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Laser system and laser light generation method

  • US 9,184,555 B2
  • Filed: 06/06/2014
  • Issued: 11/10/2015
  • Est. Priority Date: 03/28/2011
  • Status: Active Grant
First Claim
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1. A laser system comprising:

  • a master oscillator including a seed laser and an amplifier and configured to generate pulsed laser light;

    an amplification device configured to amplify the pulsed laser light from the master oscillator;

    a first timing detector configured to detect a first timing at which the pulsed laser light passes through a predetermined position;

    a second timing detector configured to detect a second timing at which the amplification device discharges; and

    a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device,wherein the master oscillator further includes at least one optical shutter disposed in an optical path between the seed laser and the amplification device,wherein the predetermined position is a position where the pulsed laser light passes through after the optical shutter, andwherein the controller is configured to control at least one of a timing at which the optical shutter is put into an open state and a timing at which the amplification device discharges based on the results of detection by the first timing detector and the second timing detector.

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