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Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures

  • US 9,217,756 B2
  • Filed: 03/15/2013
  • Issued: 12/22/2015
  • Est. Priority Date: 03/15/2013
  • Status: Active Grant
First Claim
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1. A MEMS resonator comprising:

  • two resonating masses having an anti-phase and in-phase resonance mode, each mode having a resonance frequency; and

    an anti-phase resonance levering system coupled to the two resonating masses to stiffen and/or dampen the in-phase resonance mode while leaving the anti-phase resonance mode compliant by effectively raising the in-phase resonance frequency above the anti-phase resonance frequency, and potentially creating a large frequency separation between the two resonance modes, so that energy transfer is reduced between the two modes, allowing for robustness to external acceleration, because the in-phase mode is of a higher frequency,wherein the anti-phase resonance levering system comprises a plurality of levers and a plurality of clamped-clamped beams, the plurality of levers coupled to the two resonating masses and to the plurality of clamped-clamped beams via a plurality of springs.

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