Microelectromechanical gyroscope with open loop reading device and control method
First Claim
1. A device, comprising:
- a first mass;
a second mass coupled to the first mass to oscillate in response to the first mass;
a driving circuit coupled to the first mass to form a feedback control loop and to maintain the first mass in oscillation at a resonance frequency;
a reading circuit coupled to the second mass to detect displacements of the second mass; and
a read signal generator structured to supply to the second mass at least one read signal that varies with the resonance frequency.
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Abstract
A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.
39 Citations
20 Claims
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1. A device, comprising:
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a first mass; a second mass coupled to the first mass to oscillate in response to the first mass; a driving circuit coupled to the first mass to form a feedback control loop and to maintain the first mass in oscillation at a resonance frequency; a reading circuit coupled to the second mass to detect displacements of the second mass; and a read signal generator structured to supply to the second mass at least one read signal that varies with the resonance frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A gyroscope, comprising:
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a first mass configured to oscillate along a first axis; a second mass coupled to the first mass and configured to oscillate in response to the first mass; a driving circuit coupled to the first mass to form a feedback control loop and to maintain the first mass in oscillation at a resonance frequency; a reading circuit coupled to the second mass to detect displacements of the second mass with respect to a second axis; and a read signal generator structured to supply to the second mass at least one read signal that varies with the resonance frequency. - View Dependent Claims (12, 13, 14)
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15. A system, including:
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a gyroscope including; a first mass; and a second mass coupled to the first mass to oscillate in response to the first mass; a driving circuit coupled to the first mass to form a feedback control loop and to maintain the first mass in oscillation at a resonance frequency; a reading circuit coupled to the second mass to detect displacements of the second mass, the reading circuit including a read signal generator structured to supply to the second mass at least one read signal that varies with the resonance frequency; and a control circuit coupled to the gyroscope, the driving circuit, and the reading circuit. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification