Semiconductor memory apparatus and temperature control method thereof
First Claim
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1. A semiconductor memory apparatus, comprising:
- a temperature adjustment unit suitable for adjusting a temperature of a memory cell; and
a temperature control unit suitable for sensing a temperature of the temperature adjustment unit, comparing a sensed temperature with a reference temperature range, and controlling the temperature adjustment unit to adjust the temperature thereof within the reference temperature range based on a comparison result,wherein the temperature adjustment unit is formed over a cell area of a semiconductor substrate in which a data storage region is formed.
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Abstract
A semiconductor memory apparatus and a temperature control method thereof are provided. The semiconductor memory apparatus includes a temperature adjustment unit suitable for adjusting a temperature of a memory cell, and a temperature control unit suitable for sensing a temperature of the temperature adjustment unit, comparing a sensed temperature with a reference temperature range, and controlling the temperature adjustment unit to adjust the temperature thereof within the reference temperature range based on a comparison result.
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19 Claims
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1. A semiconductor memory apparatus, comprising:
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a temperature adjustment unit suitable for adjusting a temperature of a memory cell; and a temperature control unit suitable for sensing a temperature of the temperature adjustment unit, comparing a sensed temperature with a reference temperature range, and controlling the temperature adjustment unit to adjust the temperature thereof within the reference temperature range based on a comparison result, wherein the temperature adjustment unit is formed over a cell area of a semiconductor substrate in which a data storage region is formed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A semiconductor memory apparatus including a semiconductor substrate with a cell are and a peripheral circuit area, comprising:
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a temperature adjustment unit suitable for adjusting a temperature of a memory cell; a temperature control unit suitable for sensing a temperature of the temperature adjustment unit, comparing a sensed temperature with a reference temperature range, and controlling the temperature adjustment unit to adjust the temperature thereof within the reference temperature range based on a comparison result; a word line region formed on the cell area of the semiconductor substrate; a switching device formed on the word line region; a data storage region formed on the switching device; and a metal line region formed over the switching device, wherein the data storage region is formed between the switching device and the metal line region, wherein the temperature adjustment unit is fanned in a rear surface of the semiconductor substrate. - View Dependent Claims (13, 14, 15, 16)
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17. A method of controlling a temperature of a semiconductor memory apparatus, the method comprising:
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measuring a temperature of a cell area of the semiconductor memory apparatus; comparing a measured temperature of the cell area with a reference temperature range; determining whether or not the measured temperature of the cell area is in the reference temperature range based on a result of the comparing; and heating the cell area for a set time based on a result of the determining of the measured temperature of the cell area, wherein the heating of the cell area for the set time comprises; supplying a current to the cell area when the measured temperature of the cell area is lower than the reference temperature range; and determining whether or not a heating time of cell area reaches the set time. - View Dependent Claims (18, 19)
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Specification