Deposition of patterned organic thin films
First Claim
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1. A device comprising:
- at least one inlet via;
a plurality of nozzles, each nozzle in fluid communication with at least one inlet via and each nozzle having an aperture width a;
a first plurality of skimmers, each skimmer of the first plurality of skimmers aligned with an associated nozzle of the plurality of nozzles and having an orifice width s and an output width w, the orifice disposed a distance D from an outer edge of the associated nozzle; and
a plurality of exhaust cavities, each exhaust cavity is in fluid communication with at least one of the plurality of nozzles, wherein each exhaust cavity is disposed between one of the plurality of nozzles and one of the plurality of skimmers and wherein the plurality of nozzles and the plurality of skimmers are monolithically integrated within a single nozzle die.
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Abstract
Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.
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Citations
34 Claims
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1. A device comprising:
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at least one inlet via; a plurality of nozzles, each nozzle in fluid communication with at least one inlet via and each nozzle having an aperture width a; a first plurality of skimmers, each skimmer of the first plurality of skimmers aligned with an associated nozzle of the plurality of nozzles and having an orifice width s and an output width w, the orifice disposed a distance D from an outer edge of the associated nozzle; and a plurality of exhaust cavities, each exhaust cavity is in fluid communication with at least one of the plurality of nozzles, wherein each exhaust cavity is disposed between one of the plurality of nozzles and one of the plurality of skimmers and wherein the plurality of nozzles and the plurality of skimmers are monolithically integrated within a single nozzle die. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification