Method for fabricating a layer with absorbing particles for an energy radiation

• US 9,200,370 B2
• Filed: 05/12/2010
• Issued: 12/01/2015
• Est. Priority Date: 05/27/2009
• Status: Expired due to Fees

• Current Assignee: Siemens AG
• Original Assignee: Siemens AG
• Inventors: Doye, Christian, Jensen, Jens Dahl, Krger, Ursus, Kunert, Kathrin, Ullrich, Raymond, Winkler, Gabriele
• Primary Examiner(s): HORNING, JOEL G
• Application Number:
  US13/322,432
• Publication Number:
  US 20120128872A1
• Time in Patent Office: 2,029 Days
• Field of Search: 427/559, 264/430, 264/432
• US Class Current: 1/1
• CPC Class Codes: C23C 18/1208 Oxides, e.g. ceramics
• CPC Class Codes: C23C 18/1216 Metal oxides C23C18/1212 takes precedence
• CPC Class Codes: C23C 18/1225 Deposition of multilayers of inorganic material
• CPC Class Codes: C23C 18/127 Preformed particles
• CPC Class Codes: C23C 18/14 Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources

Abstract

A ceramic layer is fabricated on a substrate by coating the substrate with a material containing chemical precursors of a ceramic. The precursors are transformed by a heat treatment into the ceramic to be fabricated. Different methods for heat insertion may be used for individual layers by absorbing particles, which are utilized in different concentrations or different chemical compositions. A targeted heat insertion even in lower layer regions, for example, by microwave animation, or ultraviolet or infrared light insertion is therefore possible. Beneficially, as a result, comparatively thick layers in particular can be fabricated by a single heat treatment layer.

Claims

1. A method for producing a layer on a substrate, comprising:

applying a first coating material, including first absorber particles that absorb a first electromagnetic energy radiation, providing only a first portion of a volume of the layer;

applying at least one second coating material on the first coating material, providing a second portion of the volume of the layer and containing

a solvent or dispersion medium,

chemical precursors of a ceramic, and

second absorber particles that permit propagation of the first electromagnetic energy radiation, absorb a second electromagnetic energy radiation, different from the first electromagnetic energy radiation, and differ from the first absorber particles with respect to at least one of chemical composition and a mixing ratio of different types of component absorber particles; and

heat treating the substrate after application of the first and at least one second coating materials, whereby the solvent or dispersion medium is evaporated and the chemical precursors are converted into the ceramic so as to form the layer, including input of the first and second electromagnetic energy radiation which are respectively converted into heat by the first and second absorber particles, the first electromagnetic energy radiation able to penetrate the layer only to a first maximum penetration depth within the first portion, and the second electromagnetic energy radiation able to penetrate the layer only to a second maximum penetration depth within the second portion.

2. The method as claimed in claim 1, wherein the first coating material and the at least one second coating material are applied in at least two coats.

3. The method as claimed in claim 2, further comprising applying, on the at least one second coating material, a third coating material without absorber particles which forms a top coat during said heat treating.

4. The method as claimed in claim 3,

wherein the first absorber particles in the first coating material absorb microwaves, and

wherein at least some of the second absorber particles in at least one of the at least one second coating material, absorb at least one of infrared and ultraviolet light.

5. The method as claimed in claim 4, wherein said heat treating includes using a sequence of energy radiations in succession, by which the first and second absorber particles in the first and at least one second coating material are heated in succession.

6. The method as claimed in claim 5, wherein at least one of the first and at least one second coating materials is applied on the substrate with regions of different thickness, and comparatively more of at least one of the first and second absorber particles are used in first regions that are thicker than second regions.

7. The method as claimed in claim 4, wherein at least one of the first and at least one second coating materials is applied on the substrate with regions of different thickness, and comparatively more of at least one of the first and second absorber particles are used in first regions that are thicker than second regions.

8. The method as claimed in claim 3, wherein said heat treating includes using a sequence of energy radiations in succession, by which the first and second absorber particles in the first and at least one second coating material are heated in succession.

9. The method as claimed in claim 8, wherein at least one of the first and at least one second coating materials is applied on the substrate with regions of different thickness, and comparatively more of at least one of the first and second absorber particles are used in first regions that are thicker than second regions.

10. The method as claimed in claim 2,

wherein the first absorber particles in the first coating material absorb microwaves, and

wherein at least some of the second absorber particles in at least one of the at least one second coating material, absorb at least one of infrared and ultraviolet light.

11. The method as claimed in claim 10, wherein said heat treating includes using a sequence of energy radiations in succession, by which the first and second absorber particles in the first and at least one second coating material are heated in succession.

12. The method as claimed in claim 11, wherein at least one of the first and at least one second coating materials is applied on the substrate with regions of different thickness, and comparatively more of at least one of the first and second absorber particles are used in first regions that are thicker than second regions.

13. The method as claimed in claim 1, wherein the first and second absorber particles the first absorber particles absorb microwaves and the second absorber particles absorb light.

14. The method as claimed in claim 1, wherein the first electromagnetic energy radiation is microwave radiation and the second electromagnetic energy radiation is at least one of UV and infrared light.