Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration

• US 9,164,123 B2
• Filed: 04/23/2012
• Issued: 10/20/2015
• Est. Priority Date: 04/27/2011
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Neul, Reinhard, Ohms, Torsten, Hattass, Mirko, Meisel, Daniel Christoph
• Primary Examiner(s): Williams, Hezron E
• Assistant Examiner(s): Shabman, Mark A
• Application Number:
  US13/453,425
• Publication Number:
  US 20120272735A1
• Time in Patent Office: 1,275 Days
• Field of Search: 735/140.2
• US Class Current: 1/1
• CPC Class Codes: G01P 15/097 by vibratory elements

Abstract

The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.

Claims

1. A micromechanical rotary acceleration sensor, comprising:

a substrate with at least one anchoring device; and

at least three flywheel masses, at least one of the flywheel masses being connected to at least one anchoring device by means of a first coupling element,

wherein the at least one anchoring device is designed in such a manner that the at least three flywheel masses are elastically deflectable and rotatable from a respective rest position about at least one axis of rotation, and

wherein the at least three flywheel masses are designed in such a manner that they have different rotational natural frequencies.

2. The rotary acceleration sensor according to claim 1, wherein the at least three flywheel masses have a rectangular cross section perpendicular to at least one axis of rotation.

3. The rotary acceleration sensor according to claim 1, wherein the at least three flywheel masses are elastically deflectable and rotatable about a common axis of rotation.

4. The rotary acceleration sensor according to claim 1, wherein the at least three flywheel masses are arranged coaxially with respect to the common axis of rotation.

5. The rotary acceleration sensor according to claim 1, wherein a first of the flywheel masses is connected to a second of the flywheel masses via a second coupling element.

6. The rotary acceleration sensor according to claim 5, wherein:

the first coupling element is a first bending beam; and

the second coupling element is a second bending beam.

7. The rotary acceleration sensor according to claim 5, wherein a third of the flywheel masses is connected to the second of the flywheel masses via a third coupling element.

8. The rotary acceleration sensor according to claim 1, wherein at least one detection means, in particular in the form of an electrode, is arranged in order to detect a deflection of the flywheel masses.

9. The rotary acceleration sensor according to claim 8, wherein the detection means includes optical, piezoresistive, piezoelectric, capacitive, magnetic and/or moving-gate means.

10. The rotary acceleration sensor according to claim 1, wherein the rotary acceleration sensor is used for detecting rotary accelerations, in particular in motor vehicles, aircraft, mobile devices or the like.

11. The rotary acceleration sensor according to claim 1, further comprising:

at least one further anchoring device,

wherein another of the at least three flywheel masses is connected to at least one further anchoring device by means of a second coupling element.

12. The rotary acceleration sensor according to claim 11, wherein:

the first coupling element is a first bending beam; and

the second coupling element is a second bending beam.

13. The rotary acceleration sensor according to claim 1, wherein:

the first coupling element is a first bending beam.

14. A micromechanical rotary acceleration sensor, comprising:

a substrate with at least one anchoring device; and

at least two flywheel masses, at least one of the flywheel masses being connected to at least one central anchoring device by means of a first coupling element, the at least one central anchoring device being positioned central to the at least two flywheel masses,

wherein the at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable and rotatable from a respective rest position about at least one axis of rotation, and

wherein the at least two flywheel masses are designed in such a manner that they have different rotational natural frequencies.

15. The micromechanical rotary acceleration sensor of claim 14, wherein the at least two flywheel masses are elastically deflectable and rotatable about a common axis of rotation.

16. The micromechanical rotary acceleration sensor of claim 14, wherein the at least two flywheel masses are arranged coaxially with respect to the common axis of rotation.

17. The micromechanical rotary acceleration sensor of claim 14, wherein at least one of the flywheel masses is connected to the at least one other flywheel mass by means of a second coupling element.

18. A micromechanical rotary acceleration sensor, comprising:

a substrate with at least one anchoring device;

at least two flywheel masses, at least one of the flywheel masses being connected to at least one anchoring device by means of a first coupling element; and

at least one detection device configured to detect a deflection of at least one of the flywheel masses in at least two spatial directions,

wherein the at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable and rotatable from a respective rest position about at least one axis of rotation, and

wherein the at least two flywheel masses are designed in such a manner that they have different rotational natural frequencies.

19. The micromechanical rotary acceleration sensor of claim 18, wherein the at least one detection device is configured to detect a deflection of at least one of the flywheel masses in at least three spatial directions.