Microflowmeter and method for making same
First Claim
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1. A flowmeter, comprising:
- a first chamber and a second chamber connected through a channel, whereinthe first chamber is provided with a wall including a first deformable membrane, which extends in the direction of flow of a fluid in the first chamber, and with first and second gauges, on or in the first deformable membrane, andthe second chamber is provided with a wall including a second deformable membrane, which extends in the direction of flow of a fluid in the second chamber, and with third and fourth gauges, on or in the second deformable membrane, the four gauges forming a Wheatstone bridge with which a pressure difference between the first chamber and the second chamber may be measured when a fluid flows through the first chamber, and then through the channel, and then through the second chamber.
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Abstract
A flowmeter includes a first chamber and a second chamber connected through a channel. The first chamber is provided with a first deformable membrane and with first and second gauges. The second chamber is provided with a second deformable membrane and with third and fourth gauges. The four gauges form a Wheatstone bridge.
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Citations
22 Claims
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1. A flowmeter, comprising:
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a first chamber and a second chamber connected through a channel, wherein the first chamber is provided with a wall including a first deformable membrane, which extends in the direction of flow of a fluid in the first chamber, and with first and second gauges, on or in the first deformable membrane, and the second chamber is provided with a wall including a second deformable membrane, which extends in the direction of flow of a fluid in the second chamber, and with third and fourth gauges, on or in the second deformable membrane, the four gauges forming a Wheatstone bridge with which a pressure difference between the first chamber and the second chamber may be measured when a fluid flows through the first chamber, and then through the channel, and then through the second chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification