Compensation and calibration for MEMS devices

• US 9,221,679 B2
• Filed: 01/22/2014
• Issued: 12/29/2015
• Est. Priority Date: 03/12/2013
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: Dar, Tehmoor M., Debeurre, Bruno J., Sessego, Raimondo P., Deken, Richard A., Geisberger, Aaron A., Suryanarayanan, Krithivasan
• Primary Examiner(s): Le, Son
• Application Number:
  US14/161,260
• Publication Number:
  US 20140260508A1
• Time in Patent Office: 706 Days
• Field of Search: 324/601
• US Class Current: 1/1
• CPC Class Codes: B81C 99/003 Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

A sensor system includes a microelectromechanical systems (MEMS) sensor, processing circuitry, measurement circuitry, stimulus circuitry and memory. The system is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processing circuitry, which is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. Output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor is monitored and used to calculate MEMS sensor characteristics. Methods for monitoring and calibrating MEMS sensors are also provided.

Claims

1. A microelectromechanical systems (MEMS) sensor system comprising:

a MEMS sensor configured to provide a first output signal responsive to, and indicative of, a physical displacement of a mechanical portion the MEMS sensor;

measurement circuitry electrically coupled to the MEMS sensor and having signal processing circuitry electrically coupled to a first switch, the measurement circuitry configured to process the first output signal in the signal processing circuitry to generate and provide to the switch a fourth processed signal corresponding to the first output signal and indicative of a physical displacement of a mechanical portion of the MEMS sensor, the measurement circuitry further configured to provide, as it is generated, the fourth processed signal external to the measurement circuitry or to additional circuitry of the measurement circuitry based on the first switch configuration;

stimulus circuitry electrically coupled to the MEMS sensor and configured to provide a second stimulus signal to the MEMS sensor responsive to a third signal received by the stimulus circuitry, the second stimulus signal configured to cause a physical displacement of a mechanical portion of the MEMS sensor; and

a processor electrically coupled to the measurement circuitry and the stimulus circuitry, wherein the processor is configured to generate and provide the third signal to the stimulus circuitry, and wherein the processor is further configured to monitor the fourth processed signal indicative of a physical displacement of a mechanical portion of the MEMS sensor responsive to the second stimulus signal, as that fourth processed signal is generated, and wherein the processor is still further configured to process the fourth processed signal as it is received by the processor, to determine if that signal has converged with an expected value.

2. A MEMS sensor system as claimed in claim 1, wherein the processing circuitry is a sigma-delta modulator.

3. A MEMS sensor system as claimed in claim 2, further comprising a second switch electrically coupled to an output of the first switch and an input of a buffer, wherein the MEMS sensor system is configured to provide the fourth signal to the buffer or the processor based on the configuration of the second switch.

4. A MEMS sensor system as claimed in claim 1, further comprising a second switch electrically coupled to an output of the first switch and an input of a buffer, wherein the MEMS sensor system is configured to provide the fourth signal to the buffer or the processor based on the configuration of the second switch.

5. A MEMS sensor system as claimed in claim 1, wherein the processing circuitry is capacitance to voltage conversion circuitry, and further comprising analog to digital conversion circuitry electrically coupled to the first switch and the processor, wherein the analog to digital conversion circuitry is configured to convert the fourth signal from an analog signal to a digital signal and provide the resulting digital signal to the processor.

6. A MEMS sensor system as claimed in claim 1, wherein the processing circuitry is capacitance to voltage conversion circuitry, and further comprising:

analog to digital conversion circuitry electrically coupled to the first switch; and

,

a second switch electrically coupled to the analog to digital conversion circuitry, the processor, and a buffer that is also electrically coupled to the processor, wherein the analog to digital conversion circuitry is configured to convert the fourth signal from an analog signal to a digital signal and provide the resulting digital signal as an output to the second switch, and wherein the MEMS sensor system is configured to provide the resulting digital signal to the buffer or the processor based on the configuration of the second switch.

7. A MEMS sensor system as claimed in claim 1 wherein the processor is further configured to determine at least one characteristic of the MEMS sensor based on the fourth processed signal indicative of a physical displacement of the MEMS sensor.

8. A MEMS sensor system as claimed in claim 7 wherein the at least one characteristic is at least one of a frequency response characteristic, damping characteristic, spring constant characteristic, thickness or beam spacing.

9. A MEMS sensor system as claimed in claim 1, wherein the measurement circuitry is further configured to provide a sixth signal to the processor, and further comprises trim circuitry configured to store trim values associated with the MEMS sensor and combine the trim values with the first output signal to provide the sixth signal that is indicative of a physical displacement of the sensor.

