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Removal of spurious microwave modes via flip-chip crossover

  • US 9,219,298 B2
  • Filed: 03/15/2013
  • Issued: 12/22/2015
  • Est. Priority Date: 03/15/2013
  • Status: Active Grant
First Claim
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1. A coplanar waveguide (CPW) device, comprising:

  • a first chip including a patterned CPW; and

    a second chip disposed on the first chip, the second chip having a metallized trench that removes spurious microwave modes from the first chip;

    wherein the second chip is configured as a cap over the first chip, the second chip further comprising a first surface and a second surface opposite the first surface such that the first surface includes the metallized trench, and the second surface includes a control signal line that passes through a thickness of the second chip and extends between an opening in the metallized trench so as to provide a control signal to the patterned CPW.

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