacent and coupled to the primary axis stage, the transverse axis stage including a second central opening substantially aligned with the first central opening and being configured to move at least linearly along a transverse axis in a third direction, the transverse axis being transverse relative to the primary axis; and

    a transverse axis motor coupled to the transverse axis stage and including a second coil and a second magnet, the second coil configured to move along the transverse axis in the third direction along with the transverse axis stage, and the second magnet configured to move in a fourth direction opposite the third direction, in response to movement of the second coil along the transverse axis in the third direction a second distance that exceeds a threshold transverse axis distance.

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