Linearly deployed actuators

• US 9,166,463 B2
• Filed: 08/11/2014
• Issued: 10/20/2015
• Est. Priority Date: 11/15/2010
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Gutierrez, Roman C.
• Primary Examiner(s): MULLINS, BURTON S
• Application Number:
  US14/456,992
• Publication Number:
  US 20150028698A1
• Time in Patent Office: 435 Days
• Field of Search: 310/300, 310/309, 396/75, 396/529, 257/415, 438/50
• US Class Current: 1/1
• CPC Class Codes: B81B 3/0035 Constitution or structural means for controlling the movement of the flexible or deformable elements
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 7/102 controlled by a microcomputer cameras with interchangeable lenses G03B17/14
• CPC Class Codes: G03B 2205/0084 using other types of actuators
• CPC Class Codes: G03B 3/00 Focusing arrangements of general interest for cameras, projectors or printers
• CPC Class Codes: H02K 41/02 Linear motors; Sectional motors
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H02N 11/006 Motors
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 29/49863 with prestressing of part
• CPC Class Codes: Y10T 74/18072 Reciprocating carriage motions

Abstract

A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Claims

1. A substantially planar actuator device, comprising:

an outer frame;

a fixed frame attached to the outer frame and having a first plurality of teeth extending therefrom;

a moveable frame disposed parallel to the fixed frame and having a second plurality of teeth extending therefrom;

an element coupled to the moveable frame by a flexure for coplanar, rectilinear movement relative to the fixed and outer frames and for coplanar, rotational movement about a central axis of the element;

a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement of the moveable frame relative to the outer frame and the fixed frame;

wherein the moveable frame is mechanically and/or adhesively fixed in a deployed position that is coplanar with, parallel to, and spaced apart from the fixed frame at a selected distance for substantially rectilinear movement toward and away from the fixed frame; and

wherein at least one of the first plurality of teeth extends between first and second ones of the second plurality of teeth so that the first plurality of teeth and the second plurality of teeth are at least partially interdigitated.

2. The substantially planar actuator device of claim 1, further comprising a deployment lever engaged with an over-center latch latching the moveable frame in the deployed position.

3. The substantially planar actuator device of claim 2, further comprising:

a pad coupled to the moveable frame by a deployment flexure, the pad having an opening therethrough; and

,

an upstanding post disposed on a resilient cantilever extending from the outer frame, the post extending into the opening of the pad and latching the moveable frame in the deployed position.

4. The substantially planar actuator device of claim 1, wherein the actuator device is formed of an electrically conductive material.

5. The substantially planar actuator device of claim 1, wherein the first and second ones of the second plurality of teeth are configured to be moved so that the at least one of the first plurality of teeth extends further between the first and second ones of the second plurality of teeth responsive to a voltage differential applied to the first and second pluralities of teeth.

6. The substantially planar actuator device of claim 1, wherein the first one of the second plurality of teeth extends between the at least one of the first plurality of teeth and a first additional one of the first plurality of teeth, and wherein the second one of the second plurality of teeth extends between the at least one of the first plurality of teeth and a second additional one of the first plurality of teeth.

7. An electronic device, comprising a housing that at least partially encloses the substantially planar actuator device of claim 1.

8. The electronic device of claim 7, wherein the electronic device comprises a camera.

9. The electronic device of claim 8, wherein the electronic device comprises a cellular telephone, a personal digital assistant (PDA), a computer or a surveillance system comprising the camera.

10. A method for making an actuator, the method comprising:

forming a substantially planar actuator device, the actuator device comprising;

an outer frame,

a fixed frame attached to the outer frame and having a first plurality of teeth extending therefrom,

a moveable frame disposed parallel to the fixed frame and having a second plurality of teeth extending therefrom,

a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement of the moveable frame relative to the outer frame and the fixed frame, and

wherein at least one of the first plurality of teeth extends completely between first and second ones of the second plurality of teeth so that the first plurality of teeth and the second plurality of teeth are interdigitated;

moving the movable frame to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance so that the at least one of the first plurality of teeth extends only partially between the first and second ones of the second plurality of teeth so that the first plurality of teeth and the second plurality of teeth are at least partially interdigitated; and

mechanically and/or adhesively fixing the moveable frame in the deployed position for substantially rectilinear movement toward and away from the fixed frame.

11. The method of claim 10, wherein the moving comprises:

forming an over-center latch and a fulcrum on the outer frame; and

forming a deployment lever coupled to the moveable frame with a deployment flexure.

12. The method of claim 11, further comprising rotating the deployment lever about the fulcrum using a pull ring attached to the deployment flexure.

13. The method of claim 10, wherein the moving comprises forming a socket in the outer frame, the socket including a plurality of radial protrusions on an inner surface thereof.

14. The method of claim 10, wherein the moving comprises:

forming a rectangular socket in the outer frame;

forming a rectangular ball disposed concentrically within the socket, the ball being connected to the outer frame by a ball spring and to the moveable frame by the motion control flexure; and

using the ball and the socket when moving the moveable frame to the deployed position such that the moveable frame moves substantially rectilinearly and perpendicularly to the fixed frame.

15. The method of claim 10, wherein the moving comprises:

forming a resilient cantilever on the outer frame; and

applying and releasing a downward force to the cantilever.

16. The method of claim 10, wherein the moving comprises:

providing a pair of snubs disposed in spaced opposition to each other, each snub having a ramp disposed bilaterally symmetrical with respect to the ramp of the other;

disposing an engagement pad between the snubs; and

urging the snubs toward each other such that edges of the engagement pad respectively engage a corresponding one of the ramps.

17. The method of claim 10, wherein the moving comprises forming a deployment pad coupled to the moveable frame by a deployment flexure.

18. The method of claim 10, wherein the moving comprises forming a deployment stage coupled to the moveable frame by a deployment flexure.

19. The method of claim 10, further comprising coupling an element to the moveable frame by a flexure for coplanar, rectilinear movement relative to the fixed and outer frames and for coplanar, rotational movement about a central axis of the element.

20. The method of claim 19, wherein the element comprises a lens.