Method of growing group III nitride crystals

• US 9,202,872 B2
• Filed: 03/15/2013
• Issued: 12/01/2015
• Est. Priority Date: 04/07/2006
• Status: Active Grant

• Current Assignee: Seoul Semiconductor Co., Ltd.
• Original Assignee: Seoul Semiconductor Co., Ltd., SixPoint Materials, Inc.
• Inventors: Hashimoto, Tadao, Letts, Edward, Hoff, Sierra
• Primary Examiner(s): Kornakov, Michael
• Assistant Examiner(s): Qi, Hua
• Application Number:
  US13/834,015
• Publication Number:
  US 20140087113A1
• Time in Patent Office: 991 Days
• US Class Current: 1/1
• CPC Class Codes: B28D 5/045 by cutting with wires or closed-loop blades B28D5/042 takes precedence
• CPC Class Codes: C30B 25/20 the substrate being of the same materials as the epitaxial layer
• CPC Class Codes: C30B 29/403 AIII-nitrides
• CPC Class Codes: C30B 29/406 Gallium nitride
• CPC Class Codes: C30B 29/64 Flat crystals, e.g. plates, strips or discs
• CPC Class Codes: C30B 33/06 Joining of crystals
• CPC Class Codes: C30B 7/10 by application of pressure, e.g. hydrothermal processes
• CPC Class Codes: C30B 7/105 using ammonia as solvent, i.e. ammonothermal processes
• CPC Class Codes: H01L 21/02389 Nitrides
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/02628 using solutions
• CPC Class Codes: H01L 29/045 by their particular orientation of crystalline planes
• CPC Class Codes: H01L 29/2003 Nitride compounds
• CPC Class Codes: H01L 29/32 the imperfections being within the semiconductor body
• CPC Class Codes: Y10S 117/902 Specified orientation, shape, crystallography, or size of seed or substrate
• CPC Class Codes: Y10T 428/192 Sheets or webs coplanar

Abstract

The present invention provides a method of growing an ingot of group III nitride. Group III nitride crystals such as GaN are grown by the ammonothermal method on both sides of a seed to form an ingot and the ingot is sliced into wafers. The wafer including the first-generation seed is sliced thicker than the other wafers so that the wafer including the first-generation seed does not break. The wafer including the first-generation seed crystal can be used as a seed for the next ammonothermal growth.

Claims

1. A method of growing an ingot of group III nitride composed of Ga_xAl_yIn_1-x-yN (0≦

x≦

1, 0≦

x+y≦

1) comprising;

(a) growing a first group III nitride crystal on a first face of a seed; and

(b) growing a second group III nitride crystal on a second face of the seed;

wherein the seed comprises;

(1) a first layer comprised of a plurality of wafers, said plurality being comprised of at least a first group III nitride wafer and a second group III nitride wafer;

a) wherein the first group III nitride wafer has an edge that is adjacent to an exposed face and a hidden face of the first group III nitride wafer in the seed;

b) wherein the second group III nitride wafer has an edge that is adjacent to an exposed face and a hidden face of the second group III nitride wafer in the seed;

c) wherein the first group III nitride wafer'"'"'s edge faces the second group III nitride wafer'"'"'s edge; and

d) wherein said plurality of wafers in the first layer all have the same crystal lattice orientation, thereby establishing a crystal lattice orientation for the first face of the seed;

(2) a second layer comprised of a plurality of wafers, said plurality being comprised of at least a third group III nitride wafer and a fourth group III nitride wafer;

a) wherein the third group III nitride wafer has an edge adjacent to an exposed face and a hidden face of the third group III nitride wafer in the seed;

b) wherein the fourth group III nitride wafer has an edge adjacent to an exposed face and a hidden face of the fourth group III nitride wafer in the seed;

c) wherein the third group III nitride wafer'"'"'s edge faces the fourth group III nitride wafer'"'"'s edge; and

d) wherein the plurality of wafers in the second layer all have the same crystal lattice orientation, thereby establishing a crystal lattice orientation for the second face of the seed;

(3) wherein the first group III nitride wafer'"'"'s edge and the second group III nitride wafer'"'"'s edge are each positioned upon the hidden face of the third group III nitride wafer of the second layer;

(4) wherein the third group III nitride wafer'"'"'s edge and the fourth group III nitride wafer'"'"'s edge are each positioned upon the hidden face of the second group III nitride wafer of the first layer; and

(5) wherein the crystal lattice orientation at the first face of the seed is identical to the crystal lattice orientation at the second face of the seed.

2. A method according to claim 1, wherein the crystal lattice orientation of the first face of the seed is c-plane having a misorientation within +/−

10 degrees and the crystal lattice orientation of the second face of the seed is c-plane having a misorientation within +/−

10 degrees, and the exposed faces of the first, second, third, and fourth group III nitride wafers are nitrogen polar surfaces.

3. A method according to claim 1, wherein the first and second group III nitride crystals are grown simultaneously in supercritical ammonia.

4. A method according to claim 1, wherein an adhesive layer is inserted between the first layer and the second layer to adhere the layers together.

5. A method according to claim 4, wherein the adhesive layer is metallic.

6. A method according to claim 5, wherein the metal comprises gallium or indium.

7. A method according to claim 1, wherein the first and second layers composed of the group III nitride wafers are attached together by applying pressure.

8. A method according to claim 1, wherein the first layer has a long edge, and wherein the long edge of the first layer is aligned to a-plane of the first wafer and the second wafer, with misorientation within +/−

10 degree.

9. A method according to claim 1, wherein the second layer has a long edge, and wherein the long edge of the second layer is aligned to a-plane of the third wafer and the fourth wafer, with misorientation within +/−

10 degree.

10. A method according to claim 1, wherein the group III nitride comprises gallium nitride.