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Alignment mark definer

  • US 9,165,889 B2
  • Filed: 06/28/2013
  • Issued: 10/20/2015
  • Est. Priority Date: 06/28/2013
  • Status: Active Grant
First Claim
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1. An alignment mark definer configured to provide a geometrical definition for an actual alignment structure to be formed at a temporary surface of a substrate based on a desired appearance of an alignment mark and on an expected alteration of an appearance of the actual alignment structure caused by a deposition material deposited on the temporary surface and the actual alignment structure and to provide the geometrical definition for the actual alignment structure based on a reverse estimation of the expected alteration of the appearance of the actual alignment structure.

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