Detecting defects on a wafer with run time use of design data

• US 9,183,624 B2
• Filed: 06/13/2014
• Issued: 11/10/2015
• Est. Priority Date: 06/19/2013
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Karsenti, Laurent, Duffy, Brian
• Primary Examiner(s): LE, BRIAN Q
• Application Number:
  US14/303,602
• Publication Number:
  US 20140376801A1
• Time in Patent Office: 515 Days
• US Class Current: 1/1
• CPC Class Codes: G06T 2207/10061 from scanning electron microscope
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

Methods and systems for detecting defects on a wafer are provided. One method includes creating a searchable database for a design for a wafer, which includes assigning values to different portions of the design based on patterns in the different portions of the design and storing the assigned values in the searchable database. Different portions of the design having substantially the same patterns are assigned the same values in the searchable database. The searchable database is configured such that searching of the database can be synchronized with generation of output for the wafer by one or more detectors of a wafer inspection system. Therefore, as the wafer is being scanned, design information for the output can be determined as fast as the output is generated, which enables multiple, desirable design based inspection capabilities.

Claims

1. A method for detecting defects on a wafer, comprising:

creating a database for a design for a wafer, wherein said creating comprises assigning values to different portions of the design based on patterns in the different portions of the design and storing the assigned values in the database, and wherein the different portions of the design having substantially the same patterns are assigned the same values in the database;

scanning the wafer with a wafer inspection system, wherein one or more detectors of the wafer inspection system generate output for the wafer during the scanning,

while the scanning is being performed, searching the database for patterns in the output, wherein the searching is synchronized with generation of the output for the wafer by the wafer inspection system;

determining values for different portions of the output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the output, and

detecting defects on the wafer by applying one or more defect detection algorithms to the output based on the values assigned to the different portions of the output, wherein creating the database, searching the database, determining the values, and detecting the defects are performed with one or more computer systems, and wherein applying the one or more defect detection algorithms comprises;

determining a statistic for the different portions of the output;

detecting defects in the different portions of the output based on the statistics and for one of the different portions of the output in which one of the defects was detected;

generating a first comparing result by comparing the statistic for the one different portion to the statistics for one or more of the different portions of the output generated within the same die as the one different portion and having the same assigned values as the one different portion;

generating a second comparing result by comparing the statistic for the one different portion to the statistics for one or more other of the different portions of the output generated in one or more dies other than the die in which the one different portion was generated and having the same assigned values as the one different portion; and

determining a defect type for the one of the defects based on the first and second comparing results in combination.

2. The method of claim 1, wherein creating the database comprises applying a geometric hashing method to the design.

5. The method of claim 1, wherein applying the one or more defect detection algorithms further comprises determining a value for a first characteristic of one of the defects based on the different portions of the output generated within a single die on the wafer and a value for a second characteristic of the one defect based on the different portions of the output generated in different dies on the wafer and determining if the one defect is a process variation defect, random defect, or systematic defect based on the values for the first and second characteristics.

6. The method of claim 1, wherein applying the one or more defect detection algorithms further comprises determining an additional statistic for the defects detected in the different portions of the output having one of the assigned values and determining if the defects are systematic defects based on the additional statistic.

7. The method of claim 1, wherein assigning the values comprises assigning predetermined values to the different portions of the design in which process variation is substantially higher than other portions of the design, and wherein applying the one or more defect detection algorithms further comprises applying the one or more defect detection algorithms to only the different portions of the output to which the predetermined values have not been assigned.

8. The method of claim 1, wherein assigning the values comprises assigning predetermined values to the different portions of the design in which process variation is substantially higher than other portions of the design, and wherein scanning the wafer comprises scanning only portions of the wafer corresponding to the different portions of the design to which the predetermined values have not been assigned.

9. The method of claim 1, wherein assigning the values comprises scanning the wafer or another wafer in a recipe setup scan performed with the water inspection system to generate additional output for the wafer or the other wafer with the one or more detectors of the wafer inspection system, determining values for different portions of the additional output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the additional output, and associating noise levels in the different portions of the additional output with the values of the different portions of the design assigned to the different portions of the additional output.