10. A MEMS sensor system as claimed in claim 9, wherein the processor is further configured to process the indication of physical displacement due to the second stimulus signal to determine new trim values and provide the new trim values to the measurement circuitry for storage.

11. A MEMS sensor system as claimed in claim 9, wherein the trim values comprise at least one of an offset of the MEMS sensor and a gain of the MEMS sensor.

12. A MEMS sensor system as claimed in claim 4 wherein the processor is further configured to determine at least one characteristic of the MEMS sensor based on the fourth processed signal indicative of a physical displacement of the MEMS sensor.

13. A MEMS sensor system as claimed in claim 4, wherein the measurement circuitry is further configured to provide a sixth signal to the processor, and further comprises trim circuitry configured to store trim values associated with the MEMS sensor and combine the trim values with the first output signal to provide the sixth signal that is indicative of a physical displacement of the sensor.

14. A microelectromechanical systems (MEMS) sensor system comprising:

a MEMS sensor configured to provide a first output signal responsive to, and indicative of, a physical displacement of a mechanical portion the MEMS sensor;

measurement circuitry electrically coupled to the MEMS sensor and having signal processing circuitry electrically coupled to a first switch, the measurement circuitry configured to process the first output signal in the signal processing circuitry to generate and provide to the switch a fourth processed signal corresponding to the first output signal and indicative of a physical displacement of a mechanical portion of the MEMS sensor, the measurement circuitry further configured to provide, as it is generated, the fourth processed signal external to the measurement circuitry or to additional circuitry of the measurement circuitry based on the first switch configuration;

memory in electrical communication with the measurement circuitry and configured to store information associated with the fourth processed signal;

memory containing pre-determined stimulus signal pattern data;

a memory controller electrically coupled to the memory and control circuitry;

a digital to analog converter electrically coupled to the MEMS sensor; and

, a register electrically coupled to the digital to analog converter and the memory, wherein the memory controller is configured, responsive to the control circuitry, to cause the pre-determined stimulus signal pattern data to be provided from the memory to the digital to analog converter via the register, and wherein the digital to analog converter is configured to convert the pre-determined signal pattern data to an analog signal and provide it to the MEMS sensor as an input.

15. A MEMS sensor system as claimed in claim 14, further comprising additional processing circuitry removably coupled to the memory, wherein the additional processing circuitry is configured to read information associated with the fourth processed signal from the memory and process the information to determine at least one characteristic of the MEMS sensor using the read information.

16. A MEMS sensor system as claimed in claim 15, wherein the additional processing circuitry is further removably coupled to the measurement circuitry, and wherein the additional processing circuitry is further configured to determine MEMS sensor trim values based on the at least one characteristic of the MEMS sensor using the information associated with the fourth processed signal and provide the MEMS sensor trim values to the measurement circuitry for storage.

17. A MEMS sensor system as claimed in claim 16, wherein the trim values comprise at least one of an offset of the MEMS sensor and a gain of the MEMS sensor.

18. A method of monitoring and calibrating MEMS sensors in a system comprising a MEMS sensor, stimulus circuitry, measurement circuitry and a processor, comprising:

generating a second stimulus signal in stimulus circuitry electrically coupled to a MEMS sensor and a processor responsive to a third signal received by the stimulus circuitry from the processor, wherein the second stimulus signal is configured to cause a physical displacement of a mechanical portion of the MEMS sensor;

providing the second stimulus signal from the stimulus circuitry to the MEMS sensor to cause a mechanical portion of the MEMS sensor to displace responsive to the second stimulus signal;

providing, from the MEMS sensor, a first output signal responsive to, and indicative of, the physical displacement of the mechanical portion of the MEMS sensor;

receiving in measurement circuitry electrically coupled to the MEMS sensor, the first output signal from the MEMS sensor corresponding to the displacement, the measurement circuitry comprising processing circuitry electrically coupled to a first switch, the measurement circuitry configured to process the first output signal in the signal processing circuitry to generate and provide to the first switch a fourth processed signal corresponding to the first output signal and indicative of a physical displacement of a mechanical portion of the MEMS sensor;

providing the fourth processed signal, as it is generated, external to the measurement circuitry or to additional circuitry of the measurement circuitry based on the first switch configuration;

monitoring, as it is provided, in the processor, the fourth processed signal; and

comparing, in the processor, as it is provided, the value of the fourth signal to an expected output to determine if the difference between the fourth signal and expected output is less than a pre-determined threshold.

19. A method as claimed in claim 18, further including the steps of:

monitoring in the processor the amount of elapsed time that has passed without the difference falling below the pre-determined threshold; and

,

recognizing an error condition if the elapsed time reaches a pre-determined time limit.

20. A method as claimed in claim 19, further including the step of calculating and storing a new trim value for the MEMS sensor when the difference is less than the pre-determined threshold.