Optical bench apparatus having integrated monitor photodetectors and method for monitoring optical power using same

• US 9,172,462 B2
• Filed: 12/18/2013
• Issued: 10/27/2015
• Est. Priority Date: 12/31/2012
• Status: Active Grant

• Current Assignee: Zephyr Photonics
• Original Assignee: Zephyr Photonics
• Inventors: Louderback, Duane
• Primary Examiner(s): Leung, Danny
• Application Number:
  US14/133,154
• Publication Number:
  US 20140186032A1
• Time in Patent Office: 678 Days
• Field of Search: 398/38
• US Class Current: 1/1
• CPC Class Codes: G01J 1/4257 applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam monitoring arrangements for lasers in general H01S3/0014
• CPC Class Codes: G02B 1/11 Anti-reflection coatings
• CPC Class Codes: G02B 6/4286 Optical modules with optical power monitoring
• CPC Class Codes: H04B 10/07955 Monitoring or measuring power
• CPC Class Codes: H04B 10/0799 Monitoring line transmitter or line receiver equipment
• CPC Class Codes: H04B 10/40 Transceivers
• CPC Class Codes: H04B 10/5057 using a feedback signal generated by analysing the optical output

Abstract

Optical bench structure provides a platform for integrating optical transmitters, particularly Vertical-Cavity Surface-Emitting Lasers (VCSELs), with monitor photodetectors. A substrate with photodetectors on the front side is aligned with flip-chip bonding bumps so the emission of the transmitters is aligned with the monitor photodetectors and passes through the monitor photodetectors with a portion of the transmitted light absorbed by the monitor photodetectors. The photodetectors have a thin absorption region so the percentage of light absorbed may be relatively small, providing sufficient photocurrent to monitor the transmitted power having a minimal effect on the transmitted power. Microlenses are integrated on the backside of the substrate focus, steer and/or collimate the emitted optical beams from the transmitters. The structure enables photodetectors to be integrated on the optical bench allowing the received optical power to be monitored. The receiver photodetectors are integrated on the optical bench alone and/or in combination with the transmitters.

Claims

1. An optical bench apparatus comprising:

a substrate having a first side and a second side, wherein the second side is located opposite the first side;

an optical power monitor photodetector on the first side of the substrate;

a light transmitter configured to emit an optical output;

first group of electrical interconnect lines located on the substrate, wherein the first electrical interconnect lines are configured to connect to the light transmitter;

second group of electrical interconnect lines located on the substrate and configured to connect to the optical power monitor photodetector; and

a bonding site on the substrate configured to bond to the light transmitter, wherein the bonding site is located to optically align the light transmitter with the optical power monitor photodetector such that the optical output of the light transmitter impinges on the optical power monitor photodetector,

wherein the optical power monitor photodetector is configured to receive the optical output emitted by the light transmitter and absorb a portion of the received optical output so that less than all of the optical output emitted by the light transmitter passes through the substrate.

2. The apparatus of claim 1, wherein the optical power monitor photodetector is configured to transmit the optical output of the light transmitter.

3. The apparatus of claim 1, wherein the optical power monitor photodetector is configured to absorb a first portion of the optical output of the light transmitter, and wherein the substrate is configured to transmit a second portion of the optical output of the light transmitter.

4. The apparatus of claim 1, further comprising:

a lens on the second side of the substrate opposite the light transmitter, wherein the lens is configured to collimate, focus, or steer the optical output of the light transmitter.

5. The apparatus of claim 1, wherein the substrate has a surface having an anti-reflection coating.

6. The apparatus of claim 1, wherein the first and second groups of electrical interconnect lines are impedance matched.

7. The apparatus of claim 1, wherein the substrate includes a semiconductor, Gallium Arsenide (GaAs), semi-insulating Gallium Arsenide, Aluminum Gallium Arsenide (AlGaAs), Indium Phosphide (InP), silicon, an insulator, sapphire or quartz glass.

8. The apparatus of claim 1, wherein the light transmitter includes a light emitting diode (LED), a vertical-cavity surface-emitting laser (VCSEL), a Fabry-Perot laser having an angled mirror for vertical emission, a distributed feedback (DFB) laser having an angled mirror for vertical emission, or a distributed feedback (DFB) laser having a diffraction grating for vertical emission.

9. The apparatus of claim 1, wherein the optical power monitor photodetector includes a single crystal semiconductor, a polycrystalline material, an amorphous material, silicon, germanium, Indium Gallium Arsenide (InGaAs), a p-i-n photodetector, or a metal-semiconductor-metal (MSM) photodetector.

10. The apparatus of claim 1, wherein the optical power monitor photodetector has an absorbing region, wherein the absorbing region includes a bulk material, quantum well, or quantum dots.

11. The apparatus of claim 1, wherein the bonding site configured to bond to the light transmitter includes a flip-chip bond or by die placement.

31. The optical bench apparatus of claim 1, wherein the optical power monitor photodetector and the light transmitter are integrated on the substrate.

