Laser system and laser light generation method
First Claim
1. A laser system comprising:
- a master oscillator including a seed laser and an amplifier and configured to generate pulsed laser light;
an amplification device configured to amplify the pulsed laser light from the master oscillator;
a first timing detector configured to detect a first timing at which the pulsed laser light passes through a predetermined position;
a second timing detector configured to detect a second timing at which the amplification device discharges; and
a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device,wherein the master oscillator further includes at least one optical shutter disposed in an optical path between the seed laser and the amplification device,wherein the predetermined position is a position where the pulsed laser light passes through after the optical shutter, andwherein the controller is configured to control at least one of a timing at which the optical shutter is put into an open state and a timing at which the amplification device discharges based on the results of detection by the first timing detector and the second timing detector.
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Abstract
A laser system may include: a master oscillator configured to output pulsed laser light; an amplification device for amplifying the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the master oscillator outputs the pulsed laser light; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device.
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Citations
20 Claims
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1. A laser system comprising:
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a master oscillator including a seed laser and an amplifier and configured to generate pulsed laser light; an amplification device configured to amplify the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the pulsed laser light passes through a predetermined position; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device, wherein the master oscillator further includes at least one optical shutter disposed in an optical path between the seed laser and the amplification device, wherein the predetermined position is a position where the pulsed laser light passes through after the optical shutter, and wherein the controller is configured to control at least one of a timing at which the optical shutter is put into an open state and a timing at which the amplification device discharges based on the results of detection by the first timing detector and the second timing detector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 16, 17, 18, 19)
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11. A laser system comprising:
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a master oscillator configured to generate pulsed laser light; an amplification device configured to input the pulsed laser light outputted from the master oscillator and amplify the pulsed laser light; at least one optical shutter disposed in an optical path of the pulsed laser light to be inputted into the amplification device; a first timing detector located on a position below the optical shutter in the optical path and configured to detect a first timing at which the pulsed laser light passes therethrough; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of a first timing at which the master oscillator outputs pulsed laser light, a timing at which the optical shutter is put into an open state and a timing at which the amplification device discharges. - View Dependent Claims (12, 13, 14, 15)
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20. A laser system comprising:
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a master oscillator including a seed laser and an amplifier and configured to generate pulsed laser light; an amplification device configured to amplify the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the pulsed laser light passes through a predetermined position; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device, wherein the second timing detector includes a current sensor and is configured to detect a timing at which a current caused by discharge produced at the discharge space of the amplification device flows as the second timing.
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Specification