Cavity enhanced laser based gas analyzer systems and methods

• US 9,194,742 B2
• Filed: 11/02/2012
• Issued: 11/24/2015
• Est. Priority Date: 11/02/2012
• Status: Active Grant

• Current Assignee: Li & S Company Limited (Yesco Holdings Co., Ltd.)
• Original Assignee: Li & S Company Limited (Yesco Holdings Co., Ltd.)
• Inventors: Kachanov, Alexander, Koulikov, Serguei
• Primary Examiner(s): Toatley, Gregory J
• Assistant Examiner(s): DECENZO, SHAWN H
• Application Number:
  US13/667,995
• Publication Number:
  US 20140125993A1
• Time in Patent Office: 1,117 Days
• Field of Search: 356/454, 356/326, 356/436, 356/317, 356/437, 356/480, 359/341.4, 359/857, 372/10, 372/20
• US Class Current: 1/1
• CPC Class Codes: G01J 3/021 using plane or convex mirrors, parallel phase plates, or particular reflectors
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 3/42 Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry beam switching arrangements G01J3/08
• CPC Class Codes: G01N 2021/399 Diode laser
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis
• CPC Class Codes: G01N 21/39 using tunable lasers

Abstract

Cavity enhanced absorption spectroscopy systems and methods for detecting trace gases using a resonance optical cavity, which contains a gas mixture to be analyzed, and a laser coupled to the cavity by optical feedback. The cavity has any of a variety of configurations with two or more mirrors, including for example a linear cavity, a v-shaped cavity and a ring optical cavity. The cavity will have multiple cavity resonant modes, or a comb of frequencies spaced apart, as determined by the parameters of the cavity, including the length of the cavity, as is well known. Systems and methods herein also allow for optimization of the cavity modes excited during a scan and/or the repetition rate.

Claims

1. A method of measuring cavity loss of a resonant optical cavity over a range of frequencies by exciting one or a plurality of cavity modes of the cavity in a controlled manner, the cavity having at least two cavity mirrors, one of which is a cavity coupling mirror, using a laser that emits continuous wave laser light, wherein the laser is responsive to optical feedback light emerging from the cavity, and wherein a mean optical frequency of the laser is adjustable over a range of frequencies, the method comprising:

coupling the laser light to the cavity via the cavity coupling mirror using mode matching optics, the cavity having a plurality of optical resonance cavity modes that have frequencies within said range of frequencies of the laser;

applying to the laser a current having a predetermined current profile so as to adjust the mean optical frequency of the laser and to excite cavity modes in an excitation order responsive to a shape of the applied current profile, said excitation order comprising excitation of multiple desired cavity modes in as non-consecutive order; and

detecting dynamics of the intra cavity optical power of light circulating in the cavity after a cavity mode has been excited.

2. The method of claim 1, wherein detecting dynamics of the intracavity optical power includes measuring a free decay rate cavity ring down event.

3. The method of claim 1, wherein detecting dynamics of the intracavity optical power includes measuring an intensity of the intra cavity optical power as a function of time.

4. The method of claim 1, wherein said excitation order is one of a sequential order or a non-sequential order.

5. The method of claim 1, further comprising measuring an intensity of the intracavity optical power of light circulating in the cavity and generating a signal representing the intensity of the intracavity optical power of light circulating in the cavity.

6. The method of claim 1, wherein detecting dynamics of the intracavity optical power includes isolating the cavity from the laser whereby the laser light is interrupted from interacting with the cavity while maintaining optical feedback between the laser and light emerging from the cavity.

7. The method of claim 1, wherein detecting dynamics of the intra cavity optical power includes setting a laser current below a laser threshold value and/or application of a reversed voltage to the laser.

8. The method of claim 1, wherein optical feedback light emerges from the cavity coupling mirror and impinges on the laser.

9. The method of claim 8, further including controlling a phase of the optical feedback using a phase adjustment element positioned along an optical path between the cavity coupling mirror and the laser.

10. The method of claim 1, wherein the cavity has a configuration selected from the group consisting of a ring cavity having three or more cavity mirrors and a linear cavity having two or more cavity mirrors.

