Solar cell, method for manufacturing dopant layer, and method for manufacturing solar cell
First Claim
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1. A method of manufacturing a solar cell, comprising:
- forming a dopant layer to a first surface of a semiconductor substrate including a base dopant by doping a dopant of a first conductive type and a counter dopant of a second conductive type opposite to the first conductive type, wherein a doping amount of the counter dopant is less than a doping amount of the dopant of the first conductive type;
simultaneously activating the dopant of the first conductive type and the counter dopant of the second conductive type by a same heat-treatment process after forming the dopant layer; and
forming an electrode electrically connected to the dopant layer after activating the dopant of the first conductive type and the counter dopant of the second conductive type;
wherein the counter dopant is counter to the dopant of the first conductive type.
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Abstract
In a method of manufacturing a solar cell includes forming a dopant layer by doping a dopant of a first conductive type and a counter dopant of a second conductive type opposite to the first conductive type to a surface of a semiconductor substrate. Here, a doping amount of the counter dopant is less than a doping amount of the dopant.
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Citations
18 Claims
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1. A method of manufacturing a solar cell, comprising:
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forming a dopant layer to a first surface of a semiconductor substrate including a base dopant by doping a dopant of a first conductive type and a counter dopant of a second conductive type opposite to the first conductive type, wherein a doping amount of the counter dopant is less than a doping amount of the dopant of the first conductive type; simultaneously activating the dopant of the first conductive type and the counter dopant of the second conductive type by a same heat-treatment process after forming the dopant layer; and forming an electrode electrically connected to the dopant layer after activating the dopant of the first conductive type and the counter dopant of the second conductive type; wherein the counter dopant is counter to the dopant of the first conductive type. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of manufacturing a solar cell, comprising:
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forming a dopant layer to a first surface of a semiconductor substrate including a base dopant by doping a dopant of a first conductive type and a counter dopant of a second conductive type opposite to the first conductive type, wherein a doping amount of the counter dopant is less than a doping amount of the dopant of the first conductive type; and forming an electrode electrically connected to the dopant layer after forming the dopant layer, wherein, while forming the dopant layer, the counter dopant is entirely doped to the first surface of the semiconductor substrate to be included in an entire portion of the dopant layer, and wherein the counter dopant is counter to the dopant of the first conductive type.
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Specification