CMOS integrated method for the fabrication of thermopile pixel with umbrella absorber on semiconductor substrate

• US 9,219,185 B2
• Filed: 12/19/2013
• Issued: 12/22/2015
• Est. Priority Date: 12/19/2013
• Status: Active Grant

• Current Assignee: Excelitas Technologies Singapore Pte., Ltd.
• Original Assignee: Excelitas Technologies Singapore Pte., Ltd.
• Inventors: Vasseur, Philippe, Karagoezoglu, Hermann, Marinescu, Radu M., Huminic, Grigore D.
• Primary Examiner(s): Lee, Cheung
• Application Number:
  US14/134,531
• Publication Number:
  US 20150179864A1
• Time in Patent Office: 733 Days
• US Class Current: 1/1
• CPC Class Codes: G01J 5/0225 Shape of the cavity itself or of elements contained in or suspended over the cavity
• CPC Class Codes: G01J 5/024 Special manufacturing steps or sacrificial layers or layer structures
• CPC Class Codes: G01J 5/12 using thermoelectric elements, e.g. thermocouples
• CPC Class Codes: H01L 31/02 Details
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Abstract

A method of manufacturing a pixel structure having an umbrella absorber is disclosed. The method includes providing a substrate with a membrane on a first surface of the substrate. The membrane has one or more openings that expose one or more portions of the first surface, and includes a thermopile. A sacrificial layer is deposited on the membrane and in the one or more openings. The sacrificial layer is patterned to expose a portion of the membrane associated with one or more hot junctions of the thermopile. A rigid, thermally-conductive layer is formed on the sacrificial layer and on the exposed portion of the membrane associated with the one or more hot junctions of the thermopile. An absorber is deposited on the rigid, thermally-conductive layer. A cavity is formed in the substrate from a second surface of the substrate to the membrane and the sacrificial layer is removed.

Claims

1. A method comprising:

providing a substrate with a membrane on a first surface of the substrate,

wherein the membrane has one or more openings that expose one or more portions of the first surface, and includes a thermopile;

depositing a sacrificial layer on the membrane and in the one or more openings;

patterning the sacrificial layer to expose a portion of the membrane associated with one or more hot junctions of the thermopile;

forming a rigid, thermally-conductive layer on the sacrificial layer and on the exposed portion of the membrane associated with the one or more hot junctions of the thermopile;

depositing an absorber on the rigid, thermally-conductive layer;

forming a cavity in the substrate from a second surface of the substrate to the membrane; and

removing the sacrificial layer.

2. The method of claim 1, further comprising:

providing an etching mask on the second surface of the substrate prior to forming the cavity in the substrate.

3. The method of claim 2, wherein forming the cavity in the substrate comprises etching a portion of the substrate exposed through the etching mask, anisotropically.

4. The method of claim 3, wherein forming the cavity in the substrate further comprises:

soft landing the anisotropic etch near the membrane.

5. The method of claim 4, wherein removing the sacrificial layer comprises:

isotropically etching the sacrificial layer,

wherein the isotropic etching removes the sacrificial layer from the one or more openings in the membrane and removes portions of the substrate beneath the one or more openings from the first surface of the substrate to the cavity.

6. The method of claim 5, wherein the isotropic etching is selective, removing the sacrificial layer and the substrate, but not the absorber material;

or removing the sacrificial layer but not the substrate and the absorber material.

7. The method of claim 3, further comprising:

forming an etch barrier in the substrate before the anisotropic etching,

wherein the etch barrier surrounds a portion of the substrate that is to be removed by the anisotropic etching.

8. The method of claim 7, wherein the anisotropic etching comprises etching from the second surface of the substrate to the membrane and to the etch barrier.

9. The method of claim 7, wherein forming the etch barrier comprises:

forming a trench in the first surface of the substrate;

depositing a passivation layer on the first surface of the substrate and in the trench, wherein the deposited passivation layer substantially conforms to the contours of the first surface of the substrate and the trench in the first surface;

after depositing the passivation layer, depositing a fill material on the first surface of the substrate and in the trench to thereby create a substantially planar fill material surface;

removing a portion of the fill material and a portion of the deposited passivation layer to expose a substantially planar surface.

10. The method of claim 9, wherein the passivation layer is a material configured to remain intact when exposed to conditions associated with the anisotropic etching.

11. The method of claim 9, further comprising placing the membrane on the substantially planar surface.

12. The method of claim 9, wherein the etch barrier is a sacrificial layer, and wherein, upon removal of the etch barrier, the trench is contiguous with the cavity.

13. The method of claim 7, wherein removing the sacrificial layer comprises isotropically etching the sacrificial layer,

wherein the isotropic etching removes the sacrificial layer from the one or more openings in the membrane.

14. The method of claim 1, further comprising:

patterning the absorber and the rigid, thermally-conductive layer so that, after the sacrificial layer has been removed, a portion of the absorber and a portion of the rigid, thermally-conductive layer is suspended over corresponding portions of the membrane.

15. The method of claim 1, wherein patterning the sacrificial layer to expose the portion of the membrane comprises:

forming a step or slope in a side wall of a hole thus formed in the sacrificial layer.

16. The method of claim 1, wherein the absorber has a thickness that is greater than 3 micrometers.

17. The method of claim 1, wherein the membrane is configured to electrically insulate the thermopile from the rigid, thermally-conductive layer.

18. The method of claim 1, wherein the absorber comprises a mixture of one or more organic compounds and one or more inorganic compounds.

19. The method of claim 1, wherein the second surface of the substrate is opposite and substantially parallel to the first surface of the substrate.

20. The method of claim 1, wherein the absorber is protected or configured to remain intact when exposed to conditions associated with removal of the sacrificial layer.

21. The method of claim 1, wherein the sacrificial layer is formed by multiple deposition steps and forms a substantially planar upper surface.