Vertical cavity surface emitting laser and atomic oscillator

• US 9,197,034 B2
• Filed: 12/17/2014
• Issued: 11/24/2015
• Est. Priority Date: 12/20/2013
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Takenaka, Satoshi, Kurachi, Yuji
• Primary Examiner(s): Niu, Xinning
• Application Number:
  US14/573,622
• Publication Number:
  US 20150180209A1
• Time in Patent Office: 342 Days
• US Class Current: 1/1
• CPC Class Codes: H01S 2301/176 Specific passivation layers on surfaces other than the emission facet
• CPC Class Codes: H01S 5/04252 characterised by the material
• CPC Class Codes: H01S 5/04254 characterised by the shape
• CPC Class Codes: H01S 5/04257 having positive and negative electrodes on the same side of the substrate
• CPC Class Codes: H01S 5/18308 having a special structure for lateral current or light confinement
• CPC Class Codes: H01S 5/18311 using selective oxidation
• CPC Class Codes: H01S 5/18313 by oxidizing at least one of the DBR layers
• CPC Class Codes: H01S 5/18327 Structure being part of a DBR H01S5/18391 takes precedence
• CPC Class Codes: H01S 5/18338 Non-circular shape of the structure
• CPC Class Codes: H01S 5/18341 Intra-cavity contacts
• CPC Class Codes: H01S 5/18347 Mesa comprising active layer
• CPC Class Codes: H01S 5/1835 Non-circular mesa
• CPC Class Codes: H01S 5/18352 Mesa with inclined sidewall
• CPC Class Codes: H01S 5/18355 having a defined polarisation
• CPC Class Codes: H01S 5/3201 incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation

Abstract

A vertical cavity surface emitting laser includes: a substrate; a first mirror layer which is provided over the substrate; an active layer which is provided over the first mirror layer; a second mirror layer which is provided over the active layer; a first electrode and a second electrode which are electrically connected to the first mirror layer and are separated from each other; and a third electrode which is electrically connected to the second mirror layer, wherein the first mirror layer, the active layer, and the second mirror layer configure a laminated body, the laminated body includes a resonance portion which resonates light generated in the active layer, in a plan view, an insulation layer surrounding the laminated body is provided, and in the plan view, the insulation layer is provided between the first electrode and the second electrode.

Claims

1. A vertical cavity surface emitting laser comprising:

a substrate;

a first mirror layer which is provided over the substrate;

an active layer which is provided over the first mirror layer;

a second mirror layer which is provided over the active layer;

a first electrode and a second electrode which are electrically connected to the first mirror layer and are separated from each other; and

a third electrode which is electrically connected to the second mirror layer,

wherein the first mirror layer, the active layer, and the second mirror layer configure a laminated body,

the laminated body includes a resonance portion which resonates light generated in the active layer,

in a plan view, an insulation layer surrounding the laminated body is provided, and

in the plan view, the insulation layer is provided between the first electrode and the second electrode,

the first mirror layer includes a first portion which is provided over the substrate, and a second portion which is provided over the first portion and configures a portion of the laminated body,

the first electrode and the second electrode are provided on the first portion, and

the third electrode is provided on the laminated body.

2. The vertical cavity surface emitting laser according to claim 1,

wherein, in the plan view, the resonance portion is provided between the first electrode and the second electrode.

3. An atomic oscillator comprising:

the vertical cavity surface emitting laser according to claim 1.

4. An atomic oscillator comprising:

the vertical cavity surface emitting laser according to claim 2.