12. An optical bench apparatus comprising:

a light transmitter configured to emit an optical signal;

a substrate configured to transmit at least part of the optical signal emitted by the light transmitter;

an optical power monitor photodetector disposed on the substrate, wherein the optical power monitor photodetector is configured to receive the optical signal emitted by the light transmitter and absorb a portion of the received optical signal so that less than all of the optical signal emitted by the light transmitter passes through the substrate; and

a receiver substrate including a photodetector electrically connected to the substrate to align the photodetector with the optical power monitor photodetector so that the photodetector and the optical power monitor detect the optical input transmitted through the substrate.

13. The apparatus of claim 12, wherein the photodetector is configured to receive the optical input through the optical power monitor photodetector.

14. The apparatus of claim 12, wherein the optical power monitor photodetector is configured to absorb a portion of the optical input.

15. The apparatus of claim 12, wherein the optical power monitor photodetector is configured to absorb a first part of the optical input, and wherein the photodetector is configured to receive a second part of the optical input through the substrate.

16. The apparatus of claim 12, further comprising:

a lens disposed on the substrate to collimate, focus or steer the optical input to the photodetector.

17. The apparatus of claim 16, wherein the lens includes a refractive lens, or a diffractive lens.

18. The apparatus of claim 12, comprising:

an anti-reflection coating on a surface of the substrate.

19. The optical bench apparatus of claim 12, comprising:

a first group of electrical interconnect lines located on the substrate to connect to the photodetector; and

a second group of electrical interconnect lines located on the substrate to connect to the optical power monitor photodetector.

20. The apparatus of claim 12, wherein the substrate includes a semiconductor, Gallium Arsenide (GaAs), semi-insulating Gallium Arsenide, Aluminum Gallium Arsenide (AlGaAs), Indium Phosphide (InP), silicon, an insulator, sapphire, or quartz glass.

21. The apparatus of claim 12, wherein the photodetector includes a p-i-n photodetector, a resonant cavity photodetector, an avalanche photodetector, or a metal-semiconductor-metal (MSM) photodetector.

22. The apparatus of claim 12, wherein the receiver substrate that includes the photodetector is connected to the substrate by flip-chip bonding or by die placement.

32. The optical bench apparatus of claim 12, wherein the optical power monitor photodetector is integrated on the substrate.

33. The apparatus of claim 19, wherein the first and second groups of electrical interconnect lines are impedance matched.

34. The optical bench apparatus of claim 12, comprising:

another optical power monitor photodetector disposed on the substrate;

a transmitter substrate including an optical transmitter electrically connected to the substrate to align the optical transmitter with the other optical power monitor photodetector so that an optical output emitted by the optical transmitter is transmitted through the optical power monitor and the substrate.

23. A method of monitoring optical power in an optical link comprising:

emitting, from a light transmitter integrated with an optical bench apparatus having a substrate, an optical output; and

detecting, by an optical power monitor photodetector aligned with the light transmitter, the optical output of the light transmitter that impinges on the optical power monitor photodetector;

absorbing, by the optical power monitor photodetector, a fraction of the detected optical output so that less than all of the optical output emitted by the light transmitter passes through the substrate;

converting, by the optical power monitor photodetector, the absorbed fraction of the detected optical output into a monitor photocurrent; and

monitoring the optical power of the emitted optical output based on the monitor photocurrent.

24. The method of claim 23, further comprising:

adjusting bias and modulation currents to achieve desired operating characteristics of the light transmitter.

25. The method of claim 23, further comprising:

adjusting bias and modulation currents to achieve desired operating characteristics of the optical link.

26. The method of claim 23, further comprising:

adjusting operating characteristics of the light transmitter for temperature variations by adjusting bias or modulation currents.

27. The method of claim 23, further comprising:

adjusting operating characteristics of the transmitter for degradation by adjusting bias or modulation currents.

28. The method of claim 23, further comprising:

implementing health monitoring in a transceiver by monitoring transmitted power or received power in the optical link.

29. The method of claim 23, further comprising:

implementing built-in test functions in a transceiver by monitoring transmitted power or received power in the optical link.

30. A method of manufacturing an optical bench apparatus, comprising:

providing an optical bench apparatus having a substrate and an integrated optical power monitor photodetector;

providing electrical interconnect lines on the substrate;

integrating a photodetector with some of the electrical interconnect lines to the optical bench apparatus;

connecting the optical power monitor photodetector with some other of the electrical interconnect lines to the optical bench apparatus; and

aligning the photodetector with the optical power monitor photodetector such that an optical input is transmitted through the optical power-monitor photodetector and the photodetector,

wherein the optical power monitor photodetector is integrated with the substrate to absorb a portion of the optical input so that less than all of the optical input passes through the substrate.

35. The method of claim 30, comprising:

epitaxially growing the optical power monitor photodetector.

36. The method of claim 30, comprising:

depositing the optical power monitor photodetector by chemical vapor deposition.

37. The method of claim 30, comprising:

integrating a light transmitter configured to emit an optical output with the substrate; and

integrating another optical power monitor photodetector in alignment with the light transmitter to detect the optical output emitted by the light transmitter.