Side seal for wet lens elements

• US 9,195,148 B2
• Filed: 07/13/2010
• Issued: 11/24/2015
• Est. Priority Date: 09/25/2002
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Lipson, Matthew, Shvets, Taras, Bruls, Richard
• Primary Examiner(s): RIDDLE, CHRISTINA A
• Application Number:
  US12/834,996
• Publication Number:
  US 20100271605A1
• Time in Patent Office: 1,960 Days
• Field of Search: 355/30, 355/52, 355/53, 355/55, 355 67- 71, 355/77, 250/492.1, 250/492.2, 250/492.22, 250/548, 430/5, 430/8, 430/22, 430/30, 430/311, 430/312, 430/321, 430/322, 430/394, 427/160, 427/508, 427/512, 427/553, 359/361, 359/355, 359507-514, 359/819
• US Class Current: 1/1
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G02B 5/003 Light absorbing elements
• CPC Class Codes: G02B 7/025 using glue
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: Y10T 156/10 Methods of surface bonding and/or assembly therefor

Abstract

A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.

Claims

1. A projection optics system within an immersion lithography system comprising:

a series of optical elements;

a wet lens element having an object-side surface, an image-side optical surface, and a non-optical surface between the object-side surface and the image-side optical surface;

a metal oxide layer on the non-optical surface;

a polyurethane liquid shield coating that covers the metal oxide coating, wherein the polyurethane liquid shield coating is configured to be in contact with a liquid such that the metal oxide coating is protected from contact with the liquid,

wherein the metal oxide coating is opaque to ultra-violet wavelengths.

2. The projection optics system of claim 1, wherein the wet lens element comprises CaF₂.

3. The projection optics system of claim 1, wherein the metal oxide coating comprises SiO₂, Al₂O₅, ZrO₂, HfO₂, Ta₂O₅, Nb₂O₅, or TiO₂.

4. The projection optics system of claim 1, wherein the polyurethane liquid shield coating comprises ultra violet cure polyurethane.

5. The projection optics system of claim 1, wherein the polyurethane liquid shield coating is in the range from 10 to 500 microns.

6. The projection optics system of claim 1, wherein the metal oxide coating and the polyurethane liquid shield coating protect the wet lens element from liquid degradation when the wet lens element is submerged in an immersion liquid.

7. The projection optics system of claim 1, wherein the metal oxide coating is applied to a thickness of about one nanometer to not more than about two hundred micrometers.

8. The projection optics system of claim 1, wherein the metal oxide coating is formed by exposing an organoxy metallic compound to ultra-violet light.

9. The projection optics system of claim 8, wherein the organoxy metallic compound comprises an organo-titanium compound.

10. The projection optics system of claim 1, wherein the polyurethane liquid shield coating provides a water resistant coating.

11. A projection optics system, comprising:

a series of optical elements;

a wet lens element having an object-side surface, an image-side optical surface, and a non-optical surface between the object-side surface and the image-side optical surface;

a metal oxide layer on the non-optical surface;

a polyurethane layer on the metal oxide layer, wherein the polyurethane layer is configured to be in contact with a liquid such that the metal oxide layer is protected from contact with the liquid,

wherein the metal oxide layer is opaque to ultra-violet wavelength.

12. The projection optics system of claim 11, wherein the wet lens element comprises CaF₂.

13. The projection optics system of claim 11, wherein the metal oxide coating comprises SiO₂, Al₂O₅, ZrO₂, HfO₂, Ta₂O₅, Nb₂O₅, or TiO₂.

14. The projection optics system of claim 11, wherein the polyurethane layer comprises ultra violet cure polyurethane.

15. The projection optics system of claim 11, wherein the polyurethane layer has a thickness in the range from 10 to 500 microns.

16. The projection optics system of claim 11, wherein the metal oxide layer and the polyurethane layer protect the wet lens element from liquid degradation when the wet lens element is submerged in an immersion liquid.

17. The projection optics system of claim 11, wherein the metal oxide layer has a thickness of about one nanometer to not more than about two hundred micrometers.

18. The projection optics system of claim 11, wherein the metal oxide layer is formed by exposing an organoxy metallic compound to ultra-violet.

19. The projection optics system of claim 18, wherein the organoxy metallic compound comprises an organo-titanium compound.

20. The projection optics system of claim 11, wherein the polyurethane layer provides a water resistant coating.

21. A projection optics system within an immersion lithography system comprising:

a series of optical elements;

a wet lens element;

a metal oxide coating that covers a side portion of the wet lens element; and

a polyurethane liquid shield coating that covers the metal oxide coating, wherein the polyurethane liquid shield coating is configured to be in contact with a liquid such that the metal oxide coating is protected from contact with the liquid, and wherein the polyurethane liquid shield coating covering the metal oxide coating is pre-soaked in a pre-soak liquid prior to an exposure operation to decrease leaching of material from the polyurethane liquid shield coating.