11. The method of claim 1, wherein the laser current profile applied between two measuring events is optimized to decrease a time between the two measuring events.

12. The method of claim 1, wherein detecting dynamics of the intra cavity optical power includes setting a laser current below a laser threshold value, and wherein the laser current profile includes a compensation pulse portion that drives the laser at a current level and for a duration sufficient to compensate for some or all of the laser heat lost while the laser current was below the laser threshold value and to excite the next desired cavity mode in said excitation order.

37. The method of claim 1, further comprising determining a concentration of a gas in the cavity responsive to detecting dynamics of the intra cavity optical power.

38. The method of claim 12, wherein said current level is at or near a maximum laser driving current.

13. A method of measuring cavity loss of a resonant optical cavity over a range of frequencies by exciting one or a plurality of cavity modes of the cavity in a controlled manner, the cavity having at least two cavity mirrors, one of which is a cavity coupling mirror, using a laser that emits continuous wave laser light, wherein the laser is responsive to optical feedback light emerging from the cavity, and wherein a mean optical frequency of the laser is adjustable over a range of frequencies, the method comprising:

coupling the laser light to the cavity via the cavity coupling mirror using mode matching optics, the cavity having a plurality of optical resonance cavity modes that have frequencies within said range of frequencies of the laser;

applying to the laser a current having a predetermined current profile so as to adjust the mean optical frequency of the laser and to excite cavity modes in an excitation order responsive to a shape of the applied current profile, said excitation order comprising excitation of a single desired cavity mode two or more consecutive times and/or excitation of multiple desired cavity modes in a non-consecutive order; and

detecting dynamics of the intra cavity optical power of light circulating in the cavity after a cavity mode has been excited, wherein optical feedback light emerges from a second cavity mirror different than the cavity coupling mirror and is redirected to impinge on the laser.

14. The method of claim 13, further including controlling a phase of the optical feedback using a phase adjustment element positioned along an optical path between the cavity coupling mirror and the laser and/or a phase adjustment element positioned along an optical path between the second mirror and the laser.

15. A system for measuring cavity loss of a resonant optical cavity over a range of frequencies by exciting one or a plurality of cavity modes of the cavity, the system comprising:

a resonant optical cavity having at least two cavity mirrors, one of which is a cavity coupling mirror, the cavity having a plurality of optical resonance cavity modes;

a laser that emits continuous wave laser light, wherein the laser is capable of being scanned whereby a mean optical frequency of the laser is adjustable over a range of frequencies, and wherein the laser is responsive to optical feedback light emerging from the cavity, and wherein the modes of the cavity have frequencies within said range of frequencies of the laser;

mode matching optics configured to couple the laser light to the cavity via the cavity coupling mirror;

a control module coupled with the laser and adapted to apply a current having a predetermined current profile to the laser so as to adjust the mean optical frequency of the laser and to excite cavity modes in an excitation order responsive to a shape of the applied current profile, said excitation order comprising excitation of multiple desired cavity modes in a non-consecutive order; and

a first detector configured to measure dynamics of the intra cavity optical power of light circulating in the cavity after a cavity mode has been excited.

16. The system of claim 15, wherein the cavity has a configuration selected from the group consisting of a ring cavity having three or more cavity mirrors and a linear cavity having two or more cavity mirrors.

17. The system of claim 15, wherein the control module turns off the laser when the laser locks to a cavity mode and when an intensity of the intracavity optical power of light circulating in the cavity reaches a threshold value or when a difference between the laser frequency and the frequency of the cavity mode reaches a specific value.

18. The system of claim 15, wherein the control module sets the laser current below a laser threshold value, and wherein the laser current profile includes a compensation pulse portion at or near a maximum laser driving current for a duration that compensates for some or all of the laser heat lost while the laser current was below the laser threshold value.

19. The system of claim 15, further including a phase adjustment element positioned along an optical path between the first mirror and the laser and/or a phase adjustment element positioned along an optical path between the second mirror and the laser, for use in controlling a phase of the optical feedback.

20. The system of claim 15, wherein the first detector is configured to measure a free decay rate cavity ring down event.

