Dual shallow trench isolation and related applications

• US 9,196,547 B2
• Filed: 03/31/2010
• Issued: 11/24/2015
• Est. Priority Date: 04/03/2009
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Lin, Jeng-Shyan, Yaung, Dun-Nian, Liu, Jen-Cheng, Chuang, Chun-Chieh, Chien, Volume
• Primary Examiner(s): Nguyen, Ha Tran T
• Assistant Examiner(s): CHI, SUBERR L
• Application Number:
  US12/751,126
• Publication Number:
  US 20100252870A1
• Time in Patent Office: 2,064 Days
• Field of Search: 438/400, 438/424, 438/425, 438/427, 438/700, 438/48, 438/57, 438/73, 257/80, 257/82, 257/222, 257/225, 257/228, 257/252, 257/290, 257/461, 257/462, 257/93, 257/374, 257/501
• US Class Current: 1/1
• CPC Class Codes: H01L 21/76229 Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches
• CPC Class Codes: H01L 21/823878 isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
• CPC Class Codes: H01L 27/14621 Colour filter arrangements
• CPC Class Codes: H01L 27/1463 Pixel isolation structures
• CPC Class Codes: H01L 27/1464 Back illuminated imager structures
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers
• CPC Class Codes: H01L 27/14683 Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof not peculiar thereto H01L21/00
• CPC Class Codes: H01L 27/14689 MOS based technologies

Abstract

Embodiments of the invention relate to dual shallow trench isolations (STI). In various embodiments related to CMOS Image Sensor (CIS) technologies, the dual STI refers to one STI structure in the pixel region and another STI structure in the periphery or logic region. The depth of each STI structure depends on the need and/or isolation tolerance of devices in each region. In an embodiment, the pixel region uses NMOS devices and the STI in this region is shallower than that of in the periphery region that includes both NMOS and PMOS device having different P- and N-wells and that desire more protective isolation (i.e., deeper STI). Depending on implementations, different numbers of masks (e.g., two, three) are used to generate the dual STI, and are disclosed in various method embodiments.

Claims

1. A method comprising:

providing a substrate having a pixel area and a periphery area;

providing a mask over the substrate;

photo patterning for a first STI structure in the pixel area and a second STI structure in the periphery area;

etching the mask and the substrate to form the first STI structure and the second STI structure having a first depth;

protecting the pixel area;

etching the second STI structure to a second depth deeper than the first depth;

forming at least one photo detector comprising one or more first NMOS devices in the pixel area, with the proviso that the pixel area does not contain any PMOS devices; and

forming second NMOS devices and PMOS devices in the periphery area.

2. The method of claim 1 further comprising depositing an oxide layer over the first and the second STI structures.

3. The method of claim 2, wherein depositing the oxide layer is done by a high density plasma (HDP) or tetraethyl orthosilicate (TEOS) technique.

4. The method of claim 1, wherein the mask is selected from a group consisting of SiN film and SiON.

5. The method of claim 1, wherein the substrate is of a semiconductor device selected from a group consisting of a CMOS image sensor, an active pixel sensor, a charge coupled device sensor, and an embedded dynamic random access memory (DRAM).

6. The method of claim 1, wherein the substrate is a CMOS image sensor selected from a group consisting of front-side illumination and backside illumination.

7. The method of claim 1, wherein the first depth ranges from 100 Å

to 4000 Å and

the second depth ranges from 2500 Å

to 4500 Å

.

8. The method of claim 1 further comprising depositing an oxide layer between the substrate and the mask and etching the oxide layer to form the first and the second STI structures.

9. The method of claim 8, further comprising:

removing the mask layer and a portion of the oxide layer using chemical mechanical polishing (CMP).

10. The method of claim 1, wherein:

the etching the mask and the substrate to form the first STI structure and the second STI structure having the first depth comprises forming a third STI structure having the first depth in the pixel area; and

the at least one photo detector in the pixel area is positioned between the first STI structure and the third STI structure.

11. The method of claim 1, wherein the protecting the pixel area comprises forming a photo resist layer over the first STI structure and a first portion of the mask, the first portion of the mask overlaying the pixel area, the photo resist layer exposing the second STI structure and a second portion of the mask, and the second portion of the mask overlaying the periphery area.

12. The method of claim 11, wherein the etching the second STI structure to the second depth is performed by masking over the substrate by the photo resist layer and the second portion of the mask.

13. A method comprising:

forming a first masking layer over a substrate, the substrate having a pixel area and a periphery area;

etching the first masking layer and the substrate to form a first opening and a second opening in the pixel area and a third opening in the periphery area, the first, second, and third openings having a first depth;

forming a second masking layer covering the pixel area;

etching, using the first and second masking layers as a mask, the substrate to extend the third opening to a second depth deeper than the first depth;

forming a first shallow trench isolation (STI) structure in the first opening, a second STI structure in the second opening, and a third STI structure in the third opening;

forming at least one photo detector comprising one or more first NMOS devices in the pixel area, with the proviso that the pixel area does not contain any PMOS devices, the at least one photo detector being positioned between the first STI structure and the second STI structure; and

forming second NMOS devices and PMOS devices in the periphery area.

14. The method of claim 13, further comprising depositing an oxide layer over the substrate.

15. The method of claim 14, wherein depositing the oxide layer is performed by using a high density plasma (HDP) or tetraethyl orthosilicate (TEOS) technique.

16. The method of claim 13, wherein the first masking layer comprises SiN or SiON.

17. The method of claim 13, wherein the first depth ranges from 100 Å

to 4000 Å

, and the second depth ranges from 2500 Å

to 4500 Å

.

18. The method of claim 13, further comprising:

depositing an oxide layer between the substrate and the first masking layer; and

etching the oxide layer to form the first, second, and third openings.

19. The method of claim 13, further comprising:

removing the first and second masking layers by using chemical mechanical polishing (CMP).