10. The method of claim 9, further comprising determining care areas for the wafer based on the noise levels associated with the values of the different portions of the design.

11. The method of claim 1, further comprising determining one or more characteristics of defects detected in the different portions of the design having the same values.

12. The method of claim 1, wherein applying the one or more defect detection algorithms further comprises:

comparing the output generated at corresponding locations in different dies;

identifying candidate defects based on results of the comparing; and

for one of the candidate defects;

determining a detection confidence based on two or more of the different portions of the output having the same assigned values as the different portion of the output in which the one candidate defect was detected;

rejecting or accepting the one candidate defect as an actual defect based on the detection confidence; and

altering one or more parameters of scanning the wafer and detecting the defects based on whether the one candidate defect is rejected or accepted.

13. The method of claim 1, further comprising generating inspection results for the wafer by associating and storing the assigned values for the different portions of the output in which the defects were detected with information for the defects.

14. The method of claim 1, wherein the values assigned to the different portions of the design indicate if the patterns in the different portions are patterns of interest.

15. The method of claim 14, further comprising altering one or more parameters of scanning the wafer, detecting the defects or a defect review process performed for the defects detected on the wafer based on if the values assigned to the different portions of the design indicate that the patterns in the different portions are the patterns of interest.

16. The method of claim 1, further comprising determining if the defects detected in the different portions of the design having one of the assigned values are systematic defects and, if the defects are determined to be the systematic defects, designating the patterns in the different portions of the design having the one of the assigned values as patterns of interest.

17. The method of claim 16, further comprising altering one or more parameters of scanning the wafer, detecting the defects, or a defect review process performed for the defects detected on the wafer based on whether the different portions of the design having the one of the assigned values are designated as the patterns of interest.

18. The method of claim 1, further comprising determining a noise measure for at least one area on the wafer using the output for two or more areas on the wafer having substantially the same patterns formed therein.

19. The method of claim 18, wherein the at least one area and the two or more areas are located in the same die on the wafer at different within die locations.

20. The method of claim 18, further comprising determining a non-defect related characteristic of the wafer based on the determined noise measure.

21. The method of claim 1, wherein the wafer inspection system is a virtual wafer inspection system.

22. The method of claim 21, further comprising querying the virtual wafer inspection system for the output stored in the virtual wafer inspection system at pattern of interest locations on the wafer and applying one or more algorithms to the output resulting from the querying.

23. The method of claim 1, further comprising, while the scanning is being performed, storing the output in a virtual wafer inspection system, wherein the output used for the searching step is the output stored in the virtual wafer inspection system.

24. The method of claim 23, further comprising, while the scanning is being performed, detecting defects on the wafer by applying one or more other defect detection algorithms to the output as the output is stored in the virtual wafer inspection system.

25. The method of claim 1, further comprising, while the scanning is being performed, storing the output in a virtual wafer inspection system, querying the virtual wafer inspection system for the output stored in the virtual wafer inspection system at pattern of interest locations on the wafer, and applying one or more algorithms to the output resulting from the querying.

3. A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for detecting defects on a wafer, wherein the computer-implemented method comprises:

creating a database for a design for a wafer, wherein said creating comprises assigning values to different portions of the design based on patterns in the different portions of the design and storing the assigned values in the database, and wherein the different portions of the design having substantially the same patterns are assigned the same values in the database;

scanning the wafer with a wafer inspection system, wherein one or more detectors of the wafer inspection system generate output for the wafer during the scanning,

while the scanning is being performed, searching the database for patterns in the output, wherein the searching is synchronized with generation of the output for the wafer by the wafer inspection system;

determining values for different portions of the output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the output, and

detecting defects on the wafer by applying one or more defect detection algorithms to the output based on the values assigned to the different portions of the output, wherein applying the one or more defect detection algorithms comprises;

determining a statistic for the different portions of the output;

detecting defects in the different portions of the output based on the statistics; and

for one of the different portions of the output in which one of the defects was detected;

generating a first comparing result by comparing the statistic for the one different portion to the statistics for one or more of the different portions of the output generated within the same die as the one different portion and having the same assigned values as the one different portion;

generating a second comparing result by comparing the statistic for the one different portion to the statistics for one or more other of the different portions of the output generated in one or more dies other than the die in which the one different portion was generated and having the same assigned values as the one different portion; and

determining a defect type for the one of the defects based on the first and second comparing results in combination.

