Hall sensors and sensing methods

• US 9,170,307 B2
• Filed: 09/26/2012
• Issued: 10/27/2015
• Est. Priority Date: 09/26/2012
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Ausserlechner, Udo
• Primary Examiner(s): Aurora, Reena
• Application Number:
  US13/627,468
• Publication Number:
  US 20140084911A1
• Time in Patent Office: 1,126 Days
• Field of Search: 324/251, 324/207.2, 324/207.12, 324/117.H
• US Class Current: 1/1
• CPC Class Codes: G01R 33/07 Hall effect devices
• CPC Class Codes: G01R 33/075 Hall devices configured for spinning current measurements
• CPC Class Codes: G01R 33/077 Vertical Hall-effect devices

Abstract

Embodiments relate to multi-terminal sensor devices and operating methods thereof that can reduce or eliminate offset error. In embodiments, sensor devices can comprise three or fewer terminals, and multiple such sensor devices can be combined. The sensor devices can comprise Hall sensor devices, such as vertical Hall devices, or other sensor devices in embodiments. Operating modes can be implemented for the multi-terminal sensor devices which offer improvements over conventional spinning current techniques, including reduced residual offset.

Claims

1. A magnetic field sensor comprising:

a Hall region comprising no more than three terminals; and

circuitry configured to selectively couple at least two of the no more than three terminals as supply terminals and two of the no more than three terminals as signal terminals in each of three operating phases, such that each of the no more than three terminals is coupled as a supply terminal in the same number of operating phases as the others of the no more than three terminals, and each of the no more than three terminals is coupled as a signal terminal in the same number of operating phases as the others of the no more than three terminals.

2. The sensor of claim 1, wherein the Hall region comprises a Hall plate.

3. The sensor of claim 2, wherein the no more than three terminals are symmetrically arranged on the Hall plate.

4. The sensor of claim 2, wherein the no more than three terminals are equidistantly spaced from one another on the Hall plate.

5. The sensor of claim 1, wherein the Hall region comprises a tub, and the sensor comprises a vertical Hall sensor.

6. The sensor of claim 1, further comprising an isolation tub surrounding the Hall region.

7. The sensor of claim 6, wherein the Hall region comprises an n-Hall region, the no more than three terminals comprise n+-contacts, and the isolation tub comprises a p-tub.

8. The sensor of claim 6, further comprising an isolation trench surrounding the isolation tub.

9. The sensor of claim 1, wherein the no more than three terminals comprise a first terminal, a second terminal and a third terminal, and wherein the circuitry is configured to couple the first terminal and the third terminal as supply terminals of a first level, the second terminal as a supply terminal of a second level, and the first terminal and the third terminal as signal terminals in one of the three operating phases;

the first terminal and the second terminal as supply terminals of a first level, the third terminal as a supply terminal of a second level, and the first terminal and the second terminal as signal terminals in another of the three operating phases; and

the second terminal and the third terminal as supply terminals of a first level, the first terminal as a supply terminal of a second level, and the second terminal and the third terminal as signal terminals in yet another of the three operating phases.

10. The sensor of claim 1, wherein two terminals of the no more than three terminals comprise signal terminals of a first level, and the circuitry is configured to determine a difference in signals at the two terminals coupled as the signal terminals as an output signal of each operating phase.

11. The sensor of claim 10, wherein the circuitry is configured to combine the output signals of each operating phase to obtain an overall output signal.

12. The sensor of claim 1, wherein the supply is one of a voltage supply or a current supply.

13. The sensor of claim 1, wherein the no more than three terminals comprise a first terminal, a second terminal and a third terminal, and wherein the circuitry is configured to couple at least the third terminal as a supply terminal of a first level, the second terminal as a supply terminal of the second level, and the first terminal and the third terminal as signal terminals in one of the three operating phases;

at least the first terminal as a supply terminal of a first level, the third terminal as a supply terminal of a second level, and the first terminal and the second terminal as signal terminals in another of the three operating phases; and

at least the second terminal as a supply terminal of a first level, the first terminal as a supply terminal of a second level, and the second terminal and the third terminal as signal terminals in yet another of the three operating phases.

14. A method of operating a magnetic field sensor having no more than three terminals comprising:

operating the magnetic field sensor in a first operating phase by;

coupling first and second of the no more than three terminals to a supply of a first level and a third of the no more than three terminals to a supply of a second level, and

obtaining a first phase output signal by combining signals sensed at the first and second of the no more than three terminals;

operating the magnetic field sensor in a second operating phase by;

coupling the first and third of the no more than three terminals to a supply of a first level and the second of the no more than three terminals to a supply of a second level, and

obtaining a second phase output signal by combining signals sensed at the first and third of the no more than three terminals;

operating the magnetic field sensor in a third operating phase by;

coupling the second and third of the no more than three terminals to a supply of a first level and the first of the no more than three terminals to a supply of a second level, and

obtaining a third phase output signal by combining signals sensed at the second and third of the no more than three terminals; and

combining the first, second and third phase output signals.

15. The method of claim 14, wherein the magnetic field sensor comprises a Hall effect sensor.

16. The method of claim 15, wherein the Hall effect sensor comprises a vertical Hall effect sensor.

17. The method of claim 14, wherein the positive power supply supplies one of a voltage or a current.

18. The method of claim 14, comprising first and second power supplies, wherein each of the first and second power supplies is used as a power supply coupled to a different one of the no more than three terminals in each of the first, second and third operating phases.

19. A magnetic field sensor comprising:

a first magnetic field sensor device comprising a Hall region and no more than three terminals arranged on the Hall region;

a second magnetic field sensor device comprising a Hall region and no more than three terminals arranged on the Hall region;

a third magnetic field sensor device comprising a Hall region and no more than three terminals arranged on the Hall region; and

circuitry configured to selectively couple the first, second and third magnetic field sensor devices,

wherein each of the first, second and third magnetic field sensor devices comprises first, second and third terminals arranged in the same order, and wherein the circuitry is configured to selectively couple the first terminal of the first device, the second terminal of the second device and the third terminal of the third device to form a first overall terminal;

the second terminal of the first device, the third terminal of the second device and the first terminal of the third device to form a second overall terminal; and

the third terminal of the first device, the first terminal of the second device and the second terminal of the third device to form a third overall terminal.

20. The sensor of claim 19, wherein the Hall regions comprise Hall plates.

21. The sensor of claim 19, wherein the Hall regions comprise vertical Hall devices.

22. The sensor of claim 19, wherein the first, second and third sensor device Hall regions are arranged in an isolation tub.

23. The sensor of claim 19, wherein the first sensor device Hall region is arranged in a first isolation tub, the second sensor device Hall region is arranged in a second isolation tub and the third sensor device Hall region is arranged in a third isolation tub.

24. The sensor of claim 23, wherein adjacent ones of the first, second and third isolation tubs are separated by an isolation trench.