Semiconductor device and method of manufacturing same

• US 9,165,987 B2
• Filed: 04/06/2015
• Issued: 10/20/2015
• Est. Priority Date: 04/24/2002
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Seo, Satoshi, Kuwabara, Hideaki
• Primary Examiner(s): Trinh, Hoa B
• Application Number:
  US14/679,357
• Publication Number:
  US 20150214283A1
• Time in Patent Office: 197 Days
• Field of Search: 257/40, 257/52, 257/59, 257/72, 257/98, 257/88, 257/290, 257/79, 257/103, 257/294, 257/94, 257/99, 257/219
• US Class Current: 1/1
• CPC Class Codes: G01J 1/4228 arrangements with two or more detectors, e.g. for sensitivity compensation
• CPC Class Codes: H01L 25/167 comprising optoelectronic devices, e.g. LED, photodiodes
• CPC Class Codes: H01L 33/0041 characterised by field-effect operation
• CPC Class Codes: H10K 2102/3026 Top emission
• CPC Class Codes: H10K 50/81 Anodes
• CPC Class Codes: H10K 50/813 characterised by their shape
• CPC Class Codes: H10K 50/818 Reflective anodes, e.g. ITO combined with thick metallic layers
• CPC Class Codes: H10K 50/82 Cathodes
• CPC Class Codes: H10K 50/824 combined with auxiliary electrodes
• CPC Class Codes: H10K 50/828 Transparent cathodes, e.g. comprising thin metal layers
• CPC Class Codes: H10K 50/841 Self-supporting sealing arrangements
• CPC Class Codes: H10K 50/856 comprising reflective means
• CPC Class Codes: H10K 50/87 Arrangements for heating or cooling
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs
• CPC Class Codes: H10K 59/122 Pixel-defining structures or layers, e.g. banks
• CPC Class Codes: H10K 59/124 Insulating layers formed between TFT elements and OLED elements
• CPC Class Codes: H10K 59/131 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 59/30 Devices specially adapted for multicolour light emission
• CPC Class Codes: H10K 59/35 : comprising red-green-blue [RGB] subpixels
• CPC Class Codes: H10K 59/38 : comprising colour filters or colour changing media [CCM]
• CPC Class Codes: H10K 71/00 : Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 77/10 : Substrates, e.g. flexible substrates
• CPC Class Codes: Y02E 10/549 : Organic PV cells
• CPC Class Codes: Y02P 70/50 : Manufacturing or production processes characterised by the final manufactured product

Abstract

A FET is formed on a semiconductor substrate, a curved surface having a radius of curvature is formed on an upper end of an insulation, a portion of a first electrode is exposed corresponding to the curved surface to form an inclined surface, and a region defining a luminescent region is subjected to etching to expose the first electrode. Luminescence emitted from an organic chemical compound layer is reflected by the inclined surface of the first electrode to increase a total quantity of luminescence taken out in a certain direction.

Claims

1. A display device comprising:

a single crystal semiconductor substrate;

a pixel portion comprising a light emitting element and a transistor electrically connected to the light emitting element;

a substrate facing the single crystal semiconductor substrate with the light emitting element interposed therebetween; and

a wiring over the single crystal semiconductor substrate,

wherein the light emitting element comprising a first electrode, an EL layer over the first electrode and a second electrode over the EL layer,

wherein the EL layer is in contact with the first electrode in a light emitting region of the light emitting element,

wherein a thickness of the first electrode in a region except the light emitting region is larger than a thickness of the first electrode in the light emitting region,

wherein the transistor comprises a channel formation region in the single crystal semiconductor substrate,

wherein the wiring is electrically connected to the pixel portion, and

wherein the EL layer is capable of emitting white light.

2. The display device according to claim 1, further comprising:

a color layer on the substrate,

wherein the color layer and the light emitting region of the light emitting element overlaps with each other.