21. The system of claim 15, wherein the control module is adapted to control the current profile applied to the laser so that the order of cavity modes excited is a sequential order with at least one cavity mode skipped.

22. The system of claim 15, wherein the control module is adapted to control the current profile applied to the laser so that the order of cavity modes excited is a non-sequential order.

23. The system of claim 15, further including one or more optical isolator elements to block the optical feedback light emerging from the coupling cavity mirror to the laser, and to block a second cavity mirror from the light emerging from the laser.

24. A method for measuring cavity loss of a resonant optical cavity over a range of frequencies by exciting one or a plurality of cavity modes of the cavity, the cavity having at least two cavity mirrors, one of which is a cavity coupling mirror, using a laser that emits continuous wave laser light, wherein the laser is responsive to optical feedback light emerging from the cavity, and wherein a mean optical frequency of the laser is adjustable over a range of frequencies, the method comprising:

coupling the laser light to the cavity via the cavity coupling mirror using mode matching optics, the cavity having a plurality of optical resonance cavity modes that have frequencies within said range of frequencies of the laser;

applying to the laser a current having a predetermined current profile so as to adjust the mean optical frequency of the laser and to excite multiple desired cavity modes in a non-consecutive order as determined based on a shape of the applied current profile; and

detecting dynamics of the intra cavity optical power of light circulating in the cavity after a cavity mode has been excited.

25. The method of claim 24;

wherein said order is a non-sequential order.

26. The method of claim 24, wherein said order is a sequential order with at least one mode skipped.

27. The method of claim 24, wherein detecting dynamics includes detecting a ring down event.

28. The method of claim 24, wherein detecting dynamics of the intra cavity optical power includes setting a laser current below the laser threshold value, and wherein the laser current profile includes a compensation pulse portion at or near the maximum laser driving current for a time period that compensates for some or all of the laser heat lost while the laser current was below the laser threshold value.

29. A gas analyzer for detecting one or more analyte species present in a gaseous or liquid medium, the gas analyzer comprising:

a resonant optical cavity containing said medium and having at least two cavity mirrors, one of which is a cavity coupling mirror, the cavity having a plurality of optical resonance cavity modes;

a laser that emits continuous wave laser light, wherein the laser is capable of being scanned whereby a mean optical frequency of the laser is adjustable over a range of frequencies, and wherein the laser is responsive to optical feedback light emerging from the cavity, and wherein the modes of the cavity have frequencies within said range of frequencies of the laser;

mode matching optics configured to couple the laser light to the cavity via the cavity coupling mirror;

a control module coupled with the laser and adapted to apply a current having a predetermined current profile to the laser so as to adjust the mean optical frequency of the laser and to excite cavity modes in an excitation order responsive to a shape of the applied current profile, said excitation order comprising excitation of multiple desired cavity modes in a non-consecutive order; and

a first detector configured to measure, and to generate a signal representing, dynamics of the intra cavity optical power of light circulating in the cavity after a cavity mode has been excited.

30. The system of claim 29, wherein the cavity has a configuration selected from the group consisting of a ring cavity having three or more cavity mirrors and a linear cavity having two or more cavity mirrors.

31. The system of claim 29, wherein the control module turns off the laser when the laser locks to a cavity mode and when an intensity of the intracavity optical power of light circulating in the cavity reaches a threshold value or when a difference between the laser frequency and the frequency of the cavity mode reaches a specific value.

32. The system of claim 29, further including a phase adjustment element positioned along an optical path between the first cavity mirror and the laser, for use in controlling a phase of the optical feedback.

33. The system of claim 29, further including a phase adjustment element positioned along an optical path between the first mirror and the laser and/or a phase adjustment element positioned along an optical path between the second mirror and the laser, for use in controlling a phase of the optical feedback.

34. The system of claim 29, wherein the first detector is configured to measure a free decay rate cavity ring down event.

35. The system of claim 29, wherein the control module is adapted to control the current profile applied to the laser so that the order of cavity modes excited is a sequential order with at least one cavity mode skipped.

36. The system of claim 29, wherein the control module is adapted to control the current profile applied to the laser so that the order of cavity modes excited is a non-sequential order.