Manufacturing structure and process for compliant mechanisms
First Claim
Patent Images
1. A MEMS device comprising:
- a substrate; and
a first beam having a height to width aspect ratio of at least 4;
1, wherein the first beam completely encloses the boundary of a space in a plane parallel to the plane of the substrate, and wherein at least a portion of the first beam forms at least a portion of an actuator,wherein the height of the beam is in a direction orthogonal to the plane of the substrate and the width of the beam is in a direction parallel to the plane of the substrate.
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Abstract
The invention relates, in various aspects, to systems and methods for MEMS actuated displays that can be driven at high speeds and at low voltages for improved image quality and reduced power consumption.
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Citations
19 Claims
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1. A MEMS device comprising:
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a substrate; and a first beam having a height to width aspect ratio of at least 4;
1, wherein the first beam completely encloses the boundary of a space in a plane parallel to the plane of the substrate, and wherein at least a portion of the first beam forms at least a portion of an actuator,wherein the height of the beam is in a direction orthogonal to the plane of the substrate and the width of the beam is in a direction parallel to the plane of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing a MEMS device, comprising:
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forming a first beam to have a height to width aspect ratio of at least 4;
1, coupled to the substrate such that the first beam completely encloses the boundary of a space within a plane parallel to the plane of the substrate, and such that at least a portion of the first beam forms at least a portion of an actuator,wherein the height of the beam is in a direction orthogonal to the plane of the substrate and the width of the beam is in a direction parallel to the plane of the substrate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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Specification