Apparatus for coating formation by light reactive deposition

• US 9,163,308 B2
• Filed: 07/30/2009
• Issued: 10/20/2015
• Est. Priority Date: 10/17/2000
• Status: Expired due to Fees

• Current Assignee: Nanogram Corporation (Teijin Limited)
• Original Assignee: Nanogram Corporation (Teijin Limited)
• Inventors: Bi, Xiangxin, Mosso, Ronald J., Chiruvolu, Shivkumar, Kumar, Sujeet, Gardner, James T., Lim, Seung M., McGovern, William E.
• Primary Examiner(s): Kurple, Karl
• Application Number:
  US12/512,774
• Publication Number:
  US 20090288601A1
• Time in Patent Office: 2,273 Days
• Field of Search: 118/620, 118/722, 118/50.1, 118/641, 118/503, 427/215, 427/219, 427/227, 427/561, 427/572, 427/596, 219/121, 414/217
• US Class Current: 1/1
• CPC Class Codes: B05B 7/228 using electromagnetic radiation, e.g. laser
• CPC Class Codes: B05C 9/14 the auxiliary operation involving heating or cooling
• CPC Class Codes: B05D 3/06 by exposure to radiation B05D3/02 takes precedence ; plasma treatment B05D3/141
• CPC Class Codes: C23C 16/402 Silicon dioxide
• CPC Class Codes: C23C 16/482 using incoherent light, UV to IR, e.g. lamps
• CPC Class Codes: C23C 16/483 using coherent light, UV to IR, e.g. lasers
• CPC Class Codes: C23C 18/1266 Particles formed in situ
• CPC Class Codes: C23C 24/10 with intermediate formation of a liquid phase in the layer
• CPC Class Codes: C23C 26/02 applying molten material to the substrate

Abstract

Light reactive deposition uses an intense light beam to form particles that are directly coated onto a substrate surface. In some embodiments, a coating apparatus comprising a noncircular reactant inlet, optical elements forming a light path, a first substrate, and a motor connected to the apparatus. The reactant inlet defines a reactant stream path. The light path intersects the reactant stream path at a reaction zone with a product stream path continuing from the reaction zone. The substrate intersects the product stream path. Also, operation of the motor moves the first substrate relative to the product stream. Various broad methods are described for using light driven chemical reactions to produce efficiently highly uniform coatings.

Claims

1. A coating apparatus comprising:

a reactant inlet defining a reactant stream path wherein the opening of the reactant inlet is elongated in one dimension and wherein the reactant inlet has dimensions selected to coat the entire substrate in a single pass;

a shielding gas duct positioned to form a blanket of inert gases along the sides of the reactant stream path and connected to a shielding gas source;

a reactant supply system connected to the reactant inlet to supply all reactants to a flow along the reactant stream path as a reactant stream wherein the reactant supply system comprises a reactant source and a source of light absorbing gas;

a continuous wave laser initiating a light path;

optical elements, configured to direct the light path to intersect the reactant stream at a reaction zone with a product stream continuing from the reaction zone in a product stream path, wherein the light path is oriented to project along the elongated dimension of the reactant inlet, wherein the product stream comprises particles downstream from the reaction zone and wherein the light absorbing gas and reactants are selected for absorption of laser light by the light absorbing gas to drive a chemical reaction between the reactants in the reaction zone;

a first substrate positioned in the product stream path and the first substrate receives deposited particles thereon as a fused particle coating, wherein the first substrate is positioned such that the substrate does not intersect with the light path;

a motor connected to the apparatus such that the motor is configured to translate the first substrate relative to the product stream path to coat the substrate in a single pass; and

a chamber sealed from the ambient atmosphere and a pump connected to the chamber, wherein the reactant inlet and the first substrate are within the chamber.

2. The apparatus of claim 1 wherein the motor moves the reactant inlet relative to the chamber.

3. The apparatus of claim 1 wherein the reactant inlet is positioned to deliver the reactant stream in a downward direction.

4. The apparatus of claim 1 wherein the reactant inlet is configured to deliver the reactant stream in an upward direction.

5. The apparatus of claim 1 wherein the chamber and pump are designed for operation over a pressure range from about 250 Torr to about 700 Torr.

6. The apparatus of claim 1 wherein the optical elements comprise a cylindrical lens.

7. The apparatus of claim 1 further comprising a conveyor system interfaced with the motor and supporting the first substrate and a second substrate and configured to translate the first substrate past the product stream and subsequently transport the second substrate into a position for translation past the product stream.

8. The apparatus of claim 1 wherein the reactant supply system comprises a source of gaseous reactants.

9. The apparatus of claim 1 wherein the reactant supply system comprises a source of vapor reactants.

10. The apparatus of claim 1 wherein the reactant supply system comprises an aerosol generator.

11. The apparatus of claim 1 wherein the deposition apparatus further comprises a stage supporting the first substrate and connected to the motor and wherein the motor moves the stage relative to the product stream path to direct the product stream path at different portions of the first substrate.

12. The apparatus of claim 1 wherein the product stream has a shape of a line of particles on the substrate and wherein a motion caused by the motor moves the product stream to sweep the line across the substrate surface.

13. The apparatus of claim 1 wherein a reactant from the reactant source is the light absorbing gas and the reactant source is also the source of light absorbing gas.