Nanochannel electrode devices
First Claim
1. A structure comprising:
- a pair of parallel electrodes located on a substrate, wherein each of said pair of parallel electrodes comprises at least a semiconductor fin, and a nanochannel is present between said pair of parallel electrodes;
a metal interconnect structure-containing layer comprising conductive structures embedded in at least one dielectric material layer, each of said conductive structures is electrically shorted to one of said pair of parallel electrodes; and
a contiguous cavity passing through said substrate and said at least one dielectric material layer, said contiguous cavity comprising said nanochannel.
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Accused Products
Abstract
A nanoscale electrode device can be fabricated by forming a pair of semiconductor fins laterally spaced from each other by a uniform distance and formed on a substrate. The pair of semiconductor fins can function as a pair of electrodes that can be biased to detect the leakage current through a nanoscale string to pass therebetween. A nanochannel having a uniform separation distance is formed between the pair of semiconductor fins. The nanochannel may be defined by a gap between a pair of raised active regions formed on the pair of semiconductor fins, or between proximal sidewalls of the pair of semiconductor fins. An opening is formed through the portion of the substrate underlying the region of the nanochannel to enable passing of a nanoscale string.
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Citations
10 Claims
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1. A structure comprising:
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a pair of parallel electrodes located on a substrate, wherein each of said pair of parallel electrodes comprises at least a semiconductor fin, and a nanochannel is present between said pair of parallel electrodes; a metal interconnect structure-containing layer comprising conductive structures embedded in at least one dielectric material layer, each of said conductive structures is electrically shorted to one of said pair of parallel electrodes; and a contiguous cavity passing through said substrate and said at least one dielectric material layer, said contiguous cavity comprising said nanochannel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification