Active probe card for electrical wafer sort of integrated circuits
First Claim
1. A probe card system for a testing apparatus, comprising:
- a probe card configured to be coupled to a tester of the testing apparatus,an active interposer coupled to the probe card and configured to be wirelessly coupled with a device to be tested that includes a plurality of pads, said active interposer including;
a free surface configured to face the device;
a plurality of pads positioned on the free surface and configured to respectively face the pads of the device and to be separated from the pads of the device by a dielectric, each pad of the active interposer being configured to form, with the respective pad of the device, an elementary wireless coupling element that allows a wireless transmission between the active interposer and the device; and
an amplifier circuit configured to amplify wireless signals from the device and forward the amplified wireless signals to the tester; and
a transmission element coupled to the active interposer and configured to transmit a supply voltage to the device.
1 Assignment
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Accused Products
Abstract
A testing apparatus includes a tester and a probe card system that includes a probe card connected to the tester, and an active interposer connected to the probe card and wirelessly coupled with a device to be tested. The active interposer includes pads positioned on its free surface facing the device. The pads are positioned with respect to pads of the device so that each pad of the active interposer faces a pad of the device and is separated therefrom by a dielectric. Each pair of facing pads forms an elementary wireless coupling element which allows a wireless transmission between the active interposer and the device. The active interposer also includes an amplifier circuit configured to amplify wireless signals from the device before forwarding them to the tester. The probe card system includes a transmission element able to transmit a power voltage from the tester to the device.
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Citations
25 Claims
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1. A probe card system for a testing apparatus, comprising:
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a probe card configured to be coupled to a tester of the testing apparatus, an active interposer coupled to the probe card and configured to be wirelessly coupled with a device to be tested that includes a plurality of pads, said active interposer including; a free surface configured to face the device; a plurality of pads positioned on the free surface and configured to respectively face the pads of the device and to be separated from the pads of the device by a dielectric, each pad of the active interposer being configured to form, with the respective pad of the device, an elementary wireless coupling element that allows a wireless transmission between the active interposer and the device; and an amplifier circuit configured to amplify wireless signals from the device and forward the amplified wireless signals to the tester; and a transmission element coupled to the active interposer and configured to transmit a supply voltage to the device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A testing apparatus, comprising:
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a tester; a probe card electrically coupled to the tester; an active interposer coupled to the probe card and configured to be wirelessly coupled with a device to be tested that includes a plurality of pads, said active interposer including; a free surface configured to face the device; a plurality of pads positioned on the free surface and configured to respectively face the pads of the device and to be separated from the pads of the device by a dielectric, each pad of the active interposer being configured to form, with the respective pad of the device, an elementary wireless coupling element that allows a wireless transmission between the active interposer and the device; and an amplifier circuit configured to amplify wireless signals from the device and forward the amplified wireless signals to the tester; and a transmission element coupled to the active interposer and configured to transmit a supply voltage to the device. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. An active interposer for a testing apparatus for testing a device that includes a plurality of pads, the active interposer comprising:
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a body configured to be coupled to a probe card of the testing apparatus, the body including a free surface configured to face the device; a plurality of pads positioned on the free surface and configured to respectively face the pads of the device and to be separated from the pads of the device by a dielectric, each pad of the active interposer being configured to form, with the respective pad of the device, an elementary wireless coupling element that allows a wireless transmission between the active interposer and the device; an amplifier circuit configured to amplify wireless signals from the device and forward the amplified wireless signals to the tester; and a transmission element configured to transmit a supply voltage to the device. - View Dependent Claims (22, 23, 24, 25)
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Specification