Exposure photolithography methods

• US 9,235,119 B2
• Filed: 08/12/2014
• Issued: 01/12/2016
• Est. Priority Date: 01/08/2008
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Chen, Kuang-Jung, Huang, Wu-Song, Kwong, Ranee Wai-Ling, Liu, Sen, Varanasi, Pushkara R.
• Primary Examiner(s): Eoff, Anca
• Application Number:
  US14/457,149
• Publication Number:
  US 20140349237A1
• Time in Patent Office: 518 Days
• Field of Search: 430/270.1, 430/311, 430/312, 430/313, 430/322, 430/326, 430/921, 430/925
• US Class Current: 1/1
• CPC Class Codes: G03F 7/0045 with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
• CPC Class Codes: G03F 7/038 Macromolecular compounds which are rendered insoluble or differentially wettable G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021
• CPC Class Codes: G03F 7/0382 the macromolecular compound being present in a chemically amplified negative photoresist composition
• CPC Class Codes: G03F 7/0392 the macromolecular compound being present in a chemically amplified positive photoresist composition
• CPC Class Codes: G03F 7/095 having more than one photosensitive layer G03F7/075 takes precedence
• CPC Class Codes: G03F 7/20 Exposure; Apparatus therefor photographic printing apparatus for making copies G03B27/00
• CPC Class Codes: G03F 7/2022 Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
• CPC Class Codes: G03F 7/30 Imagewise removal using liquid means
• CPC Class Codes: G03F 7/38 Treatment before imagewise removal, e.g. prebaking G03F7/265 takes precedence
• CPC Class Codes: G03F 7/70466 Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature stitching G03F7/70475
• CPC Class Codes: Y10S 430/12 Nitrogen compound containing

Abstract

A method that forms a film of photoresist composition on a substrate and exposes a first and second region of the film to radiation through a first and second mask having a first and second image pattern, respectively. The photoresist composition includes a polymer comprising at least one acid labile group, a photosensitive acid generator capable of generating a first amount of acid upon exposure to a first dose of radiation and of generating a second amount of acid upon exposure to a second dose of radiation, and a photosensitive base generator capable of generating a first amount of base upon exposure to the first dose of radiation and of generating a second amount of base upon exposure to the second dose of radiation. The photosensitive acid generator includes (trifluoro-methylsulfonyloxy)-bicyclo[2.2.1]hept-5-ene-2,3-dicarboximide (MDT), N-hydroxy-naphthalimide dodecane sulfonate (DDSN), or a combination thereof. The photosensitive base generator includes a quaternary ammonium salt.

Claims

1. A method, comprising:

forming a film of a photoresist composition on a substrate;

exposing a first region of the film to radiation through a first mask having a first image pattern; and

exposing a second region of the film to radiation through a second mask having a second image pattern,

wherein the photoresist composition comprises;

a polymer having a structure comprising at least one acid labile group;

a photosensitive acid generator capable of generating a first amount of acid upon exposure to a first dose of radiation, said photosensitive acid generator capable of generating a second amount of acid upon exposure to a second dose of radiation, said second amount of acid greater than said first amount of acid, said second dose of radiation greater than said first dose of radiation, wherein the photosensitive acid generator comprises (trifluoro-methylsulfonyloxy)-bicyclo[2.2.1]hept-5-ene-2,3-dicarboximide (MDT), N-hydroxy-naphthalimide dodecane sulfonate (DDSN), or a combination thereof; and

a photosensitive base generator capable of generating a first amount of base upon exposure to said first dose of radiation, said photosensitive base generator capable of generating a second amount of base upon exposure to said second dose of radiation, said first amount of base greater than said first amount of acid, said second amount of base less than said second amount of acid,

wherein the photosensitive base generator is selected from the group consisting of quaternary ammonium salts, and,

wherein the quaternary ammonium salts have the following structure

2. The method of claim 1, said method further comprising

after said exposing the second region, baking the film at a temperature between about 80°

C. and about 150°

C.; and

after said exposing the first region and before said exposing the second region, baking the film at a temperature between about 80°

C. and about 150°

C.

