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Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration

  • US 9,164,123 B2
  • Filed: 04/23/2012
  • Issued: 10/20/2015
  • Est. Priority Date: 04/27/2011
  • Status: Active Grant
First Claim
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1. A micromechanical rotary acceleration sensor, comprising:

  • a substrate with at least one anchoring device; and

    at least three flywheel masses, at least one of the flywheel masses being connected to at least one anchoring device by means of a first coupling element,wherein the at least one anchoring device is designed in such a manner that the at least three flywheel masses are elastically deflectable and rotatable from a respective rest position about at least one axis of rotation, andwherein the at least three flywheel masses are designed in such a manner that they have different rotational natural frequencies.

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