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Method and apparatus for observing subsurfaces of a target material

  • US 9,182,343 B2
  • Filed: 03/02/2015
  • Issued: 11/10/2015
  • Est. Priority Date: 12/13/2011
  • Status: Active Grant
First Claim
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1. A device, comprising:

  • a light source that facilitates emitting a light signal;

    a first polarizer incident with the light signal, wherein the first polarizer has a first polarization state that facilitates polarizing the light signal to generate a polarized light signal directed to a target;

    a second polarizer incident with a first reflection of the polarized light signal emitted from a top surface of the target and incident with a second reflection of the polarized light signal emitted from subsurfaces of the target, wherein the second polarizer has a second polarization state, and wherein a combination of the first polarization state and the second polarization state creates a mixed polarization state for generating mixed polarized light signals from the first reflection and second reflection;

    a mechanical control that facilitates adjusting the mixed polarization state to generate adjusted mixed polarized light signals;

    a controller that performs operations comprising;

    obtaining configuration information for adjusting the mixed polarization state according to a type of target; and

    controlling the mechanical control to adjust the mixed polarization state according to the configuration information by performing a first sweep of wavelengths of light from the light source and a second sweep of mixed polarization states.

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