Miniature thermoelectric power generator
First Claim
1. A thermoelectric device, comprising:
- a stack of thermoelectric modules, each thermoelectric module comprising;
an inner thermally conductive ring, the inner thermally conductive ring providing a channel for hot gas to pass therethrough;
an outer thermally conductive ring, an outer surface of the outer thermally conductive ring remaining cooler than the inner thermally conductive ring;
a radially-oriented thermopile in connection with the inner thermally conductive ring and the outer thermally conductive ring, wherein the radially-oriented thermopile has azimuthally alternating L-shaped regions of thermoelectric material in a direction following a circumference of the outer thermally conductive ring, each L-shaped region overlapping a portion of the adjacent L-shaped region; and
an annular supporting membrane perpendicular to the channel, wherein the annular supporting membrane is disposed between the radially-oriented thermopile and a top surface of the inner and outer thermally conductive rings, and wherein each top surface of the inner and outer thermally conductive rings is perpendicular to the channel, wherein the annular supporting membrane comprises a thermally insulating material.
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Abstract
The subject invention pertains to thermoelectric power generation. According to certain embodiments, a stack of silicon-micromachined chips can be connected to form a cylindrical heat exchanger that enables a large, uniform temperature difference across a radially-oriented thermopile. Each layer in the stack can comprise two thermally-isolated concentric silicon rings connected by a polyimide membrane that supports patterned thermoelectric thin films. The polyimide membrane can be formed by selectively etching away the supporting silicon, resulting in thermally-isolated inner and outer rings. In operation, hot gas can flow through a finned central channel, and an external cross flow can enhance heat transfer to ambient to keep the outer surfaces cool. The resulting temperature gradient across the thermopile generates a voltage potential across the open ends due to the Seebeck effect. When connected to a load, current flows, and electrical power is supplied by the generated voltage potential caused by the temperature gradient.
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Citations
13 Claims
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1. A thermoelectric device, comprising:
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a stack of thermoelectric modules, each thermoelectric module comprising; an inner thermally conductive ring, the inner thermally conductive ring providing a channel for hot gas to pass therethrough; an outer thermally conductive ring, an outer surface of the outer thermally conductive ring remaining cooler than the inner thermally conductive ring; a radially-oriented thermopile in connection with the inner thermally conductive ring and the outer thermally conductive ring, wherein the radially-oriented thermopile has azimuthally alternating L-shaped regions of thermoelectric material in a direction following a circumference of the outer thermally conductive ring, each L-shaped region overlapping a portion of the adjacent L-shaped region; and an annular supporting membrane perpendicular to the channel, wherein the annular supporting membrane is disposed between the radially-oriented thermopile and a top surface of the inner and outer thermally conductive rings, and wherein each top surface of the inner and outer thermally conductive rings is perpendicular to the channel, wherein the annular supporting membrane comprises a thermally insulating material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A thermoelectric device, comprising:
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a stack of thermoelectric modules, each thermoelectric module comprising; an inner thermally conductive ring, the inner thermally conductive ring providing a channel for hot gas to pass therethrough; an outer thermally conductive ring, an outer surface of the outer thermally conductive ring remaining cooler than the inner thermally conductive ring; a radially-oriented thermopile in connection with the inner thermally conductive ring and the outer thermally conductive ring, wherein the radially-oriented thermopile has azimuthally alternating regions of thermoelectric material in a direction following a circumference of the outer thermally conductive ring; and an annular supporting membrane perpendicular to the channel and in overlying relationship with a top surface of the inner and outer thermally conductive rings and, wherein the radially-oriented thermopile is disposed on the annular supporting membrane and each top surface of the inner and outer thermally conductive rings is perpendicular to the channel; wherein the inner and outer thermally conductive rings comprise silicon; and
wherein the annular supporting membrane comprises;a silicon dioxide pattern on a top surface of the silicon inner and outer thermally conductive rings; and an annular polyimide membrane on the silicon dioxide pattern, wherein the radially-oriented thermopile is disposed on the annular polyimide membrane.
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13. A thermoelectric device, comprising:
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a stack of thermoelectric modules, each thermoelectric module comprising; an inner thermally conductive ring, the inner thermally conductive ring providing a channel for hot gas to pass therethrough; an outer thermally conductive ring, an outer surface of the outer thermally conductive ring remaining cooler than the inner thermally conductive ring; a radially-oriented thermopile perpendicular to the channel and in overlying relationship with a top surface of the inner thermally conductive ring and a top surface of the outer thermally conductive ring, wherein the radially-oriented thermopile has azimuthally alternating L-shaped regions of thin-film thermoelectric material in a direction following a circumference of the outer thermally conductive ring, each L-shaped region of the adjacent L-shaped region; and
an annular supporting membrane perpendicular to the channel, wherein the annular supporting membrane is disposed between the radially-oriented thermopile and a top surface of the inner and outer thermally conductive rings,wherein each top surface of the inner and outer thermally conductive rings is perpendicular to the channel, and wherein the annular supporting membrane comprises a thermally insulating material.
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Specification