Laser assisted direct bonding

• US 9,171,721 B2
• Filed: 10/26/2010
• Issued: 10/27/2015
• Est. Priority Date: 10/26/2010
• Status: Active Grant

• Current Assignee: Medtronic Incorporated (Medtronic Plc)
• Original Assignee: Medtronic Incorporated (Medtronic Plc)
• Inventors: Danzl, Ralph B., Ruben, David A., Sandlin, Michael S.
• Primary Examiner(s): McNally, Daniel
• Application Number:
  US12/912,433
• Publication Number:
  US 20120100318A1
• Time in Patent Office: 1,827 Days
• Field of Search: 156/272.2, 156/272.8, 156/153
• US Class Current: 1/1
• CPC Class Codes: H01L 21/187 by direct bonding
• CPC Class Codes: Y10T 428/13 Hollow or container type article [e.g., tube, vase, etc.]
• CPC Class Codes: Y10T 428/24942 including components having same physical characteristic in differing degree
• CPC Class Codes: Y10T 428/31504 Composite [nonstructural laminate]

Abstract

Techniques are described for directly bonding different substrates together. In some examples, a technique includes placing a first surface of a first substrate in contact with a second surface of a second substrate to directly bond the first substrate to the second substrate at a contact location. The contact location is defined where at least a portion of the first surface of the first substrate contacts at least a portion of the second surface of the second substrate. The technique may also include directing a laser beam on at least a portion of the contact location to strengthen the direct bond between the first substrate and the second substrate. In this manner, a direct bond may be heated with localized laser energy to strengthen the direct bond. Localized laser energy may create a strong direct bond while minimizing thermal defects in regions proximate the direct bond.

Claims

1. A method comprising:

placing a first surface of a first substrate in contact with a second surface of a second substrate to create a direct bond between the first substrate and the second substrate at a contact location, the contact location being defined where at least a portion of the first surface of the first substrate contacts at least a portion of the second surface of the second substrate; and

directing a laser on at least a portion of the contact location to further strengthen the direct bond between the first substrate and the second substrate,

wherein the laser comprises a continuous wave laser that delivers between approximately 1 Joule per square millimeter (J/mm²) and approximately 8 Joules per square millimeter, wherein the first and second surfaces are selectively prepared such that the direct bond is solely formed from a face-to-face contact at the contact location of the selectively prepared surfaces, wherein the face-to-face contact generates a molecular attraction having an interfacial fracture toughness that prevents separation between the first and second substrates, and wherein directing the laser on the at least the portion of the contact location comprises heating only a region of the first substrate and the second substrate that is within approximately 100 microns of the contact location to a temperature between approximately 900 degrees Celsius and approximately 1200 degrees Celsius without heating an area of the first substrate and the second substrate that is beyond approximately 100 microns from the contact location.

2. The method of claim 1, further comprising, subsequent to placing the first substrate in contact with the second substrate, heating the first substrate and the second substrate to strengthen the direct bond between the first substrate and the second substrate.

3. The method of claim 2, wherein heating the first substrate and the second substrate comprises heating the first substrate and second substrate to a temperature between approximately 50 degrees Celsius and approximately 150 degrees Celsius.

4. The method of claim 2, wherein heating the first substrate and the second substrate comprises heating the first substrate and second substrate to a temperature between approximately 150 degrees Celsius and approximately 350 degrees Celsius.

5. The method of claim 1, wherein the direct bond at the contact location is based on molecular attraction between first molecules of the first surface of the first substrate and second molecules of the second surface of the second substrate, wherein the molecular attraction between the first and second molecules comprises at least one of a plurality of hydrogen bonds between the first and second molecules and a plurality of covalent bonds between the first and second molecules.

6. The method of claim 5, wherein heat produced at the second substrate from directing the laser strengthens the direct bond by strengthening the molecular attraction between the first molecules of the first substrate and the second molecules of the second substrate.

7. The method of claim 1, further comprising, prior to placing the first surface in contact with the second surface, selectively preparing at least one of the first surface and second surface to increase the interfacial fracture toughness of the molecular attraction by polishing the at least one of the first surface or the second surface such that the at least one of the first surface or the second surface defines an average surface roughness (Ra) less than approximately 0.5 nanometers.

8. The method of claim 1, further comprising, prior to placing the first surface in contact with the second surface, selectively preparing at least one of the first surface and second surface to increase the interfacial fracture toughness of the molecular attraction by polishing the at least one of the first surface or the second surface such that the at least one of the first surface or the second surface defines an average surface roughness (Ra) less than approximately 1 nanometer.

