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Method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries

  • US 9,184,438 B2
  • Filed: 10/02/2009
  • Issued: 11/10/2015
  • Est. Priority Date: 10/10/2008
  • Status: Expired due to Fees
First Claim
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1. A process of etching silicon to form silicon structures on the etched surfaces, the process comprising:

  • treating silicon with an initial etching solution comprising;

    5 to 10M HF,0.01 to 0.1 M Ag+ ions,a concentration within a range of 0.02 to 0.2M NO3

    ions, andsubsequently adding further NO3

    ions in the form of an alkali metal nitrate or ammonium nitrate salt, or in the form of nitric acid, to maintain the concentration of NO3

    ions within the range specified for the initial etching solution; and

    separating the etched silicon from the solution.

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