×

Charged particle beam apparatus

  • US 9,177,757 B2
  • Filed: 06/21/2013
  • Issued: 11/03/2015
  • Est. Priority Date: 08/03/2012
  • Status: Active Grant
First Claim
Patent Images

1. A charged particle beam apparatus comprising:

  • an electron optical system that focuses electron beams and irradiates a specimen with the electron beams;

    a detector that detects secondary electrons or reflected electrons generated from the specimen due to irradiation with the electron beams; and

    an image processing unit that compares a plurality of images with each other so as to detect a defect,wherein the electron optical system irradiates the same portion of the specimen with the electron beams at a plurality of accelerating voltages, andwherein the image processing unit differentiates a grain from a void on the basis of a contrast change amount of the same portion in a plurality of images which are acquired so as to respectively correspond to the plurality of accelerating voltages.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×