4. A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for detecting defects on a wafer, wherein the computer-implemented method comprises:

creating a database for a design for a wafer, wherein said creating comprises assigning values to different portions of the design based on patterns in the different portions of the design and storing the assigned values in the database, and wherein the different portions of the design having substantially the same patterns are assigned the same values in the database;

scanning the wafer with a wafer inspection system, wherein one or more detectors of the wafer inspection system generate output for the wafer during the scanning;

while the scanning is being performed, searching the database for patterns in the output, wherein the searching is synchronized with generation of the output for the wafer by the wafer inspection system;

determining values for different portions of the output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the output; and

detecting defects on the wafer by applying one or more defect detection algorithms to the output based on the values assigned to the different portions of the output, and wherein applying the one or more defect detection algorithms comprises;

comparing the output generated at corresponding locations in different dies;

identifying candidate defects based on results of the comparing; and

for one of the candidate defects;

determining a detection confidence based on two or more of the different portions of the output having the same assigned values as the different portion of the output in which the one candidate defect was detected;

rejecting or accepting the one candidate defect as an actual defect based on the detection confidence; and

altering one or more parameters of scanning the wafer and detecting the defects based on whether the one candidate defect is rejected or accepted.

26. A system configured to detect defects on a wafer, comprising:

one or more computer subsystems configured for creating a database for a design for a wafer, wherein said creating comprises assigning values to different portions of the design based on patterns in the different portions of the design and storing the assigned values in the database, and wherein the different portions of the design having substantially the same patterns are assigned the same values in the database; and

an optical subsystem configured for scanning the wafer, wherein one or more detectors of the optical subsystem generate output for the wafer during the scanning, and

wherein the one or more computer subsystems are further configured for;

while the scanning is being performed, searching the database for patterns in the output, wherein the searching is synchronized with generation of the output for the wafer by the optical subsystem;

determining values for different portions of the output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the output; and

detecting defects on the wafer by applying one or more defect detection algorithms to the output based on the values assigned to the different portions of the output, wherein applying the one or more defect detection algorithms comprises;

determining a statistic for the different of the output;

detecting defects in the different portions of the output based on the statistics; and

for one of the different portions of the output in which one of the defects was detected;

generating a first comparing result by comparing the statistic for the one different portion to the statistics for one or more of the different portions of the output generated within the same die as the one different portion and having the same assigned values as the one different portion;

generating a second comparing result by comparing the statistic for the one different portion to the statistics for one or more other of the different portions of the output generated in one or more dies other than the die in which the one different portion was generated and having the same assigned values as the one different portion; and

determining a defect type for the one of the defects based on the first and second comparing results in combination.

27. The system of claim 26, wherein creating the database comprises applying a geometric hashing method to the design.

28. The system of claim 26, wherein applying the one or more defect detection algorithms further comprises determining a value for a first characteristic of one of the defects based on the different portions of the output generated within a single die on the wafer and a value for a second characteristic of the one defect based on the different portions of the output generated in different dies on the wafer and determining if the one defect is a process variation defect, random defect, or systematic defect based on the values for the first and second characteristics.

29. The system of claim 26, wherein applying the one or more defect detection algorithms further comprises determining an additional statistic for the defects detected in the different portions of the output having one of the assigned values and determining if the defects are systematic defects based on the additional statistic.