3. The method of claim 1, said method further comprising:

after said exposing the second region, removing soluble portions of the film to leave a patterned layer remaining, said patterned layer having a photoresist pattern; and

after said removing the soluble portions of the film, transferring the photoresist pattern from the patterned layer to the substrate, said transferring comprising a method selected from the group consisting of depositing, implanting, electroplating, etching and combinations thereof.

4. The method of claim 1, where at least three groups of groups R³, R⁴, R⁸, and R⁹ are each independently an aryl or substituted aryl group.

5. The method of claim 4, wherein a first group, a second group, and a third group of the at least three groups is a first aryl group, a second aryl group, and a third aryl group, respectively, and wherein at least two groups of the first, second and third aryl groups are either a same aryl group or a different aryl group.

6. The method of claim 4, wherein a first group, a second group, and a third group of the at least three groups is a first aryl group, a second aryl group, and a substituted aryl group, respectively, and wherein the first aryl group and the second aryl group are either a same aryl group or a different aryl group.

7. The method of claim 4, wherein a first group, a second group, and a third group of the at least three groups is an aryl group, a first substituted aryl group, and a second substituted aryl group, respectively, and wherein the first substituted aryl group and the second substituted aryl group are either a same substituted aryl group or a different substituted aryl group.

8. The method of claim 4, wherein a first group, a second group, and a third group of the at least three groups is a first substituted aryl group, a second substituted aryl group, and a third substituted aryl group, respectively, and wherein at least two groups of the first, second and third substituted aryl groups are either a same substituted aryl group or a different substituted aryl group.

9. The method of claim 4, wherein a first group of the at least three groups is a substituted aryl group, and wherein a first group of the at least one group is an alkyl group.

10. The method of claim 4, wherein a first group of the at least three groups is a substituted aryl group, and wherein a first group of the at least one group is a substituted alkyl group.

11. The method of claim 1, where each group of groups R³, R⁴, R⁸, and R⁹ is a substituted aryl group, and wherein at least two groups of groups R³, R⁴, R⁸, and R⁹ are either a same substituted aryl group or a different substituted aryl group.

12. The method of claim 1, wherein a first group of at least one group is a substituted aryl group.

13. The method of claim 1, wherein a first group of the at least two groups is a substituted aryl group, and wherein a first group of the at least one group is an alkyl group.

14. The method of claim 1, wherein a first group of the at least two groups is a substituted aryl group, and wherein a first group of the at least one group is a substituted alkyl group.

15. The method of claim 1, wherein a first group and a second group of the at least two groups is a first aryl group and a second aryl group, respectively, and wherein the first aryl group and the second aryl group are either a same aryl group or a different aryl group.

16. The method of claim 1, wherein a first group and a second group of the at least two groups is a first substituted aryl group and a second substituted aryl group, respectively, and wherein the first substituted aryl group and the second substituted aryl group are either a same substituted aryl group or a different substituted aryl group.

17. The method of claim 1, wherein a first group and a second group of the at least two groups is an aryl group and a substituted aryl group, respectively.

18. A method, comprising:

forming a film of a photoresist composition on a substrate;

exposing a first region of the film to a first dose of radiation through a first mask having a first image pattern; and

exposing a second region of the film to a second dosed of radiation through a second mask having a second, different image pattern,

wherein the photoresist composition comprises;

a polymer having a structure comprising at least one acid labile group;

a photosensitive acid generator capable of generating a first amount of acid upon exposure to said first dose of radiation, said photosensitive acid generator capable of generating a second amount of acid upon exposure to said second dose of radiation, said second amount of acid greater than said first amount of acid, said second dose of radiation greater than said first dose of radiation, wherein the photosensitive acid generator comprises (trifluoro-methylsulfonyloxy)-bicyclo[2.2.1]hept-5-ene-2,3-dicarboximide (MDT), N-hydroxy-naphthalimide dodecane sulfonate (DDSN), or a combination thereof; and

a photosensitive base generator capable of generating a first amount of base upon exposure to said first dose of radiation, said photosensitive base generator capable of generating a second amount of base upon exposure to said second dose of radiation, said first amount of base greater than said first amount of acid, said second amount of base less than said second amount of acid,

wherein the photosensitive base generator is selected from the group consisting of quaternary ammonium salts, and,

wherein the quaternary ammonium salts have the following structure

19. The method of claim 18, wherein said exposing the second region is performed after said exposing the first region.