3D inspection using cameras and projectors with multiple-line patterns

• US 9,170,207 B2
• Filed: 07/25/2011
• Issued: 10/27/2015
• Est. Priority Date: 07/26/2010
• Status: Active Grant

• Current Assignee: VIT SA (Mycronic AB)
• Original Assignee: VIT SA (Mycronic AB)
• Inventors: Perriollat, Mathieu
• Primary Examiner(s): Patel, Jay
• Assistant Examiner(s): SUH, JOSEPH JINWOO
• Application Number:
  US13/190,195
• Publication Number:
  US 20120019651A1
• Time in Patent Office: 1,555 Days
• Field of Search: 348/87, 348/92, 340/935, 356/239.1, 382/154
• US Class Current: 1/1
• CPC Class Codes: G01B 11/2545 with one projection direction and several detection directions, e.g. stereo
• CPC Class Codes: G01N 21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 2201/0635 Structured illumination, e.g. with grating
• CPC Class Codes: G01R 31/308 using non-ionising electromagnetic radiation, e.g. optical radiation investigating or analysing materials by the use of optical means G01N21/00; image analysis G06T7/00
• CPC Class Codes: G06T 1/0007 Image acquisition

Abstract

An installation of optical inspection of integrated circuits or the like includes a photographic system placed above a scene in a plane defined by a first and a second direction, the photographic system having several digital cameras each having an orthogonal array of pixels, all cameras having their respective optical axes inclined by a first angle with respect to a third direction perpendicular to the two others; and two projectors of determined patterns, these patterns being such that two straight lines projected by each of the projectors are aligned in the plane defined by the first two directions and are coplanar with a straight line interconnecting the optical centers of the two projectors.

Claims

1. An apparatus for optical inspection of integrated circuits, comprising:

a photographic system placed above a scene on a plane defined by a first direction and a second direction, the photographic system comprising a plurality of digital cameras (22) each comprising an orthogonal array of pixels, all of the digital cameras having their respective optical axes inclined by a first non-zero angle (β

) with respect to a third direction (Z) perpendicular to the plane defined by the first direction and the second direction, each of the digital cameras being coplanar in another plane parallel to the plane defined by the first and second directions; and

two projectors (24) projecting determined patterns, each of these patterns comprising a plurality of parallel lines in only one direction and being such that two straight lines respectively from the plurality of parallel lines projected by the projectors are aligned in the plane of the scene and the two straight lines are coplanar with a straight line (242) interconnecting the optical centers of the two projectors, the two straight lines forming one contiguous line,

wherein each camera of a first subset of the plurality of digital cameras is aimed at a first point and each camera of a second subset of plurality of digital cameras is aimed at a second point,

and wherein an image processing system is capable of applying a super-resolution processing to a succession of images provided by the photographic system.

2. The apparatus of claim 1, wherein the first angle (β

) ranges between 15 and 25 degrees.

3. The apparatus of claim 1, wherein four cameras are associated with each projector and are oriented to aim at a same point on the viewing axis of this projector.

4. The apparatus of claim 1, wherein said patterns are such that two straight lines projected by each of the projectors are aligned in the plane and are coplanar with a straight line (242) interconnecting the optical centers of the two projectors.

5. The apparatus of claim 1, further comprising a conveyor of the objects to be analyzed in a first direction (X) of said plane, the photographic system (2) being placed above an area of the conveyor and in a fixed position with respect thereto and said cameras being distributed in two sets (2) of cameras aligned in a second direction (Y, Y′

) different from the first one, the cameras being all oriented so that one of the orthogonal directions of their pixel array forms a second angle (α

) with the first direction.

6. The apparatus of claim 5, wherein the second direction is perpendicular to the first one.

7. The apparatus of claim 5, wherein the pixels of the cameras are aligned with the second direction.

8. The apparatus of claim 5, wherein the second angle (a) ranges between 3 and 20 degrees.