Angular rate sensor having multiple axis sensing capability

• US 9,194,704 B2
• Filed: 03/13/2013
• Issued: 11/24/2015
• Est. Priority Date: 03/13/2013
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: Lin, Yizhen, Mijuskovic, Dejan
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US13/798,902
• Publication Number:
  US 20140260608A1
• Time in Patent Office: 986 Days
• Field of Search: 735/041.2, 735/041.4, 735/040.2, 735/040.4, 735/10, 735/11, 735/040.8
• US Class Current: 1/1
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

An angular rate sensor (20) includes a single drive mass (24) and distributed sense masses (36, 38, 40, 42) located within a central opening (30) of the drive mass (24). The drive mass (24) is enabled to rotate around the Z-axis (64) under electrostatic stimulus. The sense masses (36, 38, 40, 42) are coupled to the drive mass by spring elements (44, 46, 48, 50) such that oscillatory rotary motion (90) of the drive mass imparts a linear drive motion (92, 94) on the sense masses. The distributed sense masses form two pairs of sense masses, where one pair senses X- and Z-axis angular rate and the other pair senses Y- and Z-axis angular rate. The sense masses are coupled to one another via a centrally located coupler element (34) to ensure that the sense masses of each pair are moving in anti-phase.

Claims

1. An angular rate sensor comprising:

a substrate having a surface;

a drive mass flexibly coupled to said substrate, said drive mass being configured to move with an oscillatory rotary drive motion about a first axis that is substantially perpendicular to said surface of said substrate, said drive mass having a central opening defined by an inner perimeter;

a coupler element located in said central opening and suspended above said surface of said substrate;

a first sense mass located in said central opening and interconnected between said inner perimeter of said drive mass and said coupler element via first spring elements;

a second sense mass located in said central opening and interconnected between said inner perimeter of said drive mass and said coupler element via second spring elements, said first and second sense masses being positioned on opposing sides of a second axis with said coupler element located between said first and second sense masses, said second axis being oriented substantially parallel to said surface of said substrate, wherein said oscillatory rotary drive motion of said drive mass imparts a linear drive motion on said first and second sense masses via said first and second spring elements, said linear drive motion being in a first drive direction substantially parallel to said second axis.

2. An angular rate sensor as claimed in claim 1 wherein flexible interconnection of said coupler element with each of said first and second sense masses via said first and second spring elements enables anti-phase motion of said first and second sense masses in said first drive direction substantially parallel to said second axis in response to said linear drive motion.

3. An angular rate sensor as claimed in claim 1 wherein said first and second spring elements enable said first and second sense masses to oscillate relative to a sense axis that is perpendicular to said second axis in response to an angular velocity about an input axis, said input axis being perpendicular to each of said second axis and said sense axis.

4. An angular rate sensor as claimed in claim 3 further comprising electrodes disposed on said surface of said substrate beneath each of said first and second sense masses, wherein said input axis is substantially parallel to said surface of said substrate and said sense axis is substantially perpendicular to said surface of said substrate.

5. An angular rate sensor as claimed in claim 3 further comprising fixed electrodes anchored to said substrate and movable electrodes extending from edges of said first and second sense masses, said movable electrodes located proximate said fixed electrodes, said fixed and movable electrodes being longitudinally aligned with said second axis.

6. An angular rate sensor as claimed in claim 5 wherein a second input axis is substantially perpendicular to said surface of said substrate and a second sense axis is substantially parallel to said surface of said substrate.

7. An angular rate sensor as claimed in claim 1 further comprising:

a third sense mass located in said central opening and interconnected between said inner perimeter of said drive mass and said coupler element via third spring elements; and

a fourth sense mass located in said central opening and interconnected between said inner perimeter of said drive mass and said coupler element via fourth spring elements, said third and fourth sense masses being positioned on opposing sides of a third axis with said coupler element located between said third and fourth sense masses, said third axis being oriented substantially parallel to said surface of said substrate and perpendicular to said second axis, wherein said oscillatory rotary drive motion of said drive mass imparts said linear drive motion on said third and fourth drive masses via said third and fourth spring elements, said linear drive motion being imparted on said third and fourth drive masses in a second drive direction substantially parallel to said third axis.

8. An angular rate sensor as claimed in claim 7 wherein flexible interconnection of said coupler element with each of said third and fourth sense masses via said third and fourth spring elements enables anti-phase motion of said third and fourth sense masses in said second drive direction substantially parallel to said third axis in response to said linear drive motion.

9. An angular rate sensor as claimed in claim 7 wherein:

said third spring elements enable said third sense mass to oscillate relative to a sense axis that is perpendicular to said third axis in response to an angular velocity about an input axis, said input axis being perpendicular to each of said third axis and said sense axis; and

said fourth spring elements enable said fourth sense mass to oscillate relative to said sense axis in response to said angular velocity about said input axis.

