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Electrode arrangements for quadrature suppression in inertial sensors

  • US 9,207,081 B2
  • Filed: 12/06/2013
  • Issued: 12/08/2015
  • Est. Priority Date: 05/21/2009
  • Status: Active Grant
First Claim
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1. An inertial sensor comprising:

  • a substrate having a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode; and

    a resonator disposed in a device layer above the substrate and having at least one shuttle including a plurality of plates, each plate completely overlaying a corresponding acceleration sensor electrode and partially overlaying the pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode, such that capacitive coupling between the plate and each of the quadrature adjusting electrodes is dependent upon the position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the position of the at least one shuttle.

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