30. The system of claim 26, wherein assigning the values comprises assigning predetermined values to the different portions of the design in which process variation is substantially higher than other portions of the design, and wherein applying the one or more defect detection algorithms further comprises applying the one or more defect detection algorithms to only the different portions of the output to which the predetermined values have not been assigned.

31. The system of claim 26, wherein assigning the values comprises assigning predetermined values to the different portions of the design in which process variation is substantially higher than other portions of the design, and wherein scanning the wafer comprises scanning only portions of the wafer corresponding to the different portions of the design to which the predetermined values have not been assigned.

32. The system of claim 26, wherein assigning the values comprises scanning the wafer or another wafer in a recipe setup scan performed with the optical subsystem to generate additional output for the wafer or the other wafer with the one or more detectors of the optical subsystem, determining values for different portions of the additional output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the additional output, and associating noise levels in the different portions of the additional output with the values of the different portions of the design assigned to the different portions of the additional output.

33. The system of claim 32, wherein the one or more computer subsystems are further configured for determining care areas for the wafer based on the noise levels associated with the values of the different portions of the design.

34. The system of claim 26, wherein the one or more computer subsystems are further configured for determining one or more characteristics of defects detected in the different portions of the design having the same values.

35. The system of claim 26, wherein applying the one or more detect detection algorithms further comprises:

comparing the output generated at corresponding locations in different dies;

identifying candidate defects based on results of the comparing; and

for one of the candidate defects;

determining a detection confidence based on two or more of the different portions of the output having the same assigned values as the different portion of the output in which the one candidate defect was detected;

rejecting or accepting the one candidate defect as an actual defect based on the detection confidence; and

altering one or more parameters of scanning the wafer and detecting the defects based on whether the one candidate defect is rejected or accepted.

36. The system of claim 26, wherein the one or more computer subsystems are further configured for generating inspection results for the wafer by associating and storing the assigned values for the different portions of the output in which the defects were detected with information for the defects.

37. The system of claim 26, wherein the values assigned to the different portions of the design indicate if the patterns in the different portions are patterns of interest.

38. The system of claim 37, wherein the one or more computer subsystems are further configured for altering one or more parameters of scanning the wafer, detecting the defects, or a defect review process performed for the defects detected on the wafer based on if the values assigned to the different portions of the design indicate that the patterns in the different portions are the patterns of interest.

39. The system of claim 26, wherein the one or more computer subsystems are further configured for determining if the defects detected in the different portions of the design having one of the assigned values are systematic detects and, if the defects are determined to be the systematic defects, designating the patterns in the different portions of the design having the one of the assigned values as patterns of interest.

40. The system of claim 39, wherein the one or more computer subsystems are further configured for altering one or more parameters of scanning the wafer, detecting the defects, or a defect review process performed for the defects detected on the wafer based on whether the different portions of the design having the one of the assigned values are designated as the patterns of interest.

41. The system of claim 26, wherein the one or more computer subsystems are further configured for determining a noise measure for at least one area on the wafer using the output for two or more areas on the wafer having substantially the same patterns formed therein.

42. The system of claim 41, wherein the at least one area and the two or more areas are located in the same die on the wafer at different within die locations.

43. The system of claim 41, wherein the one or more computer subsystems are further configured for determining a non-defect related characteristic of the wafer based on the determined noise measure.

44. The system of claim 26, wherein the one or more computer subsystems are coupled to a virtual wafer inspection system.

45. The system of claim 44, wherein the one or more computer subsystems are further configured for querying the virtual wafer inspection system for the output stored in the virtual wafer inspection system at pattern of interest locations on the wafer and applying one or more algorithms to the output resulting from the querying.

46. The system of claim 26, wherein the one or more computer subsystems are further configured for, while the scanning is being performed, storing the output in a virtual wafer inspection system, and wherein the output used for the searching step is the output stored in the virtual wafer inspection system.

47. The system of claim 46, wherein the one or more computer subsystems are further configured for, while the scanning is being performed, detecting defects on the wafer by applying one or more other defect detection algorithms to the output as the output is stored in the virtual wafer inspection system.

