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Tunable cavity resonator including a plurality of MEMS beams

  • US 9,166,271 B2
  • Filed: 06/03/2013
  • Issued: 10/20/2015
  • Est. Priority Date: 06/01/2012
  • Status: Active Grant
First Claim
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1. A tunable cavity resonator comprising:

  • a substrate;

    a cap structure extending from the substrate, at least one of the substrate and the cap structure defining a resonator cavity; and

    a tuning assembly positioned at least partially within the resonator cavity, the tuning assembly including a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

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