Contact plugs in SRAM cells and the method of forming the same
First Claim
1. A method comprising:
- forming a dielectric layer over a portion of a Static Random Access Memory (SRAM) cell, wherein the SRAM cell comprises;
a first pull-up transistor and a second pull-up transistor;
a first pull-down transistor and a second pull-down transistor forming cross-latched inverters with the first pull-up transistor and the second pull-up transistor; and
a first pass-gate transistor and a second pass-gate transistor connected to drains of the first pull-up transistor and the first pull-down transistor and drains of the second pull-up transistor and the second pull-down transistor, respectively;
forming and patterning a first mask layer over the dielectric layer, wherein the forming and the patterning of the first mask layer includes;
patterning a photo resist material disposed over the first mask layer; and
etching the first mask layer to transfer a pattern from the patterned photo resist material to the first mask layer such that the etched first mask layer includes an opening extending over a first source/drain fin of the SRAM cell, over a second source/drain fin of the SRAM cell, and over a third source/drain fin of the SRAM cell, wherein the opening extends uninterrupted across the entire SRAM cell along one dimension of the SRAM cell and has a substantially uniform width measured perpendicular to the one dimension;
thereafter, forming a second mask layer over the dielectric layer;
etching the dielectric layer using the first mask layer and the second mask layer in combination as an etching mask, wherein a first contact opening and a second contact opening are formed in the dielectric layer from the opening in the etched first mask layer;
wherein the first contact opening extends over and exposes both the first source/drain fin and the third source/drain fin;
forming a first discrete contact plug in the first contact opening electrically connected to the first source/drain fin and the third source/drain fin; and
forming a second discrete contact plug in the second contact opening connected to the second source/drain fin.
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Accused Products
Abstract
A method includes forming a dielectric layer over a portion of an SRAM cell. The SRAM cell includes a first pull-up transistor and a second pull-up transistor, a first pull-down transistor and a second pull-down transistor forming cross-latched inverters with the first pull-up transistor and the second pull-up transistor, and a first pass-gate transistor and a second pass-gate transistor connected to drains of the first pull-up transistor and the first pull-down transistor and drains of the second pull-up transistor and the second pull-down transistor, respectively. A first mask layer is formed over the dielectric layer and patterned. A second mask layer is formed over the dielectric layer and patterned. The dielectric layer is etched using the first mask layer and the second mask layer in combination as an etching mask, wherein a contact opening is formed in the dielectric layer. A contact plug is formed in the contact opening.
823 Citations
20 Claims
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1. A method comprising:
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forming a dielectric layer over a portion of a Static Random Access Memory (SRAM) cell, wherein the SRAM cell comprises; a first pull-up transistor and a second pull-up transistor; a first pull-down transistor and a second pull-down transistor forming cross-latched inverters with the first pull-up transistor and the second pull-up transistor; and a first pass-gate transistor and a second pass-gate transistor connected to drains of the first pull-up transistor and the first pull-down transistor and drains of the second pull-up transistor and the second pull-down transistor, respectively; forming and patterning a first mask layer over the dielectric layer, wherein the forming and the patterning of the first mask layer includes; patterning a photo resist material disposed over the first mask layer; and etching the first mask layer to transfer a pattern from the patterned photo resist material to the first mask layer such that the etched first mask layer includes an opening extending over a first source/drain fin of the SRAM cell, over a second source/drain fin of the SRAM cell, and over a third source/drain fin of the SRAM cell, wherein the opening extends uninterrupted across the entire SRAM cell along one dimension of the SRAM cell and has a substantially uniform width measured perpendicular to the one dimension; thereafter, forming a second mask layer over the dielectric layer; etching the dielectric layer using the first mask layer and the second mask layer in combination as an etching mask, wherein a first contact opening and a second contact opening are formed in the dielectric layer from the opening in the etched first mask layer; wherein the first contact opening extends over and exposes both the first source/drain fin and the third source/drain fin; forming a first discrete contact plug in the first contact opening electrically connected to the first source/drain fin and the third source/drain fin; and forming a second discrete contact plug in the second contact opening connected to the second source/drain fin. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method comprising:
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forming a Static Random Access Memory (SRAM) cell comprising a plurality of gate electrodes, and a plurality of active region strips, wherein the plurality of active region strips form transistors with the plurality of gate electrodes; forming an Inter-Layer Dielectric (ILD) over the plurality of gate electrodes and the plurality of active region strips; forming a first mask layer over the ILD, wherein the first mask layer covers first portions of the ILD, with second portions of the ILD exposed through openings in the first mask layer, wherein the forming of the first mask layer includes; forming a resist over the first mask layer; patterning the resist; and etching the first mask layer using the patterned resist to form the openings through which the second portions of the ILD are exposed, wherein the openings include a first opening of the first mask layer disposed over a first active region, a second active region, and a third active region of the plurality of active region strips, wherein the first opening of the first mask layer extends uninterrupted from a first boundary of the SRAM cell to a second boundary of the SRAM cell opposite the first boundary, and wherein the first opening has a substantially uniform width measured parallel to the first boundary and the second boundary; forming a second mask layer, wherein the second mask layer comprises portions filled into parts of the openings in the first mask layer; etching the ILD using the first mask layer and the second mask layer as an etching mask to form a plurality of contact openings in the ILD, wherein the etching forms a first contact opening and a second contact opening underlying the opening of the first mask layer; wherein the first contact opening extends over and exposes both the first active region and the third active region; and forming a plurality of contact plugs in the plurality of contact openings, wherein the plurality of contacts plugs includes; a first discrete contact plug within the first contact opening and electrically connected to the first active region and the third active region; and a second discrete contact plug within the second contact opening and electrically connected to the second active region; and wherein the active regions include source and drain regions of the transistors. - View Dependent Claims (12, 13, 14, 15)
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16. A method comprising:
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receiving a substrate having a circuit device formed thereupon, wherein the circuit device includes; a plurality of active regions of a plurality of transistors disposed on the substrate; a material layer disposed on the substrate; a first masking layer disposed on the material layer; and a photoresist disposed on the first masking layer; patterning the photoresist; etching the first masking layer to remove a portion of the first masking layer exposed by the patterned photoresist to form a cavity within the first masking layer extending over a first active region, a second active region, and a third active region of the plurality of active regions, wherein the cavity extends uninterrupted from a first cell boundary of the circuit device to an opposing second cell boundary of the circuit device, and wherein the cavity has a substantially uniform width measured parallel to the first cell boundary and the second cell boundary; forming a second masking layer on the substrate and within the cavity; patterning the second masking layer; etching the material layer to remove a portion of the material layer exposed by the etched first masking layer and the patterned second masking layer to form a first contact opening and a second contact opening from the cavity; wherein the first contact opening extends over and exposes both the first active region and the third active region; and forming a plurality of contact plugs within and extending through the etched material layer, wherein the plurality of contact plugs includes; a first discrete plug disposed in the first contact opening and electrically coupled to the first active region and the third active region, and a second discrete plug disposed in the second contact opening and coupled to the second active region; and wherein the active regions include source and drain regions of the transistors. - View Dependent Claims (17, 18, 19, 20)
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Specification