48. The system of claim 26, wherein the one or more computer subsystems are further configured for, while the scanning is being performed, storing the output in a virtual wafer inspection system, querying the virtual wafer inspection system for the output stored in the virtual wafer inspection system at pattern of interest locations on the wafer, and applying one or more algorithms to the output resulting from the querying.

49. A method for detecting defects on a water, comprising:

creating a database for a design for a wafer, wherein said creating comprises assigning values to different portions of the design based on patterns in the different portions of the design and storing the assigned values in the database, and wherein the different portions of the design having substantially the same patterns are assigned the same values in the database;

scanning the wafer with a wafer inspection system, wherein one or more detectors of the wafer inspection system generate output for the wafer during the scanning;

while the scanning is being performed, searching the database for patterns in the output, wherein the searching is synchronized with generation of the output for the wafer by the wafer inspection system;

determining values for different portions of the output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the output; and

detecting defects on the wafer by applying one or more defect detection algorithms to the output based on the values assigned to the different portions of the output, wherein creating the database, searching the database, determining the values, and detecting the defects are performed with one or more computer systems, and wherein applying the one or more defect detection algorithms comprises;

comparing the output generated at corresponding locations in different dies;

identifying candidate defects based on results of the comparing; and

for one of the candidate defects;

determining a detection confidence based on two or more of the different portions of the output having the same assigned values as the different portion of the output in which the one candidate defect was detected;

rejecting or accepting the one candidate defect as an actual defect based on the detection confidence; and

altering one or more parameters of scanning the wafer and detecting the defects based on whether the one candidate defect is rejected or accepted.

50. The method of claim 49, wherein creating the database comprises applying a geometric hashing method to the design.

51. The method of claim 49, wherein applying the one or more defect detection algorithms further comprises performing statistical analysis on the different portions of the output having the same assigned values.

52. The method of claim 49, wherein applying the one or more defect detection algorithms further comprises determining a value for a first characteristic of one of the defects based on the different portions of the output generated within a single die on the wafer and a value for a second characteristic of the one defect based on the different portions of the output generated in different dies on the wafer and determining if the one defect is a process variation defect, random defect, or systematic defect based on the values for the first and second characteristics.

53. The method of claim 49, wherein applying the one or more defect detection algorithms further comprises determining a statistic for the defects detected in the different portions of the output having one of the assigned values and determining if the defects are systematic defects based on the statistic.

54. The method of claim 49, wherein assigning the values comprises assigning predetermined values to the different portions of the design in which process variation is substantially higher than other portions of the design, and wherein applying the one or more defect detection algorithms further comprises applying the one or more defect detection algorithms to only the different portions of the output to which the predetermined values have not been assigned.

55. The method of claim 49, wherein assigning the values comprises assigning predetermined values to the different portions of the design in which process variation is substantially higher than other portions of the design, and wherein scanning the wafer comprises scanning only portions of the wafer corresponding to the different portions of the design to which the predetermined values have not been assigned.

56. The method of claim 49, wherein assigning the values comprises scanning the wafer or another wafer in a recipe setup scan performed with the wafer inspection system to generate additional output for the wafer or the other wafer with the one or more detectors of the wafer inspection system, determining values for different portions of the additional output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the additional output, and associating noise levels in the different portions of the additional output with the values of the different portions of the design assigned to the different portions of the additional output.

57. The method of claim 56, further comprising determining care areas for the wafer based on the noise levels associated with the values of the different portions of the design.

58. The method of claim 49, further comprising determining one or more characteristics of defects detected in the different portions of the design having the same values.

59. The method of claim 49, further comprising generating inspection results for the wafer by associating and storing the assigned values for the different portions of the output in which the defects were detected with information for the defects.

60. The method of claim 49, wherein the values assigned to the different portions of the design indicate if the patterns in the different portions are patterns of interest.

