Semiconductor device and method for manufacturing semiconductor device

• US 9,202,851 B2
• Filed: 12/05/2013
• Issued: 12/01/2015
• Est. Priority Date: 08/07/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Sakata, Junichiro, Hosoba, Miyuki, Takahashi, Tatsuya
• Primary Examiner(s): RODELA, EDUARDO A
• Application Number:
  US14/097,749
• Publication Number:
  US 20140091303A1
• Time in Patent Office: 726 Days
• US Class Current: 1/1
• CPC Class Codes: H01L 27/1222 with a particular composition, shape or crystalline structure of the active layer
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H01L 29/45 Ohmic electrodes
• CPC Class Codes: H10K 59/00 Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs
• CPC Class Codes: H10K 59/123 Connection of the pixel electrodes to the thin film transistors [TFT]

Abstract

The semiconductor device includes a driver circuit including a first thin film transistor and a pixel including a second thin film transistor over one substrate. The first thin film transistor includes a first gate electrode layer, a gate insulating layer, a first oxide semiconductor layer, a first oxide conductive layer, a second oxide conductive layer, an oxide insulating layer which is in contact with part of the first oxide semiconductor layer and which is in contact with peripheries and side surfaces of the first and second oxide conductive layers, a first source electrode layer, and a first drain electrode layer. The second thin film transistor includes a second gate electrode layer, a second oxide semiconductor layer, and a second source electrode layer and a second drain electrode layer each formed using a light-transmitting material.

Claims

1. A semiconductor device comprising:

a first transistor electrically connected to a pixel electrode layer; and

a second transistor comprising;

a first gate electrode layer;

a first insulating layer over the first gate electrode layer;

a first oxide semiconductor layer over the first insulating layer;

a second oxide semiconductor layer over the first oxide semiconductor layer;

a second insulating layer over and in contact with the second oxide semiconductor layer, the second insulating layer covering a side surface of the first oxide semiconductor layer;

a source electrode layer and a drain electrode layer over the second insulating layer, the source electrode layer and the drain electrode layer being electrically connected to the second oxide semiconductor layer;

a second gate electrode layer over the second insulating layer; and

a third insulating layer over the second gate electrode layer,

wherein the pixel electrode layer is over the third insulating layer.

2. The semiconductor device according to claim 1, wherein the first oxide semiconductor layer comprises indium, gallium, and zinc.

3. The semiconductor device according to claim 1, wherein the first oxide semiconductor layer comprises microcrystal.

4. The semiconductor device according to claim 1, wherein the first gate electrode layer is electrically connected to the second gate electrode layer.

5. The semiconductor device according to claim 1, wherein the source electrode layer and the drain electrode layer each comprise a conductive layer of an element selected from Al, Cr, Cu, Ta, Ti, Mo, and W as a main component, or a stack of any of these elements in combination.

6. The semiconductor device according to claim 1, further comprising a capacitor portion,

wherein the capacitor portion includes a capacitor wiring layer and a capacitor electrode layer overlapped with the capacitor wiring layer, and

wherein the capacitor wiring layer and the capacitor electrode layer each have a light-transmitting property.

7. The semiconductor device according to claim 1, wherein the semiconductor device is a touch display.

8. A phone comprising the semiconductor device according to claim 7.

9. A watch comprising the semiconductor device according to claim 7.

10. A display device comprising a pixel and a driver circuit, the pixel comprising a first transistor electrically connected to a pixel electrode layer, the driver circuit comprising a second transistor, the second transistor comprising:

a first gate electrode layer;

a first insulating layer over the first gate electrode layer;

a first oxide semiconductor layer over the first insulating layer;

a second oxide semiconductor layer over the first oxide semiconductor layer;

a second insulating layer over and in contact with the second oxide semiconductor layer, the second insulating layer covering a side surface of the first oxide semiconductor layer;

a source electrode layer and a drain electrode layer over the second insulating layer, the source electrode layer and the drain electrode layer being electrically connected to the second oxide semiconductor layer;

a second gate electrode layer over the second insulating layer; and

a third insulating layer over the second gate electrode layer,

wherein the pixel electrode layer is over the third insulating layer.

11. The device according to claim 10, wherein the first oxide semiconductor layer comprises indium, gallium, and zinc.

12. The display device according to claim 10, wherein the first oxide semiconductor layer comprises microcrystal.

13. The display device according to claim 10, wherein the first gate electrode layer is electrically connected to the second gate electrode layer.

14. The display device according to claim 10, wherein the source electrode layer and the drain electrode layer each comprise a conductive layer of an element selected from Al, Cr, Cu, Ta, Ti, Mo, and W as a main component, or a stack of any of these elements in combination.

15. The display device according to claim 10, further comprising a capacitor portion,

wherein the capacitor portion includes a capacitor wiring layer and a capacitor electrode layer overlapped with the capacitor wiring layer, and

wherein the capacitor wiring layer and the capacitor electrode layer each have a light-transmitting property.

16. The display device according to claim 10, wherein the display device is a touch display.

17. A phone comprising the display device according to claim 16.

18. A watch comprising the display device according to claim 16.