9. The method of claim 1, further comprising, prior to placing the first surface in contact with the second surface, selectively preparing at least one of the first surface and second surface to increase the interfacial fracture toughness of the molecular attraction by polishing the at least one of the first surface or the second surface such that the at least one of the first surface or the second surface defines an average surface roughness (Ra) greater than approximately 2 nanometers.

10. The method of claim 1, further comprising, prior to placing the first surface in contact with the second surface, selectively preparing at least one of the first surface and second surface to increase the interfacial fracture toughness of the molecular attraction by cleaning the first surface of the first substrate and the second surface of the second substrate such that the first surface and the second surface are substantially free of particles greater than 0.1 micrometers.

11. The method of claim 1, further comprising, prior to placing the first surface in contact with the second surface, selectively preparing at least one of the first surface and second surface to increase the interfacial fracture toughness of the molecular attraction by activating the first surface and the second surface by exposing the first surface and the second surface to at least one of a nitrogen plasma or an oxygen plasma to chemically activate the first surface and the second surface.

12. The method of claim 1, wherein the laser comprises at least one of a fiber laser or a fiber-delivered diode laser.

13. The method of claim 1, wherein the first substrate is substantially transparent to a wavelength of the laser, and the second substrate is substantially opaque to the wavelength of the laser.

14. The method of claim 1, wherein the first substrate comprises sodium borosilicate glass and the second substrate comprises silicon.

15. The method of claim 1, wherein directing the laser on the at least the portion of the contact location comprises directing the laser in a straight laser beam path that substantially follows a centerline of the contact location.

16. A method comprising:

selectively preparing a first surface of a first substrate and a second surface of a second substrate by;

polishing a first surface of a first substrate and a second surface of a second substrate such that the first surface and the second surface each define an average surface roughness (Ra) less than approximately 1 nanometer, and

cleaning the first surface and the second surface such that the first surface and the second surface are substantially free of particles greater than 0.1 micrometers, wherein the polishing and the cleaning of the first surface and the second surface reduces an amount of energy needed to strengthen, with a laser, a direct bond between the first substrate and the second substrate;

placing the first surface in contact with the second surface to create a direct bond between the first substrate and the second substrate at a contact location, the contact location defined where at least a portion of the first surface of the first substrate contacts at least a portion of the second surface of the second substrate; and

directing a laser across at least a portion of a length of the contact location to strengthen the direct bond at the contact location between the first substrate and the second substrate, wherein the laser comprises a continuous wave laser that delivers a range of energy to the contact location from between approximately 1 Joule per square millimeter (J/mm²) and approximately 8 Joules per square millimeter,

wherein the first and second surfaces are selectively prepared such that the direct bond is solely formed from a face-to-face contact at the contact location of the selectively prepared surfaces, wherein the face-to-face contact generates a molecular attraction having an interfacial fracture toughness that prevents separation between the first and second substrates, and

wherein directing the laser on the at least the portion of the contact location comprises heating only a region of the first substrate and the second substrate that is within approximately 100 microns of the contact location to a temperature between approximately 900 degrees Celsius and approximately 1200 degrees Celsius without heating an area of the first substrate and the second substrate that is beyond approximately 100 microns from the contact location.

17. The method of claim 16, wherein at least one of the first substrate or the second substrate defines a cavity, and at least one of the first surface or the second surface defines a perimeter around the cavity, and wherein placing the first surface in contact with the second surface comprises sealing the cavity.

18. The method of claim 17, further comprising placing at least one of a sensor or a battery on at least one of the first or the second substrate, wherein sealing the cavity comprises sealing the at least one of the sensor or the battery in the cavity.

19. The method of claim 16, wherein the first substrate comprises silicon, and the second substrate comprises at least one of a glass, fused silica, quartz, alumina, diamond, sapphire, SiC, GaN, or alumina.

20. The method of claim 16, further comprising, subsequent to placing the first surface in contact with the second surface and prior to traversing the laser across at least a portion of the length of the contact location, heating the first substrate and the second substrate to a temperature less than approximately 100 degrees Celsius to strengthen the direct bond between the first substrate and the second substrate.

21. The method of claim 16, further comprising, subsequent to placing the first surface in contact with the second surface and prior to traversing the laser across at least a portion of the length of the contact location, heating the first substrate and the second substrate to a temperature greater than approximately 150 degrees Celsius to strengthen the direct bond between the first substrate and the second substrate.