Simulation method, simulation program, processing unit, and simulator
First Claim
1. A simulation method allowing an information processing unit to perform calculation, the calculation comprising:
- decomposing each of a plurality of incident fluxes into flux components in respective unit vector directions that are orthogonal to each other, the plurality of incident fluxes entering, at an arbitrary position, a surface of a processing target that is a target of a predetermined processing;
summing up the flux components for each of the plurality of unit vector directions; and
synthesizing a plurality of flux components into one vector, the plurality of flux components being summations in the respective unit vector directions and being orthogonal to each other, and thereby calculating a normal vector at the arbitrary position on the surface of the processing target.
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Abstract
A simulation method allowing an information processing unit to perform calculation, the calculation includes: decomposing each of a plurality of incident fluxes into flux components in respective unit vector directions that are orthogonal to each other, the plurality of incident fluxes entering, at an arbitrary position, a surface of a processing target that is a target of a predetermined processing; summing up the flux components for each of the plurality of unit vector directions; and synthesizing a plurality of flux components into one vector, the plurality of flux components being summations in the respective unit vector directions and being orthogonal to each other, and thereby calculating a normal vector at the arbitrary position on the surface of the processing target.
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Citations
20 Claims
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1. A simulation method allowing an information processing unit to perform calculation, the calculation comprising:
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decomposing each of a plurality of incident fluxes into flux components in respective unit vector directions that are orthogonal to each other, the plurality of incident fluxes entering, at an arbitrary position, a surface of a processing target that is a target of a predetermined processing; summing up the flux components for each of the plurality of unit vector directions; and synthesizing a plurality of flux components into one vector, the plurality of flux components being summations in the respective unit vector directions and being orthogonal to each other, and thereby calculating a normal vector at the arbitrary position on the surface of the processing target. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A non-transitory computer-readable medium storing a simulation program that allows an information processing unit to perform calculation, the calculation comprising:
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decomposing each of a plurality of incident fluxes into flux components in respective unit vector directions that are orthogonal to each other, the plurality of incident fluxes entering, at an arbitrary position, a surface of a processing target that is a target of a predetermined processing; summing up the flux components for each of the plurality of unit vector directions; and synthesizing a plurality of flux components into one vector, the plurality of flux components being summations in the respective unit vector directions and being orthogonal to each other, and thereby calculating a normal vector at the arbitrary position on the surface of the processing target.
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19. A processing unit comprising:
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a processing section performing a predetermined processing on a processing target; and a simulator simulating the predetermined processing, the simulator performing calculation including decomposing each of a plurality of incident fluxes into flux components in respective unit vector directions that are orthogonal to each other, the plurality of incident fluxes entering, at an arbitrary position, a surface of the processing target, summing up the flux components for each of the plurality of unit vector directions, and synthesizing a plurality of flux components into one vector, the plurality of flux components being summations in the respective unit vector directions and being orthogonal to each other, and thereby calculating a normal vector at the arbitrary position on the surface of the processing target.
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20. A simulator comprising a calculation section simulating a predetermined processing on a processing target, the calculation section performing calculation including
decomposing each of a plurality of incident fluxes into flux components in respective unit vector directions that are orthogonal to each other, the plurality of incident fluxes entering, at an arbitrary position, a surface of the processing target, summing up the flux components for each of the plurality of unit vector directions, and synthesizing a plurality of flux components into one vector, the plurality of flux components being summations in the respective unit vector directions and being orthogonal to each other, and thereby calculating a normal vector at the arbitrary position on the surface of the processing target.
Specification