3. The display device according to claim 1, further comprising:

an insulating film covering the first electrode except in the light emitting region,

wherein the EL layer is over and in contact with the insulating film.

4. The display device according to claim 1, further comprising:

a sealing material between the single crystal semiconductor substrate and the substrate,

wherein the sealing material surrounds the pixel portion.

5. A display module comprising the display device according to claim 1 and a FPC bonded to the wiring.

6. The display module according to claim 5, further comprising an IC chip.

7. An electronic equipment comprising the display module according to claim 5, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head-mount display, a car navigation, a DVD player, an electronic game equipment, a portable information terminal and a personal computer.

8. A display device comprising:

a single crystal semiconductor substrate;

a pixel portion comprising a light emitting element and a transistor electrically connected to the light emitting element;

a substrate facing the single crystal semiconductor substrate with the light emitting element interposed therebetween; and

a wiring over the single crystal semiconductor substrate,

wherein the light emitting element comprising a first electrode, an EL layer over the first electrode and a second electrode over the EL layer,

wherein the first electrode comprises a layer containing aluminum,

wherein the first electrode has a depression portion in which the EL layer is in contact with the layer containing aluminum,

wherein the transistor comprises a channel formation region in the single crystal semiconductor substrate,

wherein the wiring is electrically connected to the pixel portion, and

wherein the EL layer is capable of emitting white light.

9. The display device according to claim 8, further comprising:

a color layer on the substrate,

wherein the color layer and a light emitting region of the light emitting element overlaps with each other.

10. The display device according to claim 8, further comprising:

an insulating film covering the first electrode except the depression portion,

wherein the EL layer is over and in contact with the insulating film.

11. The display device according to claim 8, further comprising:

a sealing material between the single crystal semiconductor substrate and the substrate,

wherein the sealing material surrounds the pixel portion.

12. A display module comprising the display device according to claim 8 and a FPC bonded to the wiring.

13. The display module according to claim 12, further comprising an IC chip.

14. An electronic equipment comprising the display module according to claim 12, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head-mount display, a car navigation, a DVD player, an electronic game equipment, a portable information terminal and a personal computer.

15. A display device comprising:

a single crystal semiconductor substrate;

a pixel portion comprising a light emitting element and a first transistor electrically connected to the light emitting element;

a driver circuit comprising a second transistor, the driver circuit electrically connected to the pixel portion;

a substrate facing the single crystal semiconductor substrate with the light emitting element interposed therebetween; and

a wiring over the single crystal semiconductor substrate,

wherein the light emitting element comprising a first electrode, an EL layer over the first electrode and a second electrode over the EL layer,

wherein the EL layer is in contact with the first electrode in a light emitting region of the light emitting element,

wherein a thickness of the first electrode in a region except the light emitting region is larger than a thickness of the first electrode in the light emitting region,

wherein each of the first transistor and the second transistor comprises a channel formation region in the single crystal semiconductor substrate,

wherein the wiring is electrically connected to the pixel portion and the driver circuit, and

wherein the EL layer is capable of emitting white light.

16. The display device according to claim 15, further comprising:

a controller circuit; and

a D/A converter,

wherein the controller circuit and the D/A converter are fabricated on the single crystal semiconductor substrate.

17. The display device according to claim 16, further comprising:

a color layer on the substrate,

wherein the color layer and the light emitting region of the light emitting element overlaps with each other.

18. The display device according to claim 16, further comprising:

an insulating film covering the first electrode except in the light emitting region,

wherein the EL layer is over and in contact with the insulating film.

19. The display device according to claim 16, further comprising:

a sealing material between the single crystal semiconductor substrate and the substrate,

wherein the sealing material surrounds the pixel portion.

20. A display module comprising the display device according to claim 16 and a FPC bonded to the wiring.

21. An electronic equipment comprising the display module according to claim 20, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head-mount display, a car navigation, a DVD player, an electronic game equipment, a portable information terminal and a personal computer.