Etching of infrared sensor membrane

• US 9,184,330 B2
• Filed: 12/22/2014
• Issued: 11/10/2015
• Est. Priority Date: 12/24/2013
• Status: Active Grant

• Current Assignee: Melexis Technologies NV (Sensinnovat BVBA)
• Original Assignee: Melexis Technologies NV (Sensinnovat BVBA)
• Inventors: Maes, Ben, Van Buggenhout, Carl, Van Der Wiel, Appolonius Jacobus
• Primary Examiner(s): Nguyen, Dao H
• Application Number:
  US14/578,701
• Publication Number:
  US 20150179861A1
• Time in Patent Office: 323 Days
• Field of Search: 257/88, 257/467, 257/468, 257/470, 257/577, 257/E29.062, 257/E29.002, 257/E29.347, 257/E27.036, 257/E21.158, 374/121, 438/51, 438/53, 438/54
• US Class Current: 1/1
• CPC Class Codes: G01J 5/02 Constructional details
• CPC Class Codes: G01J 5/024 Special manufacturing steps or sacrificial layers or layer structures
• CPC Class Codes: G01J 5/12 using thermoelectric elements, e.g. thermocouples
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
• CPC Class Codes: H01L 27/14669 Infrared imagers
• CPC Class Codes: H01L 27/14683 Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof not peculiar thereto H01L21/00
• CPC Class Codes: H01L 31/09 Devices sensitive to infrared, visible or ultraviolet radiation H01L31/101 takes precedence
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Abstract

The invention relates to an infrared thermal sensor comprising a substrate having a cavity, a cavity bottom wall formed by a continuous substrate surface. The sensor comprises a membrane adapted for receiving heat from incident infrared radiation, a beam suspending the membrane, and a thermocouple. This membrane comprises openings extending through the membrane for facilitating the passage of an anisotropic etchant for etching the cavity during manufacture. Each opening has a cross-section with a length to width ratio of at least 4. The width direction of respectively a first and a second set of openings is oriented according to respectively a first crystallographic orientation and a second crystallographic orientation, these orientations corresponding to different directions lying in loosely packed crystal lattice faces of the semiconductor substrate.

Claims

1. An infrared thermal sensor comprising:

a semiconductor substrate having a cavity defined therein, wherein a bottom wall of said cavity is formed by a continuous surface of the semiconductor substrate,

a membrane disposed in or over said cavity, the membrane being adapted for receiving heat transferred by infrared radiation incident on said membrane, said membrane comprising a plurality of openings extending through the membrane,

at least one beam for suspending the membrane over the semiconductor substrate, and

at least one thermocouple disposed in or on said at least one beam,

wherein said plurality of openings are adapted for facilitating the passage of an anisotropic etchant for etching the cavity during manufacture of the infrared thermal sensor,

wherein at the top surface of the membrane, each opening of the plurality of openings has a cross-section with a length to width ratio of at least four,

wherein the width direction of a first set comprising at least two openings of said plurality of openings is substantially oriented according to a first crystallographic orientation of the semiconductor substrate, said first crystallographic orientation corresponding to a direction lying in a loosely packed crystal lattice face of the semiconductor substrate, and

wherein the width direction of a second set of said plurality of openings is substantially oriented along a second crystallographic orientation of the semiconductor substrate, said first crystallographic orientation and said second crystallographic orientation corresponding to different directions lying in loosely packed crystal lattice faces of the semiconductor substrate.

2. The infrared thermal sensor according to claim 1, in which the first crystallographic orientation and the second crystallographic orientation are substantially orthogonal.

3. The infrared thermal sensor according to claim 2, in which said semiconductor substrate comprises a semiconductor material having a body-centered cubic lattice structure, and in which said first crystallographic orientation and said second crystallographic orientation correspond to crystallographic directions having Miller index <

100>

.

4. The infrared thermal sensor according to claim 1, in which each opening of said first set of openings has at least one opening of the second set of openings as closest neighboring opening.

5. The infrared thermal sensor according to claim 1, wherein the at least one beam is joined to the membrane in a central region of the membrane, said at least one beam being laterally spaced away from the membrane by a plurality of further openings adapted for facilitating the passage of the anisotropic etchant for etching the cavity during manufacture of the infrared thermal sensor.

6. The infrared thermal sensor according to claim 1, in which at the top surface of the membrane, for each opening of the plurality of openings, the minimal area surface segment circumscribed by lines lying in a densely packed crystal lattice plane of the semiconductor substrate touches or overlaps with the corresponding minimal area surface segment of another opening of the plurality of openings or, in which each opening of said first set of openings has at least one opening of the second set of openings as closest neighboring opening, another opening of the plurality of further openings.

7. The infrared thermal sensor according to claim 1, furthermore comprising a cap contacting said semiconductor substrate such as to seal the cavity air-tight.

8. The infrared thermal sensor according to claim 1, in which said membrane has a rounded shape or a convex polygonal shape having at least six corners.

9. A method for manufacturing an infrared thermal sensor, the method comprising:

providing a membrane stack on a semiconductor substrate, said membrane stack comprising an etch stop layer,

patterning the membrane stack such as to define a membrane and at least one beam for suspending the membrane over the semiconductor substrate,

forming a plurality of openings in said membrane stack extending through the etch stop layer such that at the top surface of the membrane, each opening of the plurality of openings has a cross-section with a length to width ratio of at least four,

etching a cavity underneath the membrane and the at least one beam using an anisotropic etchant, and

providing at least one thermocouple in or on said at least one beam,

wherein etching the cavity underneath the membrane comprises forming a bottom wall of said cavity defined by a continuous surface of the semiconductor substrate,

herein forming the plurality of openings comprises providing a first set comprising at least two openings of said plurality of openings, the width direction of said first set being substantially oriented according to a first crystallographic orientation of the semiconductor substrate, said first crystallographic orientation corresponding to a direction lying in a loosely packed crystal lattice face of the semiconductor substrate, and

wherein forming the plurality of openings comprises providing a second set of said plurality of openings, the width direction of the second set being substantially oriented along a second crystallographic orientation of the semiconductor substrate, said first crystallographic orientation and said second crystallographic orientation corresponding to different directions lying in loosely packed crystal lattice faces of the semiconductor substrate.

10. The method according to claim 9, wherein forming the plurality of openings comprises arranging each opening of said first set of openings such as to have at least one opening of the second set of openings as closest neighboring opening.

11. The method according to claim 9, further comprising forming a plurality of further openings for laterally spacing away the at least one beam from the membrane such as to join the at least one beam to the membrane in a central region of the membrane.

12. The method according to claim 9, wherein forming the plurality of openings comprises arranging each opening of the plurality of openings such that the minimal area surface segment circumscribed by lines lying in a densely packed crystal lattice face of the semiconductor substrate touches or overlaps with the corresponding minimal area surface segment of another opening of the plurality of openings or, wherein further comprising forming a plurality of further openings for laterally spacing away the at least one beam from the membrane such as to join the at least one beam to the membrane in a central region of the membrane, another opening of the plurality of further openings.

13. The method according to claim 9, furthermore comprising providing a cap contacting said semiconductor substrate such as to seal the cavity air-tight.

14. The method according to claim 13, furthermore comprising filling said cavity with a gas under a predefined pressure of less than 50 mbar.

15. The method according to claim 9, wherein etching the cavity comprises using tetramethyl ammonium hydroxide or KOH as said anisotropic etchant.