Method for producing a capacitor including an array of nanocapacitors
First Claim
1. A process for producing a capacitor including a nanocapacitor array, the process comprising:
- (a) providing a mold having a closed side, as a backside, and a frontside onto which an array of pores opens;
(b) filling pores in the mold and covering the frontside of this mold with an electrically conductive material to form a structure including an array of nano-objects connected by a supporting member;
(i1) opening the backside of the mold, so the array of nano-objects also opens onto the backside;
then(i2) depositing a film of electrically conductive material on the backside of the mold to cover the backside;
then;
(c) removing the mold(d) depositing a protrusion on the supporting member, the protrusion configured to serve as an electrical contact, followed by depositing at least one bilayer made up of a first film of an electrically insulating material and a second film of an electrically conductive material on an outline of the structure obtained in (c); and
then(e) removing the at least one bilayer deposited in (d) locally from the supporting member to form the electrical contact.
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Accused Products
Abstract
A method for producing a capacitor including an array of nanocapacitors, in which the following operations are performed using a mold having a sealed surface, as a lower surface, and a top surface through which a network of pores extend: (a) filling the pores of the mold and covering a top surface of the mold with an electrically conductive material, to form a structure including an array of nanoscale objects connected by a single substrate; (b) removing the mold; (c) depositing, on an outline of the structure obtained at the end of (b), at least one bilayer including a first layer of an electrically insulating material and a second layer of an electrically conductive material; and then (d) locally removing the at least one bilayer deposited in (c) from the substrate to form the electrical contact.
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Citations
14 Claims
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1. A process for producing a capacitor including a nanocapacitor array, the process comprising:
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(a) providing a mold having a closed side, as a backside, and a frontside onto which an array of pores opens; (b) filling pores in the mold and covering the frontside of this mold with an electrically conductive material to form a structure including an array of nano-objects connected by a supporting member; (i1) opening the backside of the mold, so the array of nano-objects also opens onto the backside;
then(i2) depositing a film of electrically conductive material on the backside of the mold to cover the backside;
then;(c) removing the mold (d) depositing a protrusion on the supporting member, the protrusion configured to serve as an electrical contact, followed by depositing at least one bilayer made up of a first film of an electrically insulating material and a second film of an electrically conductive material on an outline of the structure obtained in (c); and
then(e) removing the at least one bilayer deposited in (d) locally from the supporting member to form the electrical contact. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification