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Solid state nanopore devices for nanopore applications to improve the nanopore sensitivity and methods of manufacture

  • US 9,168,717 B2
  • Filed: 09/11/2013
  • Issued: 10/27/2015
  • Est. Priority Date: 08/26/2013
  • Status: Expired due to Fees
First Claim
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1. A nanopore structure, comprising:

  • a dielectric layer on an underlying substrate;

    a first hole in the underlying substrate;

    a second hole in the dielectric layer;

    a membrane over the dielectric layer, the membrane having an opening suspended and aligned with the hole; and

    an air gap, between the membrane and the dielectric layer wherein;

    the opening has a smaller diameter than the second hole;

    the second hole has a smaller diameter than the air gap;

    the air gap has a smaller diameter than the first hole; and

    an oxide material between the dielectric layer and the membrane, the oxide material containing the air gap.

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