Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
First Claim
Patent Images
1. An imaging system comprising:
- an integrated circuit comprising a two-dimensional array of photosensors, wherein the photosensors are configured to obtain a plurality of pixelated images, each of the plurality of images at least partially overlapping another of the plurality of images, and each of the plurality of images mutually offset from each other of the plurality of images by at least one pixel; and
a composite image generator configured to generate a composite image by digitally adding together corresponding pixels of said plurality of images, thereby providing a composite image.
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Abstract
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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Citations
8 Claims
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1. An imaging system comprising:
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an integrated circuit comprising a two-dimensional array of photosensors, wherein the photosensors are configured to obtain a plurality of pixelated images, each of the plurality of images at least partially overlapping another of the plurality of images, and each of the plurality of images mutually offset from each other of the plurality of images by at least one pixel; and a composite image generator configured to generate a composite image by digitally adding together corresponding pixels of said plurality of images, thereby providing a composite image. - View Dependent Claims (2, 3)
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4. A camera comprising:
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an integrated circuit comprising a two-dimensional array of photosensors, wherein the photosensors are configured to obtain a plurality of pixelated images, each of the plurality of images at least partially overlapping another of the plurality of images, and each of the plurality of images mutually offset from each other of the plurality of images by at least one pixel; and a composite image generator which is configured to generate a composite image by digitally adding together corresponding pixels of said plurality of images, thereby providing a composite image. - View Dependent Claims (5, 6)
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7. A method for creating enhanced images, the method comprising:
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acquiring a plurality of substantially overlapping pixelated images, each of the plurality of images at least partially overlapping another of the plurality of images, and each of the plurality of images mutually offset from each other of the plurality of images by at least one pixel; and creating an enhanced image by digitally adding together corresponding pixels of said plurality of images. - View Dependent Claims (8)
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Specification