Electrode arrangements for quadrature suppression in inertial sensors
First Claim
1. An inertial sensor comprising:
- a substrate having a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode; and
a resonator disposed in a device layer above the substrate and having at least one shuttle including a plurality of plates, each plate completely overlaying a corresponding acceleration sensor electrode and partially overlaying the pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode, such that capacitive coupling between the plate and each of the quadrature adjusting electrodes is dependent upon the position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the position of the at least one shuttle.
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Accused Products
Abstract
A substrate for an inertial sensor system includes a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode, where each electrode arrangement is capable of being overlaid by a corresponding plate of a shuttle such that the plate completely overlays the acceleration sensor electrode and partially overlays the pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode such that capacitive coupling between the plate and each of the quadrature adjusting electrodes is dependent upon the rotational position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the rotational position of the at least one shuttle.
69 Citations
27 Claims
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1. An inertial sensor comprising:
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a substrate having a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode; and a resonator disposed in a device layer above the substrate and having at least one shuttle including a plurality of plates, each plate completely overlaying a corresponding acceleration sensor electrode and partially overlaying the pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode, such that capacitive coupling between the plate and each of the quadrature adjusting electrodes is dependent upon the position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the position of the at least one shuttle. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 21, 22)
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16. An apparatus for use with a resonator having at least one shuttle including a plurality of plates, the apparatus comprising:
a substrate having a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode, each electrode arrangement capable of being overlaid by a corresponding plate of the at least one shuttle such that the plate completely overlays the acceleration sensor electrode and partially overlays the pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode such that capacitive coupling between the plate and each of the quadrature adjusting electrodes is dependent upon the position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the position of the at least one shuttle. - View Dependent Claims (17, 18, 19, 20, 23, 24)
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25. An inertial sensor comprising:
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a shuttle arranged in a device plane and configured to oscillate in the device plane; at least one out-of-plane quadrature adjusting electrode configured such that capacitive coupling between the shuttle and each of the at least one quadrature adjusting electrode is dependent upon the position of the shuttle as it oscillates; and an out-of-plane acceleration sensor electrode configured such that capacitive coupling between the shuttle and each of the at least one quadrature adjusting electrode is substantially independent of the position of the shuttle as it oscillates. - View Dependent Claims (26, 27)
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Specification