10. An angular rate sensor as claimed in claim 9 further comprising electrodes disposed on said surface of said substrate beneath each of said third and fourth sense masses, wherein said input axis is substantially parallel to said surface of said substrate and said sense axis is substantially perpendicular to said surface of said substrate.

11. An angular rate sensor as claimed in claim 10 wherein said angular velocity is a first angular velocity, said input axis is a first input axis, said electrodes are first electrodes, and said angular rate sensor further comprises second electrodes disposed on said surface of said substrate beneath each of said first and second sense masses, wherein said first and second spring elements enable said first and second sense masses to oscillate relative to said sense axis in response to a second angular velocity about a second input axis, said second input axis being substantially parallel to said surface of said substrate, and said second input axis being perpendicular to each of said first input axis and said sense axis.

12. An angular rate sensor as claimed in claim 11 wherein said sense axis is a first sense axis, and said angular rate sensor further comprises:

first movable electrodes extending from edges of said first and second sense masses and first fixed electrodes anchored to said substrate, said first fixed electrodes positioned proximate said first movable electrodes, said first movable electrodes and said first fixed electrodes being longitudinally aligned with said second axis;

second movable electrodes extending from edges of said third and fourth sense masses and second fixed electrodes anchored to said substrate, said second fixed electrodes positioned proximate said second movable electrodes, said second movable electrodes and said second fixed electrodes being longitudinally aligned with said third axis;

wherein

said first and second spring elements enable said first and second sense masses to oscillate relative to a second sense axis in response to a third angular velocity about a third input axis, said third input axis being substantially perpendicular to said surface of said substrate, and said second sense axis being substantially parallel to said surface of said substrate; and

said third and fourth spring elements enable said third and fourth sense masses to oscillate relative to a third sense axis in response to said third angular velocity about said third input axis, said third sense axis being substantially parallel to said surface of said substrate and substantially perpendicular to said second sense axis.

13. An angular rate sensor as claimed in claim 9 further comprising fixed electrodes anchored to said substrate and movable electrodes extending from edges of said third and fourth sense masses, said movable electrodes located proximate said fixed electrodes, said fixed and movable electrodes being longitudinally aligned with said third axis, wherein said input axis is substantially perpendicular to said surface of said substrate and said sense axis is substantially parallel to said surface of said substrate.

14. A method of fabricating a microelectromechanical systems (MEMS) angular rate sensor comprising:

forming a drive mass flexibly coupled to a substrate and enabled to move with an oscillatory rotary drive motion about a first axis that is substantially perpendicular to a surface of said substrate, said drive mass including a central opening defined by an inner perimeter;

forming a coupler element in said central opening and suspended above said surface of said substrate;

forming a first sense mass, a second sense mass, a third sense mass, and a fourth sense mass in said central opening;

forming first spring elements between said first sense mass and said inner perimeter of said drive mass and between said first sense mass and said coupler element;

forming second spring elements between said second sense mass and said inner perimeter of said drive mass and between said second sense mass and said coupler element, said first and second sense masses being positioned on opposing sides of a second axis with said coupler element located between said first and second sense masses, said second axis being oriented substantially parallel to said surface of said substrate, said first and second sense masses being enabled to undergo a linear drive motion via said first and second spring elements in response to said oscillatory rotary drive motion, said linear drive motion being in a first drive direction substantially parallel to said second axis;

forming third spring elements between said third sense mass and said inner perimeter of said drive mass and between said third sense mass and said coupler element;

forming fourth spring elements between said fourth sense mass and said inner perimeter of said drive mass and between said fourth sense mass and said coupler element, said third and fourth sense masses being positioned on opposing sides of a third axis with said coupler element located between said third and fourth sense masses, said third axis being oriented substantially parallel to said surface of said substrate and perpendicular to said second axis, said third and fourth sense masses being enabled to undergo said linear drive motion via said third and fourth spring elements in response to said oscillatory rotary drive motion, said linear drive motion being imparted on said third and fourth drive masses in a second drive direction substantially parallel to said third axis.

15. A method as claimed in claim 14 further comprising:

forming first electrodes on said surface of said substrate beneath each of said first and second sense masses; and

forming second electrodes on said surface of said substrate beneath each of said third and fourth sense masses;

wherein

said first and second spring elements enable said first and second sense masses to oscillate relative to a sense axis that is perpendicular to said surface of said substrate in response to an angular velocity about a first input axis that is substantially parallel to said third axis; and

said third and fourth spring elements enable said third and fourth sense masses to oscillate relative to said sense axis in response to said angular velocity about a second input axis that is substantially parallel to said second axis.