61. The method of claim 60, further comprising altering one or more parameters of scanning the wafer, detecting the defects, or a defect review process performed for the defects detected on the wafer based on if the values assigned to the different portions of the design indicate that the patterns in the different portions are the patterns of interest.

62. The method of claim 49, further comprising determining if the defects detected in the different portions of the design having one of the assigned values are systematic defects and, if the defects are determined to be the systematic defects, designating the patterns in the different portions of the design having the one of the assigned values as patterns of interest.

63. The method of claim 62, further comprising altering one or more parameters of scanning the wafer, detecting the defects, or a defect review process performed for the defects detected on the wafer based on whether the different portions of the design having the one of the assigned values are designated as the patterns of interest.

64. The method of claim 49, further comprising determining a noise measure for at least one area on the wafer using the output for two or more areas on the wafer having substantially the same patterns formed therein.

65. The method of claim 64, wherein the at least one area and the two or more areas are located in the same die on the wafer at different within die locations.

66. The method of claim 64, further comprising determining a non-defect related characteristic of the wafer based on the determined noise measure.

67. The method of claim 49, wherein the wafer inspection system is a virtual wafer inspection system.

68. The method of claim 67, further comprising querying the virtual wafer inspection system for the output stored in the virtual wafer inspection system at pattern of interest locations on the wafer and applying one or more algorithms to the output resulting from the querying.

69. The method of claim 49, further comprising, while the scanning is being performed, storing the output in a virtual wafer inspection system, wherein the output used for the searching step is the output stored in the virtual wafer inspection system.

70. The method of claim 69, further comprising, while the scanning is being performed, detecting defects on the wafer by applying one or more other detect detection algorithms to the output as the output is stored in the virtual wafer inspection system.

71. The method of claim 49, further comprising, while the scanning is being performed, storing the output in a virtual wafer inspection system, querying the virtual wafer inspection system for the output stored in the virtual wafer inspection system at pattern of interest locations on the wafer, and applying one or more algorithms to the output resulting from the querying.

72. A system configured to detect defects on a wafer, comprising:

one or more computer subsystems configured for creating a database for a design for a wafer, wherein said creating comprises assigning values to different portions of the design based on patterns in the different portions of the design and storing the assigned values in the database, and wherein the different portions of the design having substantially the same patterns are assigned the same values in the database; and

an optical subsystem configured for scanning the wafer, wherein one or more detectors of the optical subsystem generate output for the wafer during the scanning, and

wherein the one or more computer subsystems are further configured for;

while the scanning is being performed, searching the database for patterns in the output, wherein the searching is synchronized with generation of the output for the wafer by the optical subsystem;

determining values for different portions of the output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the output; and

detecting defects on the wafer by applying one or more defect detection algorithms to the output based on the values assigned to the different portions of the output, and wherein applying the one or more defect detection algorithms comprises;

comparing the output generated at corresponding locations in different dies;

identifying candidate defects based on results of the comparing; and

for one of the candidate defects;

determining a detection confidence based on two or more of the different portions of the output having the same assigned values as the different portion of the output in which the one candidate defect was detected;

rejecting or accepting the one candidate defect as an actual defect based on the detection confidence; and

altering one or more parameters of scanning the wafer and detecting the defects based on whether the one candidate defect is rejected or accepted.

73. The system of claim 72, wherein creating the database comprises applying a geometric hashing method to the design.

74. The system of claim 72, wherein applying the one or more defect detection algorithms further comprises performing statistical analysis on the different portions of the output having the same assigned values.

75. The system of claim 72, wherein applying the one or more defect detection algorithms further comprises determining a value for a first characteristic of one of the defects based on the different portions of the output generated within a single die on the wafer and a value for a second characteristic of the one defect based on the different portions of the output generated in different dies on the wafer and determining if the one defect is a process variation defect, random defect, or systematic defect based on the values for the first and second characteristics.

76. The system of claim 72, wherein applying the one or more defect detection algorithms further comprises determining a statistic for the defects detected in the different portions of the output having one of the assigned values and determining if the defects are systematic defects based on the statistic.

