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Deposition of patterned organic thin films

  • US 9,178,184 B2
  • Filed: 05/17/2013
  • Issued: 11/03/2015
  • Est. Priority Date: 02/21/2013
  • Status: Active Grant
First Claim
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1. A device comprising:

  • at least one inlet via;

    a plurality of nozzles, each nozzle in fluid communication with at least one inlet via and each nozzle having an aperture width a;

    a first plurality of skimmers, each skimmer of the first plurality of skimmers aligned with an associated nozzle of the plurality of nozzles and having an orifice width s and an output width w, the orifice disposed a distance D from an outer edge of the associated nozzle; and

    a plurality of exhaust cavities, each exhaust cavity is in fluid communication with at least one of the plurality of nozzles, wherein each exhaust cavity is disposed between one of the plurality of nozzles and one of the plurality of skimmers and wherein the plurality of nozzles and the plurality of skimmers are monolithically integrated within a single nozzle die.

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