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Automated EDS standards calibration

  • US 9,188,555 B2
  • Filed: 07/30/2012
  • Issued: 11/17/2015
  • Est. Priority Date: 07/30/2012
  • Status: Active Grant
First Claim
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1. A method of performing energy-dispersive x-ray spectroscopy, comprising:

  • creating, using a source instrument, library spectra by;

    directing, using an electron source and focusing options of the source instrument, an electron beam toward one or more elemental standards;

    obtaining, using a x-ray detector of the source instrument, energy-dispersive x-ray spectra of the one or more elemental standards;

    creating a spectra library from the spectra of the one or more elemental standards;

    creating, using a field instrument, calibration spectra, the calibration spectra having a lower resolution than the library spectra by;

    directing, using an electron source and focusing options of the field instrument, an electron beam toward an elemental standard sample;

    obtaining, using an x-ray detector of the field instrument, an energy-dispersive x-ray spectrum of the elemental standard sample;

    comparing the spectrum of the elemental standard sample to an elemental standard of the spectra library;

    determining a transformation based on the comparison of the spectrum of the elemental standard sample to the elemental standard of the spectra library;

    applying the transformation to the spectra library to generate a calibrated spectra library;

    determining, using the field instrument, the elements in an unknown mineral sample, the unknown mineral sample comprising a sample of unknown mineral composition, by;

    directing, using an electron source and focusing options of the field instrument, an electron beam toward the unknown mineral sample;

    obtaining, using the x-ray detector of the field instrument, an energy-dispersive x-ray spectrum of the unknown mineral sample; and

    comparing the obtained spectrum of the unknown mineral sample to the calibrated spectra library.

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