Magnetic film enhanced inductor

• US 9,190,201 B2
• Filed: 03/04/2009
• Issued: 11/17/2015
• Est. Priority Date: 03/04/2009
• Status: Active Grant

• Current Assignee: Qualcomm, Inc.
• Original Assignee: Qualcomm, Inc.
• Inventors: Li, Xia, Nowak, Matthew, Kang, Seung H., Henderson, Brian Matthew
• Primary Examiner(s): Enad, Elvin G
• Assistant Examiner(s): Hinson, Ronald
• Application Number:
  US12/397,488
• Publication Number:
  US 20100225435A1
• Time in Patent Office: 2,449 Days
• Field of Search: 336/200
• US Class Current: 1/1
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 2017/0053 with means to reduce eddy currents
• CPC Class Codes: H01F 2017/0066 with a magnetic layer
• CPC Class Codes: H01F 41/046 structurally combined with ferromagnetic material
• CPC Class Codes: H01F 41/14 for applying magnetic films to substrates
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An integrated magnetic film enhanced inductor and a method of forming an integrated magnetic film enhanced inductor are disclosed. The integrated magnetic film enhanced inductor includes an inductor metal having a first portion and a second portion, a top metal or bottom metal coupled to the inductor metal, and an isolation film disposed one of in, on, and adjacent to at least one of the first portion and the second portion of the inductor metal. The isolation film includes a magnetic material, such as a magnetic film.

Claims

1. An inductor comprising:

an inductor metal having a first portion and a second portion;

a cap layer comprising a top portion on top of at least one of the first portion or the second portion, and a sidewall portion in a space between sidewalls of the first portion and the second portion; and

a magnetic material comprising a plurality of magnetic film strips in holes in the top portion and the sidewall portion of the cap layer, wherein a vertical length of the magnetic material is greater than a vertical length of the sidewall of at least one of the first portion or the second portion of the inductor metal.

2. The inductor according to claim 1, wherein the magnetic material is a magnetic film.

3. The inductor according to claim 1, wherein a thickness of the magnetic material is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.

4. The inductor according to claim 1, wherein the inductor is a serpent type inductor.

5. The inductor according to claim 1, wherein the inductor is a circular type inductor.

6. The inductor according to claim 1, further comprising:

a top metal or bottom metal coupled to the inductor metal.

7. The inductor according to claim 1, further comprising:

a circuit coupled to the inductor metal.

8. The inductor according to claim 1 integrated in at least one semiconductor die.

9. The inductor according to claim 1, further comprising an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.

10. An inductor comprising:

a substrate;

an inductor metal having a plurality of turns on the substrate;

a cap layer comprising a top portion on top of at least one of the plurality of turns, and a sidewall portion in a space between adjacent turns of the plurality of turns; and

a magnetic material comprising a plurality of magnetic film strips in holes in the top portion and the sidewall portion of the cap layer, wherein a vertical length of the magnetic material is greater than a vertical length of the sidewall of at least one of the plurality of turns of the inductor metal.

11. The inductor according to claim 10, wherein the magnetic material is a magnetic film.

12. The inductor according to claim 10, wherein a thickness of the magnetic material is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.

13. The inductor according to claim 10, wherein the inductor is a serpent type inductor.

14. The inductor according to claim 10, wherein the inductor is a circular type inductor.

15. The inductor according to claim 10, further comprising:

a top metal or a bottom metal coupled to the inductor metal.

16. The inductor according to claim 10, further comprising:

a circuit coupled to the inductor metal.

17. The inductor according to claim 10 integrated in at least one semiconductor die.

18. The inductor according to claim 10, further comprising an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.

19. An inductor comprising:

inductive means for generating a magnetic field, the inductive means having a first portion and a second portion;

isolating means for magnetically isolating at least one of the first portion or the second portion of the inductive means, the isolating means comprising a top portion on top of at least one of the first portion or the second portion, and a sidewall portion in a space between sidewalls of the first portion and the second portion; and

magnetic means for increasing inductance of the inductive means, in holes in the top portion and the sidewall portion of the isolating means, wherein a vertical length of the magnetic means is greater than a vertical length of the sidewall of at least one of the first portion or the second portion of the inductive means.

20. The inductor according to claim 19, wherein a thickness of the magnetic means is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.

21. The inductor according to claim 19, wherein the inductor is a serpent type inductor.

22. The inductor according to claim 19, wherein the inductor is a circular type inductor.

23. The inductor according to claim 19, further comprising:

first and second electrode means for electrically connecting the inductor coupled to the inductive means.

24. The inductor according to claim 19 integrated in at least one semiconductor die.

25. The inductor according to claim 19, further comprising an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.