77. The system of claim 72, wherein assigning the values comprises assigning predetermined values to the different portions of the design in which process variation is substantially higher than other portions of the design, and wherein applying the one or more defect detection algorithms further comprises applying the one or more defect detection algorithms to only the different portions of the output to which the predetermined values have not been assigned.

78. The system of claim 72, wherein assigning the values comprises assigning predetermined values to the different portions of the design in which process variation is substantially higher than other portions of the design, and wherein scanning the wafer comprises scanning only portions of the wafer corresponding to the different portions of the design to which the predetermined values have not been assigned.

79. The system of claim 72, wherein assigning the values comprises scanning the wafer or another wafer in a recipe setup scan performed with the optical subsystem to generate additional output for the wafer or the other wafer with the one or more detectors of the optical subsystem, determining values for different portions of the additional output as the values assigned to the different portions of the design having the patterns that substantially match the patterns in the additional output, and associating noise levels in the different portions of the additional output with the values of the different portions of the design assigned to the different portions of the additional output.

80. The system of claim 79, wherein the one or more computer subsystems are further configured for determining care areas for the water based on the noise levels associated with the values of the different portions of the design.

81. The system of claim 72, wherein the one or more computer subsystems are further configured for determining one or more characteristics of defects detected in the different portions of the design having the same values.

82. The system of claim 72, wherein the one or more computer subsystems are further configured for generating inspection results for the wafer by associating and storing the assigned values for the different portions of the output in which the defects were detected with information for the defects.

83. The system of claim 72, wherein the values assigned to the different portions of the design indicate if the patterns in the different portions are patterns of interest.

84. The system of claim 83, wherein the one or more computer subsystems are further configured for altering one or more parameters of scanning the wafer, detecting the defects, or a defect review process performed for the defects detected on the wafer based on if the values assigned to the different portions of the design indicate that the patterns in the different portions are the patterns of interest.

85. The system of claim 72, wherein the one or more computer subsystems are further configured for determining if the defects detected in the different portions of the design having one of the assigned values are systematic defects and, if the defects are determined to be the systematic defects, designating the patterns in the different portions of the design having the one of the assigned values as patterns of interest.

86. The system of claim 85, wherein the one or more computer subsystems are further configured for altering one or more parameters of scanning the water, detecting the defects, or a defect review process performed for the defects detected on the wafer based on whether the different portions of the design having the one of the assigned values are designated as the patterns of interest.

87. The system of claim 72, wherein the one or more computer subsystems are further configured for determining a noise measure for at least one area on the wafer using the output for two or more areas on the wafer having substantially the same patterns formed therein.

88. The system of claim 87, wherein the at least one area and the two or more areas are located in the same die on the wafer at different within die locations.

89. The system of claim 87, wherein the one or more computer subsystems are further configured for determining a non-detect related characteristic of the wafer based on the determined noise measure.

90. The system of claim 72, wherein the one or more computer subsystems are coupled to a virtual wafer inspection system.

91. The system of claim 90, wherein the one or more computer subsystems are further configured for querying the virtual wafer inspection system for the output stored in the virtual wafer inspection system at pattern of interest locations on the wafer and applying one or more algorithms to the output resulting from the querying.

92. The system of claim 72, wherein the one or more computer subsystems are further configured for, while the scanning is being performed, storing the output in a virtual wafer inspection system, and wherein the output used for the searching step is the output stored in the virtual wafer inspection system.

93. The system of claim 92, wherein the one or more computer subsystems are further configured for, while the scanning is being performed, detecting defects on the wafer by applying one or more other defect detection algorithms to the output as the output is stored in the virtual wafer inspection system.

94. The system of claim 72, wherein the one or more computer subsystems are further configured for, while the scanning is being performed, storing the output in a virtual wafer inspection system, querying the virtual wafer inspection system for the output stored in the virtual wafer inspection system at pattern of interest locations on the wafer, and applying one or more algorithms to the output resulting from the querying.