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Large-deflection microactuators

  • US 9,190,600 B2
  • Filed: 05/31/2013
  • Issued: 11/17/2015
  • Est. Priority Date: 06/13/2012
  • Status: Active Grant
First Claim
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1. An actuator, comprising:

  • a) a plurality of S-drives, each having a first end and a second end, the S-drives mechanically connected in series at their first ends and second ends alternately, each S-drive including;

    i) four piezoelectric elements disposed substantially in a respective common plane of the S-drive and arranged as a first and a second pair of the piezoelectric elements, the piezoelectric elements in each pair spaced apart and mechanically coupled at their ends, and the first and second pairs mechanically connected in series to define the first and second ends of the S-drives; and

    ii) first and second electrodes arranged so that voltage applied to the first electrode causes deformation of a first piezoelectric element of the first pair and a second piezoelectric element of the second pair, and voltage applied to the second electrode causes deformation of a second piezoelectric element of the first pair and a first piezoelectric element of the second pair;

    iii) one or more common electrode(s), each common electrode arranged opposite the first electrode or opposite the second electrode in a direction substantially normal to the respective common plane; and

    b) a controller adapted to selectively apply voltage of a first polarity between the first electrode and at least one of the common electrode(s) facing the first electrode, and contemporaneously apply voltage of a second polarity opposite to the first polarity between the second electrode and at least one of the common electrode(s) facing the second electrode, so that each of the S-drives deflects substantially in the respective common plane and substantially in a common deflection direction.

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