16. A method as claimed in claim 15 further comprising:

forming first movable electrodes extending from edges of said first and second sense masses;

forming first fixed electrodes anchored to said substrate, said first fixed electrodes being positioned proximate said first movable electrodes, said first movable electrodes and said first fixed electrodes being longitudinally aligned with said second axis;

forming second movable electrodes extending from edges of said third and fourth sense masses; and

forming second fixed electrodes anchored to said substrate, said second fixed electrodes being positioned proximate said second movable electrodes, said second movable electrodes and said second fixed electrodes being longitudinally aligned with said third axis;

wherein

said first and second spring elements enable said first and second sense masses to oscillate relative to a second sense axis in response to said angular velocity about a third input axis that is substantially perpendicular to said surface of said substrate, and said second sense axis being substantially parallel to said surface of said substrate; and

said third and fourth spring elements enable said third and fourth sense masses to oscillate relative to a third sense axis in response to said angular velocity about said third input axis, said third sense axis being substantially perpendicular to said second sense axis.

17. An angular rate sensor comprising:

a substrate having a surface;

a drive mass flexibly coupled to said substrate, said drive mass being configured to move with an oscillatory rotary drive motion about a first axis that is substantially perpendicular to said surface of said substrate, said drive mass having a central opening defined by an inner perimeter;

a coupler element located in said central opening and suspended above said surface of said substrate;

a first sense mass located in said central opening and interconnected between said inner perimeter of said drive mass and said coupler element via first spring elements;

a second sense mass located in said central opening and interconnected between said inner perimeter of said drive mass and said coupler element via second spring elements, said first and second sense masses being positioned on opposing sides of a second axis with said coupler element located between said first and second sense masses, said second axis being oriented substantially parallel to said surface of said substrate;

first electrodes disposed on said surface of said substrate beneath each of said first and second sense masses;

first fixed electrodes anchored to said substrate and first movable electrodes extending from edges of said first and second sense masses, said first movable electrodes being positioned proximate said first fixed electrodes, said first fixed electrodes and first movable electrodes being longitudinally aligned with said second axis;

wherein

said oscillatory rotary drive motion of said drive mass imparts a linear drive motion on said first and second sense masses via said first and second spring elements, said linear drive motion being in a first drive direction substantially parallel to said second axis;

said first and second spring elements enable said first and second sense masses to oscillate relative to a first sense axis in response to an angular velocity about a first input axis, said first sense axis being substantially perpendicular to said surface of said substrate, and said first input axis being substantially parallel to said surface of said substrate and substantially perpendicular to said second axis; and

said first and second spring elements enable said first and second sense masses to oscillate relative to a second sense axis in response to said angular velocity about a second input axis, said second sense axis being substantially parallel to said surface of said substrate, and said second input axis being substantially perpendicular to said surface of said substrate.

18. An angular rate sensor as claimed in claim 17 further comprising:

a third sense mass located in said central opening and interconnected between said inner perimeter of said drive mass and said coupler element via third spring elements; and

a fourth sense mass located in said central opening and interconnected between said inner perimeter of said drive mass and said coupler element via fourth spring elements, said third and fourth sense masses being positioned on opposing sides of a third axis with said coupler element located between said third and fourth sense masses, said third axis being oriented substantially parallel to said surface of said substrate and perpendicular to said second axis;

second electrodes disposed on said surface of said substrate beneath each of said third and fourth sense masses;

wherein

said oscillatory rotary drive motion of said drive mass imparts said linear drive motion on said third and fourth drive masses via said third and fourth spring elements, said linear drive motion being imparted on said third and fourth drive masses in a second drive direction substantially parallel to said third axis;

said third and fourth spring elements enable said third and fourth sense masses to oscillate relative to said first sense axis in response to said angular velocity about a third input axis, said third input axis being substantially parallel to said surface of said substrate and substantially perpendicular to said third axis.

19. An angular rate sensor as claimed in claim 18 further comprising:

second fixed electrodes anchored to said substrate and second movable electrodes extending from edges of said third and fourth sense masses, said second movable electrodes being positioned proximate said second fixed electrodes, said second fixed electrodes and second movable electrodes being longitudinally aligned with said third axis;

wherein

said third and fourth spring elements enable said third and fourth sense masses to oscillate relative to said second sense axis in response to said angular velocity about said second input axis, said second sense axis being substantially parallel to said surface of said substrate, and said second input axis being substantially perpendicular to said surface of said substrate.

20. An angular rate sensor as claimed in claim 18 wherein:

flexible interconnection of said coupler element with each of said first and second sense masses via said first and second spring elements enables anti-phase motion of said first and second sense masses in said first drive direction substantially parallel to said second axis in response to said linear drive motion; and

flexible interconnection of said coupler element with each of said third and fourth sense masses via said third and fourth spring elements enables said anti-phase motion of said third and fourth sense masses in said second drive direction substantially parallel to said third axis in response to said linear drive motion.